SE7703680L - Roterbar substrathallare for att anvendas i vakuum - Google Patents

Roterbar substrathallare for att anvendas i vakuum

Info

Publication number
SE7703680L
SE7703680L SE7703680A SE7703680A SE7703680L SE 7703680 L SE7703680 L SE 7703680L SE 7703680 A SE7703680 A SE 7703680A SE 7703680 A SE7703680 A SE 7703680A SE 7703680 L SE7703680 L SE 7703680L
Authority
SE
Sweden
Prior art keywords
shaft
rotation
hollow
parts
housing
Prior art date
Application number
SE7703680A
Other languages
Unknown language ( )
English (en)
Swedish (sv)
Inventor
G R Scheuermann
Original Assignee
Airco Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Airco Inc filed Critical Airco Inc
Publication of SE7703680L publication Critical patent/SE7703680L/

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SE7703680A 1976-04-01 1977-03-30 Roterbar substrathallare for att anvendas i vakuum SE7703680L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/672,691 US4108107A (en) 1976-04-01 1976-04-01 Rotatable substrate holder for use in vacuum

Publications (1)

Publication Number Publication Date
SE7703680L true SE7703680L (sv) 1977-10-02

Family

ID=24699610

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7703680A SE7703680L (sv) 1976-04-01 1977-03-30 Roterbar substrathallare for att anvendas i vakuum

Country Status (11)

