SG10201403270WA - Storage facility - Google Patents
Storage facilityInfo
- Publication number
- SG10201403270WA SG10201403270WA SG10201403270WA SG10201403270WA SG10201403270WA SG 10201403270W A SG10201403270W A SG 10201403270WA SG 10201403270W A SG10201403270W A SG 10201403270WA SG 10201403270W A SG10201403270W A SG 10201403270WA SG 10201403270W A SG10201403270W A SG 10201403270WA
- Authority
- SG
- Singapore
- Prior art keywords
- storage
- gas
- outside
- storage space
- storage facility
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013134268A JP5979089B2 (ja) | 2013-06-26 | 2013-06-26 | 保管設備 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201403270WA true SG10201403270WA (en) | 2015-01-29 |
Family
ID=52116050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201403270WA SG10201403270WA (en) | 2013-06-26 | 2014-06-16 | Storage facility |
Country Status (6)
Country | Link |
---|---|
US (1) | US10274214B2 (zh) |
JP (1) | JP5979089B2 (zh) |
KR (1) | KR102245686B1 (zh) |
CN (1) | CN104253076B (zh) |
SG (1) | SG10201403270WA (zh) |
TW (1) | TWI610853B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG11201600256XA (en) * | 2013-09-26 | 2016-05-30 | Murata Machinery Ltd | Purging device and purging method |
KR101511053B1 (ko) * | 2014-01-23 | 2015-04-10 | 김광수 | 가축 운송시 복지 및 폐사방지용 운송 컨테이너 송풍장치 |
JP6160520B2 (ja) * | 2014-03-11 | 2017-07-12 | 株式会社ダイフク | 梯子及びそれを備えた収納棚用のメンテナンス設備 |
US9550219B2 (en) * | 2014-12-29 | 2017-01-24 | Daifuku Co., Ltd. | Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same |
JP6358143B2 (ja) * | 2015-03-26 | 2018-07-18 | 株式会社ダイフク | 半導体容器保管設備 |
JP6414525B2 (ja) | 2015-09-02 | 2018-10-31 | 株式会社ダイフク | 保管設備 |
JP6729115B2 (ja) * | 2016-03-31 | 2020-07-22 | 株式会社ダイフク | 容器収納設備 |
US10583983B2 (en) | 2016-03-31 | 2020-03-10 | Daifuku Co., Ltd. | Container storage facility |
JP6631446B2 (ja) * | 2016-09-09 | 2020-01-15 | 株式会社ダイフク | 物品収納設備 |
WO2018187208A1 (en) * | 2017-04-06 | 2018-10-11 | Daifuku America Corporation | Storage system including a vertical transfer device |
US10703563B2 (en) * | 2017-11-10 | 2020-07-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stocker |
KR102492801B1 (ko) * | 2019-03-22 | 2023-01-31 | 삼성전자주식회사 | 가스 용기 보관 장치 |
CN113291530B (zh) * | 2021-06-25 | 2023-06-09 | 西安奕斯伟硅片技术有限公司 | 一种用于硅片的真空包装设备及方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03284505A (ja) * | 1990-03-30 | 1991-12-16 | Daifuku Co Ltd | クリーン装置付き荷保管装置 |
JPH07133004A (ja) * | 1993-06-11 | 1995-05-23 | Nikon Corp | 基板保管装置 |
JPH09153533A (ja) * | 1995-12-01 | 1997-06-10 | Mitsubishi Electric Corp | 半導体ウエハ保管システムおよびそのシステムを使用した半導体装置の製造方式 |
JPH1179318A (ja) * | 1997-09-05 | 1999-03-23 | Toyota Autom Loom Works Ltd | 自動倉庫 |
JPH11168135A (ja) | 1997-12-03 | 1999-06-22 | Toshiba Corp | 基板保管装置および基板保管方法 |
JP2000016521A (ja) * | 1998-07-02 | 2000-01-18 | Murata Mach Ltd | 自動倉庫 |
JP4413376B2 (ja) * | 2000-05-29 | 2010-02-10 | 全協化成工業株式会社 | ウェハー保管装置 |
US6616524B2 (en) * | 2000-11-09 | 2003-09-09 | Gary A. Storck, Jr. | Raised floor air handling unit |
JP2003092456A (ja) * | 2001-07-11 | 2003-03-28 | Ricoh Co Ltd | 半導体発光素子及びその製造方法 |
JP2003092345A (ja) | 2001-07-13 | 2003-03-28 | Semiconductor Leading Edge Technologies Inc | 基板収納容器、基板搬送システム、保管装置及びガス置換方法 |
JP2004235516A (ja) * | 2003-01-31 | 2004-08-19 | Trecenti Technologies Inc | ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法 |
JP2004269214A (ja) * | 2003-03-11 | 2004-09-30 | Daifuku Co Ltd | 浄化空気通風式の保管設備 |
JP2006327773A (ja) * | 2005-05-27 | 2006-12-07 | Murata Mach Ltd | 自動倉庫 |
US8128333B2 (en) * | 2006-11-27 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and manufacturing method for semiconductor devices |
JP2009249053A (ja) | 2008-04-01 | 2009-10-29 | Murata Mach Ltd | 自動倉庫 |
FR2963327B1 (fr) * | 2010-07-27 | 2012-08-24 | Air Liquide | Dispositif de stockage d'articles sous atmosphere controlee |
-
2013
- 2013-06-26 JP JP2013134268A patent/JP5979089B2/ja active Active
-
2014
- 2014-05-20 TW TW103117670A patent/TWI610853B/zh active
- 2014-06-11 KR KR1020140070788A patent/KR102245686B1/ko active IP Right Grant
- 2014-06-16 SG SG10201403270WA patent/SG10201403270WA/en unknown
- 2014-06-20 US US14/310,325 patent/US10274214B2/en active Active
- 2014-06-25 CN CN201410287316.3A patent/CN104253076B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN104253076A (zh) | 2014-12-31 |
US20150004899A1 (en) | 2015-01-01 |
KR102245686B1 (ko) | 2021-04-27 |
JP2015009912A (ja) | 2015-01-19 |
JP5979089B2 (ja) | 2016-08-24 |
US10274214B2 (en) | 2019-04-30 |
KR20150001623A (ko) | 2015-01-06 |
TW201509754A (zh) | 2015-03-16 |
TWI610853B (zh) | 2018-01-11 |
CN104253076B (zh) | 2019-03-26 |
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