SE9901026D0 - Kondensator för integrerade kretsar - Google Patents
Kondensator för integrerade kretsarInfo
- Publication number
- SE9901026D0 SE9901026D0 SE9901026A SE9901026A SE9901026D0 SE 9901026 D0 SE9901026 D0 SE 9901026D0 SE 9901026 A SE9901026 A SE 9901026A SE 9901026 A SE9901026 A SE 9901026A SE 9901026 D0 SE9901026 D0 SE 9901026D0
- Authority
- SE
- Sweden
- Prior art keywords
- capacitor
- region
- active
- substrate
- manufacturing
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 abstract 4
- 239000010410 layer Substances 0.000 abstract 3
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/7687—Thin films associated with contacts of capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Bipolar Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9901026A SE522038C2 (sv) | 1999-03-22 | 1999-03-22 | Kondensator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9901026A SE522038C2 (sv) | 1999-03-22 | 1999-03-22 | Kondensator |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| SE9901026L SE9901026L (sv) | 1999-03-22 |
| SE9901026D0 true SE9901026D0 (sv) | 1999-03-22 |
| SE522038C2 SE522038C2 (sv) | 2004-01-07 |
Family
ID=20414942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE9901026A SE522038C2 (sv) | 1999-03-22 | 1999-03-22 | Kondensator |
Country Status (1)
| Country | Link |
|---|---|
| SE (1) | SE522038C2 (sv) |
-
1999
- 1999-03-22 SE SE9901026A patent/SE522038C2/sv not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| SE522038C2 (sv) | 2004-01-07 |
| SE9901026L (sv) | 1999-03-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NUG | Patent has lapsed |