SG10201609439YA - Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability - Google Patents

Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability

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Publication number
SG10201609439YA
SG10201609439YA SG10201609439YA SG10201609439YA SG10201609439YA SG 10201609439Y A SG10201609439Y A SG 10201609439YA SG 10201609439Y A SG10201609439Y A SG 10201609439YA SG 10201609439Y A SG10201609439Y A SG 10201609439YA SG 10201609439Y A SG10201609439Y A SG 10201609439YA
Authority
SG
Singapore
Prior art keywords
systems
methods
power supply
frequency modulation
radiofrequency power
Prior art date
Application number
SG10201609439YA
Other languages
English (en)
Inventor
Karim Ishtak
Sakiyama Yukinori
Rangineni Yaswanth
Augustyniak Edward
Keil Douglas
Chandrasekharan Ramesh
Lavoie Adrien
Leeser Karl
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of SG10201609439YA publication Critical patent/SG10201609439YA/en

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