SE9901027L - Isolerande kantsträngstruktur vid ytan av ett substrat - Google Patents
Isolerande kantsträngstruktur vid ytan av ett substratInfo
- Publication number
- SE9901027L SE9901027L SE9901027A SE9901027A SE9901027L SE 9901027 L SE9901027 L SE 9901027L SE 9901027 A SE9901027 A SE 9901027A SE 9901027 A SE9901027 A SE 9901027A SE 9901027 L SE9901027 L SE 9901027L
- Authority
- SE
- Sweden
- Prior art keywords
- substrate
- region
- active
- manufacturing
- field oxide
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 abstract 4
- 239000010410 layer Substances 0.000 abstract 3
- 239000003990 capacitor Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9901027A SE9901027D0 (sv) | 1999-03-22 | 1999-03-22 | Isolerande kantsträngstruktur vid ytan av ett substrat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9901027A SE9901027D0 (sv) | 1999-03-22 | 1999-03-22 | Isolerande kantsträngstruktur vid ytan av ett substrat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| SE9901027L true SE9901027L (sv) | 1999-03-22 |
| SE9901027D0 SE9901027D0 (sv) | 1999-03-22 |
Family
ID=20414944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE9901027A SE9901027D0 (sv) | 1999-03-22 | 1999-03-22 | Isolerande kantsträngstruktur vid ytan av ett substrat |
Country Status (1)
| Country | Link |
|---|---|
| SE (1) | SE9901027D0 (sv) |
-
1999
- 1999-03-22 SE SE9901027A patent/SE9901027D0/sv not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| SE9901027D0 (sv) | 1999-03-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NAV | Patent application has lapsed |