SE509984C2 - Chargeringssystem för CVD - Google Patents

Chargeringssystem för CVD

Info

Publication number
SE509984C2
SE509984C2 SE9400950A SE9400950A SE509984C2 SE 509984 C2 SE509984 C2 SE 509984C2 SE 9400950 A SE9400950 A SE 9400950A SE 9400950 A SE9400950 A SE 9400950A SE 509984 C2 SE509984 C2 SE 509984C2
Authority
SE
Sweden
Prior art keywords
coating
cvd
insert
inserts
charging system
Prior art date
Application number
SE9400950A
Other languages
English (en)
Swedish (sv)
Other versions
SE9400950D0 (sv
SE9400950L (sv
Inventor
Tor Norrgrann
Kjell Paalsson
Bjoern Ljungberg
Original Assignee
Sandvik Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Ab filed Critical Sandvik Ab
Priority to SE9400950A priority Critical patent/SE509984C2/xx
Publication of SE9400950D0 publication Critical patent/SE9400950D0/xx
Priority to IL11301595A priority patent/IL113015A/en
Priority to JP52457995A priority patent/JP3742831B2/ja
Priority to US08/405,782 priority patent/US5576058A/en
Priority to AT95913951T priority patent/ATE169692T1/de
Priority to DE69504045T priority patent/DE69504045T2/de
Priority to EP95913951A priority patent/EP0750688B1/de
Priority to PCT/SE1995/000276 priority patent/WO1995025829A1/en
Publication of SE9400950L publication Critical patent/SE9400950L/
Priority to US08/703,966 priority patent/US5759621A/en
Publication of SE509984C2 publication Critical patent/SE509984C2/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Turning (AREA)
SE9400950A 1994-03-18 1994-03-18 Chargeringssystem för CVD SE509984C2 (sv)

Priority Applications (9)

Application Number Priority Date Filing Date Title
SE9400950A SE509984C2 (sv) 1994-03-18 1994-03-18 Chargeringssystem för CVD
IL11301595A IL113015A (en) 1994-03-18 1995-03-16 Method for predicting denture cutting tools
PCT/SE1995/000276 WO1995025829A1 (en) 1994-03-18 1995-03-17 Batch loading system for cvd
AT95913951T ATE169692T1 (de) 1994-03-18 1995-03-17 Batchladesystem für cvd
US08/405,782 US5576058A (en) 1994-03-18 1995-03-17 Batch loading system for CVD
JP52457995A JP3742831B2 (ja) 1994-03-18 1995-03-17 化学気相成長法を用いた切削工具のコーティング方法
DE69504045T DE69504045T2 (de) 1994-03-18 1995-03-17 Batchladesystem für cvd
EP95913951A EP0750688B1 (de) 1994-03-18 1995-03-17 Batchladesystem für cvd
US08/703,966 US5759621A (en) 1994-03-18 1996-08-28 Batch loading system for CVD

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9400950A SE509984C2 (sv) 1994-03-18 1994-03-18 Chargeringssystem för CVD

Publications (3)

Publication Number Publication Date
SE9400950D0 SE9400950D0 (sv) 1994-03-18
SE9400950L SE9400950L (sv) 1995-09-19
SE509984C2 true SE509984C2 (sv) 1999-03-29

Family

ID=20393359

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9400950A SE509984C2 (sv) 1994-03-18 1994-03-18 Chargeringssystem för CVD

Country Status (8)

