JPS52129638A - Vacuum vapor depositing base plate holder - Google Patents

Vacuum vapor depositing base plate holder

Info

Publication number
JPS52129638A
JPS52129638A JP3743177A JP3743177A JPS52129638A JP S52129638 A JPS52129638 A JP S52129638A JP 3743177 A JP3743177 A JP 3743177A JP 3743177 A JP3743177 A JP 3743177A JP S52129638 A JPS52129638 A JP S52129638A
Authority
JP
Japan
Prior art keywords
base plate
plate holder
vacuum vapor
vapor depositing
depositing base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3743177A
Other languages
English (en)
Other versions
JPS579429B2 (ja
Inventor
Aaru Shiyoaman Guren
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Airco Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Airco Inc filed Critical Airco Inc
Publication of JPS52129638A publication Critical patent/JPS52129638A/ja
Publication of JPS579429B2 publication Critical patent/JPS579429B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP3743177A 1976-04-01 1977-04-01 Vacuum vapor depositing base plate holder Granted JPS52129638A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/672,691 US4108107A (en) 1976-04-01 1976-04-01 Rotatable substrate holder for use in vacuum

Publications (2)

Publication Number Publication Date
JPS52129638A true JPS52129638A (en) 1977-10-31
JPS579429B2 JPS579429B2 (ja) 1982-02-22

Family

ID=24699610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3743177A Granted JPS52129638A (en) 1976-04-01 1977-04-01 Vacuum vapor depositing base plate holder

Country Status (11)

Country Link
US (2) US4108107A (ja)
JP (1) JPS52129638A (ja)
BE (1) BE853188A (ja)
CH (1) CH613476A5 (ja)
DE (2) DE2714729A1 (ja)
FR (1) FR2346464A1 (ja)
GB (1) GB1537606A (ja)
GR (1) GR66405B (ja)
IT (1) IT1077516B (ja)
NL (1) NL170440C (ja)
SE (1) SE7703680L (ja)

Families Citing this family (38)

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Publication number Priority date Publication date Assignee Title
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
FR2465792B1 (fr) * 1979-09-20 1988-07-08 Leybold Heraeus Gmbh & Co Kg Installation de metallisation sous vide pour le depot d'un revetement sur toutes les faces de substrats par rotation de ces derniers dans un flux de materiau
US4485759A (en) * 1983-01-19 1984-12-04 Multi-Arc Vacuum Systems Inc. Planetary substrate support apparatus for vapor vacuum deposition coating
US4459823A (en) * 1983-03-30 1984-07-17 Sperry Corporation Rotating liquid nitrogen cooled substrate holder
DE3316554C1 (de) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien
US4589667A (en) * 1984-10-16 1986-05-20 Hewlett-Packard Company Vacuum compatible colleting spindle
US5264012A (en) * 1986-03-24 1993-11-23 Ensci Inc. Gas separation process
US5167820A (en) * 1986-03-24 1992-12-01 Ensci, Inc. Porous membranes and methods for using same
US5549990A (en) * 1986-03-24 1996-08-27 Ensci Inc Battery element containing porous particles
US5603983A (en) * 1986-03-24 1997-02-18 Ensci Inc Process for the production of conductive and magnetic transitin metal oxide coated three dimensional substrates
US4787125A (en) * 1986-03-24 1988-11-29 Ensci, Inc. Battery element and battery incorporating doped tin oxide coated substrate
US5633081A (en) * 1986-03-24 1997-05-27 Ensci Inc. Coated porous substrates
US5326633A (en) * 1986-03-24 1994-07-05 Ensci, Inc. Coated substrates
US5204140A (en) * 1986-03-24 1993-04-20 Ensci, Inc. Process for coating a substrate with tin oxide
US5271858A (en) * 1986-03-24 1993-12-21 Ensci Inc. Field dependent fluids containing electrically conductive tin oxide coated materials
US5316846A (en) * 1986-03-24 1994-05-31 Ensci, Inc. Coated substrates
US5705265A (en) * 1986-03-24 1998-01-06 Emsci Inc. Coated substrates useful as catalysts
US5601945A (en) * 1986-03-24 1997-02-11 Ensci Inc. Battery element containing porous substrates
US5002011A (en) * 1987-04-14 1991-03-26 Kabushiki Kaisha Toshiba Vapor deposition apparatus
US5151133A (en) * 1987-04-14 1992-09-29 Kabushiki Kaisha Toshiba Vapor deposition apparatus
US5538126A (en) * 1994-07-29 1996-07-23 Rhodes; Arthur B. Conveyor system with means to rotate a workpiece during conveying
DE4444537C2 (de) * 1994-12-14 1999-09-02 Ardenne Anlagentech Gmbh Planetengetriebe für den Hochtemperatureinsatz
DE19730993B4 (de) * 1997-07-18 2008-04-03 Ald Vacuum Technologies Ag Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Partikelstrom
DE19743904C2 (de) * 1997-10-04 2001-12-13 Deutsch Zentr Luft & Raumfahrt Wärmedämmschichten auf einkristallinen und polykristallinen Metallsubstraten mit einer verbesserten kristallographischen Beziehung zwischen Schicht und Substrat
US5997947A (en) * 1998-04-29 1999-12-07 United Technologies Corporation Rotisserie fixture for coating airfoils
US6342103B1 (en) 2000-06-01 2002-01-29 The Boc Group, Inc. Multiple pocket electron beam source
GB2390378B (en) * 2002-07-06 2005-08-03 Trikon Holdings Ltd Deposition methods and apparatus
GB0215699D0 (en) * 2002-07-06 2002-08-14 Trikon Holdings Ltd Deposition methods and apparatus
US20040046969A1 (en) * 2002-09-10 2004-03-11 Honeywell International Inc. System and method for monitoring thin film deposition on optical substrates
US6923868B2 (en) * 2003-09-23 2005-08-02 Gba S.A. Installation for electron-ray coatication of coatings
JP2005310757A (ja) * 2004-03-23 2005-11-04 Sii Nanotechnology Inc 微細３次元構造物作製装置及び方法
US8021487B2 (en) 2007-12-12 2011-09-20 Veeco Instruments Inc. Wafer carrier with hub
US20110114022A1 (en) * 2007-12-12 2011-05-19 Veeco Instruments Inc. Wafer carrier with hub
US8323409B2 (en) * 2008-05-08 2012-12-04 United Technologies Corporation Systems and methods for forming components with thermal barrier coatings
CN102108486B (zh) * 2009-12-28 2014-04-23 鸿富锦精密工业（深圳）有限公司 镀膜机
SG184626A1 (en) * 2011-03-17 2012-10-30 Sulzer Metco Ag Component manipulator for the dynamic positioning of a substrate, coating method, as well as use of a component manipulator
US20190194799A1 (en) 2017-12-22 2019-06-27 United Technologies Corporation Line-of-sight coating fixture and apparatus
RU2682741C1 (ru) * 2017-12-22 2019-03-21 Научно-производственная Ассоциация "Технопарк авиационных технологий" (НПА "Технопарк АТ") Способ ионно-имплантационной обработки лопаток рабочего моноколеса компрессора из титановых сплавов

