SG10201802974YA - Sputtering target and method for manufacturing same - Google Patents
Sputtering target and method for manufacturing sameInfo
- Publication number
- SG10201802974YA SG10201802974YA SG10201802974YA SG10201802974YA SG10201802974YA SG 10201802974Y A SG10201802974Y A SG 10201802974YA SG 10201802974Y A SG10201802974Y A SG 10201802974YA SG 10201802974Y A SG10201802974Y A SG 10201802974YA SG 10201802974Y A SG10201802974Y A SG 10201802974YA
- Authority
- SG
- Singapore
- Prior art keywords
- target
- sputtering target
- manufacturing same
- manufacturing
- cua
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
SPUTTERING TARGET AND METHOD FOR MANUFACTURING SAME OF THE DISCLOSURE Provided are a target capable of suppressing cracks in the target and suitable for forming, for example, a soft magnetic film of a heat-assisted magnetic recording medium, and a method for manufacturing the target. In a sputtering target having a composition formula expressed as Fe100-a-b-c-Cua-Sib-Mc in terms of atomic ratio, wherein 0.1≦ a≦ 5.0, 10.0≦ b≦ 20.0, 10.0≦ c≦ 25.0, and M is one or more elements selected from Nb and B, containing a remainder composed of unavoidable impurities, and having a bending strength of 500 MPa or more, a number of Fe phases having an inscribed circle diameter of 1 μm or greater is preferably less than 1.0 per 60000 μm 2. FIG. 1
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017089797 | 2017-04-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201802974YA true SG10201802974YA (en) | 2018-11-29 |
Family
ID=64478219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201802974YA SG10201802974YA (en) | 2017-04-28 | 2018-04-10 | Sputtering target and method for manufacturing same |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2018188726A (en) |
MY (1) | MY190417A (en) |
SG (1) | SG10201802974YA (en) |
TW (1) | TWI683008B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7238527B2 (en) * | 2018-08-09 | 2023-03-14 | 株式会社プロテリアル | Soft magnetic film for heat-assisted magnetic recording medium and sputtering target for forming soft magnetic film for heat-assisted magnetic recording medium |
TWI739563B (en) * | 2019-08-26 | 2021-09-11 | 日商日立金屬股份有限公司 | Fe-Co-Si-B-Nb series target |
WO2021039712A1 (en) * | 2019-08-26 | 2021-03-04 | 日立金属株式会社 | Fe-si-b-nb-based target |
JP7371494B2 (en) | 2019-12-27 | 2023-10-31 | 株式会社レゾナック | Magnetic recording media and magnetic storage devices |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4881989A (en) * | 1986-12-15 | 1989-11-21 | Hitachi Metals, Ltd. | Fe-base soft magnetic alloy and method of producing same |
JP2718261B2 (en) * | 1990-01-09 | 1998-02-25 | 住友金属工業株式会社 | Magnetic alloy and method for producing the same |
JP3253545B2 (en) | 1996-12-17 | 2002-02-04 | 日本鋼管株式会社 | Method and apparatus for eliminating clogging of coal loaded in coke oven coal |
US6784588B2 (en) * | 2003-02-03 | 2004-08-31 | Metglas, Inc. | Low core loss amorphous metal magnetic components for electric motors |
-
2018
- 2018-02-01 JP JP2018016445A patent/JP2018188726A/en active Pending
- 2018-04-03 TW TW107111824A patent/TWI683008B/en active
- 2018-04-10 SG SG10201802974YA patent/SG10201802974YA/en unknown
- 2018-04-24 MY MYPI2018701613A patent/MY190417A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2018188726A (en) | 2018-11-29 |
TW201839150A (en) | 2018-11-01 |
TWI683008B (en) | 2020-01-21 |
MY190417A (en) | 2022-04-21 |
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