Country Link
US (2) US5576058A (de)
EP (1) EP0750688B1 (de)
JP (1) JP3742831B2 (de)
AT (1) ATE169692T1 (de)
DE (1) DE69504045T2 (de)
IL (1) IL113015A (de)
SE (1) SE509984C2 (de)
WO (1) WO1995025829A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE509984C2 (sv) * 1994-03-18 1999-03-29 Sandvik Ab Chargeringssystem för CVD
EP0992605A3 (de) * 1998-10-02 2002-11-13 Sumitomo Special Metals Co., Ltd. Tragelement, Haltevorrichtung, Prozess und Apparat im Anwendungsbereich der Oberflächenbehandlung
SE514666C2 (sv) 1999-07-05 2001-04-02 Sandvik Ab Metod för fixering av skär vid PVD-beläggning
FR2819047B1 (fr) * 2000-12-28 2003-06-27 Snecma Moteurs Support approprie pour le traitement thermique d'une piece metallique et procede de traitement thermique
SE527351C2 (sv) * 2003-07-10 2006-02-14 Seco Tools Ab Metod att belägga skär
JP2007518878A (ja) * 2003-12-22 2007-07-12 セコ ツールズ アクティエボラーグ 切削工具を被覆するための支持物体とその方法
WO2006076924A1 (en) * 2005-01-24 2006-07-27 Danfoss A/S A method for coating an object
US7662437B2 (en) * 2005-03-24 2010-02-16 Honeywell International Inc. Template for arranging spacers on a preform and method of densifying a preform including the use of spacers positioned by a template
US7874770B2 (en) † 2005-03-30 2011-01-25 Sumitomo Electric Hardmetal Corp. Indexable insert
JP4931507B2 (ja) * 2005-07-26 2012-05-16 スネクマ 壁内に形成された冷却流路
CN102534565B (zh) * 2012-03-22 2013-07-03 株洲欧科亿硬质合金有限公司 一种涂层刀片生产用装载舟皿及其应用
CN103726031A (zh) * 2013-12-24 2014-04-16 成都工具研究所有限公司 化学气相沉积设备的工件装卡工具
JP6337107B2 (ja) * 2014-05-28 2018-06-06 京セラ株式会社 切削インサートの製造方法
DE102016211775A1 (de) * 2016-06-29 2018-01-04 Schunk Kohlenstofftechnik Gmbh Werkstückträger und Verfahren zur Herstellung eines Werkstückträgers
KR102040378B1 (ko) * 2016-12-20 2019-11-05 주식회사 티씨케이 지그를 이용한 반도체 제조용 부품의 제조방법 및 제조장치
WO2018117558A1 (ko) * 2016-12-20 2018-06-28 주식회사 티씨케이 지그를 이용한 반도체 제조용 부품의 제조방법 및 제조장치
WO2018117559A1 (ko) * 2016-12-20 2018-06-28 주식회사 티씨케이 Sic 증착층을 포함하는 반도체 제조용 부품 및 그 제조방법
KR102051668B1 (ko) * 2016-12-20 2019-12-04 주식회사 티씨케이 SiC 증착층을 포함하는 반도체 제조용 부품 및 그 제조방법
US20200255941A1 (en) * 2019-02-11 2020-08-13 Kennametal Inc. Supports for chemical vapor deposition coating applications
KR102642090B1 (ko) * 2021-08-24 2024-02-29 주식회사 케이엔제이 지지 소켓 및 증착층을 포함하는 부품 제조 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3496010A (en) * 1966-10-05 1970-02-17 Texas Instruments Inc Machining silicon coating prior to vapor deposition of silicon carbide
US3964937A (en) * 1973-08-13 1976-06-22 Materials Technology Corporation Method of making a composite coating
US4558388A (en) * 1983-11-02 1985-12-10 Varian Associates, Inc. Substrate and substrate holder
JPS6333571A (ja) * 1986-07-25 1988-02-13 Nippon Telegr & Teleph Corp <Ntt> 球状物の成膜方法
DE3902532C1 (de) * 1989-01-28 1989-11-23 Krupp Widia Gmbh, 4300 Essen, De
EP0458342A1 (de) * 1990-05-25 1991-11-27 Idemitsu Petrochemical Company Limited Verfahren zur Herstellung von einem diamantfilmbeschichteten Werkstoff
US5393349A (en) * 1991-08-16 1995-02-28 Tokyo Electron Sagami Kabushiki Kaisha Semiconductor wafer processing apparatus
JP2513976B2 (ja) * 1991-12-13 1996-07-10 エイ・ティ・アンド・ティ・コーポレーション 複数の球状部品の被覆方法
SE509984C2 (sv) * 1994-03-18 1999-03-29 Sandvik Ab Chargeringssystem för CVD
US5543022A (en) * 1995-01-17 1996-08-06 Hmt Technology Corporation Disc-handling apparatus

Also Published As

Publication number Publication date
IL113015A (en) 1998-08-16
JP3742831B2 (ja) 2006-02-08
DE69504045D1 (de) 1998-09-17
IL113015A0 (en) 1995-06-29
ATE169692T1 (de) 1998-08-15
US5576058A (en) 1996-11-19
DE69504045T2 (de) 1998-12-10
US5759621A (en) 1998-06-02
EP0750688B1 (de) 1998-08-12
WO1995025829A1 (en) 1995-09-28
JPH09510507A (ja) 1997-10-21
SE9400950D0 (sv) 1994-03-18
SE9400950L (sv) 1995-09-19
EP0750688A1 (de) 1997-01-02

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Legal Events

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