Country Link
US (2) US4108107A (OSRAM)
JP (1) JPS52129638A (OSRAM)
BE (1) BE853188A (OSRAM)
CH (1) CH613476A5 (OSRAM)
DE (2) DE7710467U1 (OSRAM)
FR (1) FR2346464A1 (OSRAM)
GB (1) GB1537606A (OSRAM)
GR (1) GR66405B (OSRAM)
IT (1) IT1077516B (OSRAM)
NL (1) NL170440C (OSRAM)
SE (1) SE7703680L (OSRAM)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
DE2820289C2 (de) 1978-05-10 1986-09-18 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum Beschichten von metallischen Substraten mit Legierungsschichten bei erhöhter Substrattemperatur
FR2465792B1 (fr) * 1979-09-20 1988-07-08 Leybold Heraeus Gmbh & Co Kg Installation de metallisation sous vide pour le depot d'un revetement sur toutes les faces de substrats par rotation de ces derniers dans un flux de materiau
US4485759A (en) * 1983-01-19 1984-12-04 Multi-Arc Vacuum Systems Inc. Planetary substrate support apparatus for vapor vacuum deposition coating
US4459823A (en) * 1983-03-30 1984-07-17 Sperry Corporation Rotating liquid nitrogen cooled substrate holder
DE3316554C1 (de) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien
US4589667A (en) * 1984-10-16 1986-05-20 Hewlett-Packard Company Vacuum compatible colleting spindle
US5326633A (en) * 1986-03-24 1994-07-05 Ensci, Inc. Coated substrates
US5705265A (en) * 1986-03-24 1998-01-06 Emsci Inc. Coated substrates useful as catalysts
US5264012A (en) * 1986-03-24 1993-11-23 Ensci Inc. Gas separation process
US4787125A (en) * 1986-03-24 1988-11-29 Ensci, Inc. Battery element and battery incorporating doped tin oxide coated substrate
US5603983A (en) * 1986-03-24 1997-02-18 Ensci Inc Process for the production of conductive and magnetic transitin metal oxide coated three dimensional substrates
US5549990A (en) * 1986-03-24 1996-08-27 Ensci Inc Battery element containing porous particles
US5271858A (en) * 1986-03-24 1993-12-21 Ensci Inc. Field dependent fluids containing electrically conductive tin oxide coated materials
US5601945A (en) * 1986-03-24 1997-02-11 Ensci Inc. Battery element containing porous substrates
US5316846A (en) * 1986-03-24 1994-05-31 Ensci, Inc. Coated substrates
US5204140A (en) * 1986-03-24 1993-04-20 Ensci, Inc. Process for coating a substrate with tin oxide
US5167820A (en) * 1986-03-24 1992-12-01 Ensci, Inc. Porous membranes and methods for using same
US5633081A (en) * 1986-03-24 1997-05-27 Ensci Inc. Coated porous substrates
US5002011A (en) * 1987-04-14 1991-03-26 Kabushiki Kaisha Toshiba Vapor deposition apparatus
US5151133A (en) * 1987-04-14 1992-09-29 Kabushiki Kaisha Toshiba Vapor deposition apparatus
US5538126A (en) * 1994-07-29 1996-07-23 Rhodes; Arthur B. Conveyor system with means to rotate a workpiece during conveying
DE4444537C2 (de) * 1994-12-14 1999-09-02 Ardenne Anlagentech Gmbh Planetengetriebe für den Hochtemperatureinsatz
DE19730993B4 (de) * 1997-07-18 2008-04-03 Ald Vacuum Technologies Ag Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Partikelstrom
DE19743904C2 (de) * 1997-10-04 2001-12-13 Deutsch Zentr Luft & Raumfahrt Wärmedämmschichten auf einkristallinen und polykristallinen Metallsubstraten mit einer verbesserten kristallographischen Beziehung zwischen Schicht und Substrat
US5997947A (en) * 1998-04-29 1999-12-07 United Technologies Corporation Rotisserie fixture for coating airfoils
US6342103B1 (en) 2000-06-01 2002-01-29 The Boc Group, Inc. Multiple pocket electron beam source
GB2390378B (en) * 2002-07-06 2005-08-03 Trikon Holdings Ltd Deposition methods and apparatus
GB0215699D0 (en) * 2002-07-06 2002-08-14 Trikon Holdings Ltd Deposition methods and apparatus
US20040046969A1 (en) * 2002-09-10 2004-03-11 Honeywell International Inc. System and method for monitoring thin film deposition on optical substrates
US6923868B2 (en) * 2003-09-23 2005-08-02 Gba S.A. Installation for electron-ray coatication of coatings
JP2005310757A (ja) * 2004-03-23 2005-11-04 Sii Nanotechnology Inc 微細３次元構造物作製装置及び方法
US20110114022A1 (en) * 2007-12-12 2011-05-19 Veeco Instruments Inc. Wafer carrier with hub
US8021487B2 (en) 2007-12-12 2011-09-20 Veeco Instruments Inc. Wafer carrier with hub
US8323409B2 (en) * 2008-05-08 2012-12-04 United Technologies Corporation Systems and methods for forming components with thermal barrier coatings
RU2404285C1 (ru) * 2009-10-22 2010-11-20 Закрытое акционерное общество "Специальное Конструкторско-Технологическое Бюро КАСКАД" (ЗАО "СКТБ КАСКАД") Установка для нанесения покрытий в вакууме
CN102108486B (zh) * 2009-12-28 2014-04-23 鸿富锦精密工业（深圳）有限公司 镀膜机
SG10201601693VA (en) * 2011-03-17 2016-04-28 Sulzer Metco Ag Component manipulator for the dynamic positioning of a substrate, coating method, as well as use of a component manipulator
RU2682741C1 (ru) * 2017-12-22 2019-03-21 Научно-производственная Ассоциация "Технопарк авиационных технологий" (НПА "Технопарк АТ") Способ ионно-имплантационной обработки лопаток рабочего моноколеса компрессора из титановых сплавов
US20190194799A1 (en) 2017-12-22 2019-06-27 United Technologies Corporation Line-of-sight coating fixture and apparatus