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL79132C (ja) *
US2912351A (en) * 1956-09-21 1959-11-10 Sylvania Electric Prod Lens coating apparatus and process
US3019129A (en) * 1959-08-10 1962-01-30 Nat Res Corp Apparatus and process for coating
FR1369713A (fr) * 1963-09-19 1964-08-14 Heraeus Gmbh W C Appareil pour la métallisation sous vide
US3530824A (en) * 1964-08-25 1970-09-29 Optical Coating Laboratory Inc Deposition apparatus including rotatable and orbital masking assembly
US3425926A (en) * 1965-07-27 1969-02-04 Kazuya Hojyo Apparatus for automatically electroplating various articles with chromium
US3424628A (en) * 1966-01-24 1969-01-28 Western Electric Co Methods and apparatus for treating semi-conductive materials with gases
US3456616A (en) * 1968-05-08 1969-07-22 Texas Instruments Inc Vapor deposition apparatus including orbital substrate support
US3656453A (en) * 1969-08-07 1972-04-18 Brodynamics Research Corp Specimen positioning
US3598083A (en) * 1969-10-27 1971-08-10 Varian Associates Complex motion mechanism for thin film coating apparatuses
US3662708A (en) * 1970-03-23 1972-05-16 Airco Inc Apparatus for supporting a substrate holder
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
US3911162A (en) * 1972-04-17 1975-10-07 Xerox Corp System for vapor deposition of thin films
US3845739A (en) * 1972-04-17 1974-11-05 Xerox Corp System for vapor deposition of thin films
US3783822A (en) * 1972-05-10 1974-01-08 J Wollam Apparatus for use in deposition of films from a vapor phase
US3858547A (en) * 1973-12-14 1975-01-07 Nils H Bergfelt Coating machine having an adjustable rotation system
US3889632A (en) * 1974-05-31 1975-06-17 Ibm Variable incidence drive for deposition tooling
US4010710A (en) * 1974-09-20 1977-03-08 Rockwell International Corporation Apparatus for coating substrates
CH599982A5 (ja) * 1975-09-02 1978-06-15 Balzers Patent Beteilig Ag

Also Published As

Publication number Publication date
GR66405B (ja) 1981-03-20
SE7703680L (sv) 1977-10-02
US4122221A (en) 1978-10-24
CH613476A5 (ja) 1979-09-28
NL7703591A (nl) 1977-10-04
GB1537606A (en) 1979-01-04
BE853188A (fr) 1977-10-03
US4108107A (en) 1978-08-22
DE2714729A1 (de) 1977-10-06
DE7710467U1 (de) 1980-05-08
FR2346464A1 (fr) 1977-10-28
FR2346464B1 (ja) 1979-04-06
NL170440B (nl) 1982-06-01
JPS579429B2 (ja) 1982-02-22
NL170440C (nl) 1982-11-01
IT1077516B (it) 1985-05-04

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