JPS5321089A - Vacuum evaporation process for nonsublimable compound - Google Patents
Vacuum evaporation process for nonsublimable compoundInfo
- Publication number
- JPS5321089A JPS5321089A JP9552576A JP9552576A JPS5321089A JP S5321089 A JPS5321089 A JP S5321089A JP 9552576 A JP9552576 A JP 9552576A JP 9552576 A JP9552576 A JP 9552576A JP S5321089 A JPS5321089 A JP S5321089A
- Authority
- JP
- Japan
- Prior art keywords
- nonsublimable
- compound
- vacuum evaporation
- evaporation process
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9552576A JPS5321089A (en) | 1976-08-10 | 1976-08-10 | Vacuum evaporation process for nonsublimable compound |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9552576A JPS5321089A (en) | 1976-08-10 | 1976-08-10 | Vacuum evaporation process for nonsublimable compound |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5321089A true JPS5321089A (en) | 1978-02-27 |
Family
ID=14139962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9552576A Pending JPS5321089A (en) | 1976-08-10 | 1976-08-10 | Vacuum evaporation process for nonsublimable compound |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5321089A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01234560A (en) * | 1988-03-11 | 1989-09-19 | Ulvac Corp | Method and device for supplying low-melting-point material to be vaporized in vapor deposition apparatus |
-
1976
- 1976-08-10 JP JP9552576A patent/JPS5321089A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01234560A (en) * | 1988-03-11 | 1989-09-19 | Ulvac Corp | Method and device for supplying low-melting-point material to be vaporized in vapor deposition apparatus |
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