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL79132C (OSRAM) *
US2912351A (en) * 1956-09-21 1959-11-10 Sylvania Electric Prod Lens coating apparatus and process
US3019129A (en) * 1959-08-10 1962-01-30 Nat Res Corp Apparatus and process for coating
FR1369713A (fr) * 1963-09-19 1964-08-14 Heraeus Gmbh W C Appareil pour la métallisation sous vide
US3530824A (en) * 1964-08-25 1970-09-29 Optical Coating Laboratory Inc Deposition apparatus including rotatable and orbital masking assembly
US3425926A (en) * 1965-07-27 1969-02-04 Kazuya Hojyo Apparatus for automatically electroplating various articles with chromium
US3424628A (en) * 1966-01-24 1969-01-28 Western Electric Co Methods and apparatus for treating semi-conductive materials with gases
US3456616A (en) * 1968-05-08 1969-07-22 Texas Instruments Inc Vapor deposition apparatus including orbital substrate support
US3656453A (en) * 1969-08-07 1972-04-18 Brodynamics Research Corp Specimen positioning
US3598083A (en) * 1969-10-27 1971-08-10 Varian Associates Complex motion mechanism for thin film coating apparatuses
US3662708A (en) * 1970-03-23 1972-05-16 Airco Inc Apparatus for supporting a substrate holder
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
US3845739A (en) * 1972-04-17 1974-11-05 Xerox Corp System for vapor deposition of thin films
US3911162A (en) * 1972-04-17 1975-10-07 Xerox Corp System for vapor deposition of thin films
US3783822A (en) * 1972-05-10 1974-01-08 J Wollam Apparatus for use in deposition of films from a vapor phase
US3858547A (en) * 1973-12-14 1975-01-07 Nils H Bergfelt Coating machine having an adjustable rotation system
US3889632A (en) * 1974-05-31 1975-06-17 Ibm Variable incidence drive for deposition tooling
US4010710A (en) * 1974-09-20 1977-03-08 Rockwell International Corporation Apparatus for coating substrates
CH599982A5 (OSRAM) * 1975-09-02 1978-06-15 Balzers Patent Beteilig Ag

Also Published As

Publication number Publication date
FR2346464A1 (fr) 1977-10-28
NL170440C (nl) 1982-11-01
JPS52129638A (en) 1977-10-31
FR2346464B1 (OSRAM) 1979-04-06
DE2714729A1 (de) 1977-10-06
BE853188A (fr) 1977-10-03
GR66405B (OSRAM) 1981-03-20
JPS579429B2 (OSRAM) 1982-02-22
US4108107A (en) 1978-08-22
GB1537606A (en) 1979-01-04
US4122221A (en) 1978-10-24
IT1077516B (it) 1985-05-04
CH613476A5 (OSRAM) 1979-09-28
DE7710467U1 (de) 1980-05-08
NL170440B (nl) 1982-06-01
NL7703591A (nl) 1977-10-04

Similar Documents

Publication Publication Date Title
SE7703680L (sv) Roterbar substrathallare for att anvendas i vakuum
IL53388A (en) Radially balanced rotary drill
CA1026234A (en) Turbine housing
AU514728B2 (en) Rotary fluid pump or compass or
CA1025508A (en) Rotary mechanism bearing arrangement
GB2056982B (en) 2 - phenylimidazo(2,1 - b)benzothiazole derivatives
AU2315677A (en) 2, 3-dihydro-imidazo (2, 1-b) thiazole derivatives
AU3680078A (en) Rotary drill bit bearing
AU504927B2 (en) Flexible drill shaft
CA981070A (en) Musical instrument keying assembly
AU504153B2 (en) Rotary shaft position transducer
AU1586583A (en) Pyrimido (6,1-alpha)isoquinolin-2-one derivatives
SE8006287L (sv) Trycklageranordning, speciellt for upptagande av svengande vridningsrorelser
CA1013349A (en) Derivatives of pyrazolo(3',4',-2,3)pyrido(4,5-e) b-benzo-1,5-diazepinoes
AU515047B2 (en) Rotary assembly
AU2334677A (en) Shaft bearing assembly
AU1091276A (en) S-triazolo/5, 1-b/benzothiazoles
SU588454A1 (ru) Трубчата вращающа с печь
ATE3485T1 (de) Vorgefertigter, einteilig winkelfoermig gestalteter muffenkoerper.
JPS5459609A (en) Rotary compressor provided with cooperating rotor
AU2754277A (en) 2-oxa-7, 9-diazabicyclo(4, 2, 2)decane derivatives
SU600336A2 (ru) Опора ро ора
AU476927B2 (en) Improvements in or relating tothe construction of axial-flow rotary machine housings
AU5404273A (en) Improvements in or relating tothe construction of axial-flow rotary machine housings
CA891084A (en) Borehole instrument

Legal Events

Date Code Title Description
NAV Patent application has lapsed

Ref document number: 7703680-4

Format of ref document f/p: F