SE467379B - Foerfarande foer framstaellning av en avbildning och daertill avsedd komposition - Google Patents

Foerfarande foer framstaellning av en avbildning och daertill avsedd komposition

Info

Publication number
SE467379B
SE467379B SE8701902A SE8701902A SE467379B SE 467379 B SE467379 B SE 467379B SE 8701902 A SE8701902 A SE 8701902A SE 8701902 A SE8701902 A SE 8701902A SE 467379 B SE467379 B SE 467379B
Authority
SE
Sweden
Prior art keywords
residue
group
activated
groups
radiation
Prior art date
Application number
SE8701902A
Other languages
English (en)
Swedish (sv)
Other versions
SE8701902L (sv
SE8701902D0 (sv
Inventor
E Irving
C P Banks
Original Assignee
Ciba Geigy Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB868611480A external-priority patent/GB8611480D0/en
Priority claimed from GB868614529A external-priority patent/GB8614529D0/en
Application filed by Ciba Geigy Ag filed Critical Ciba Geigy Ag
Publication of SE8701902D0 publication Critical patent/SE8701902D0/xx
Publication of SE8701902L publication Critical patent/SE8701902L/xx
Publication of SE467379B publication Critical patent/SE467379B/sv

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • G03F7/0955—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer one of the photosensitive systems comprising a non-macromolecular photopolymerisable compound having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/148—Light sensitive titanium compound containing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Polymerisation Methods In General (AREA)
  • Epoxy Resins (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Paints Or Removers (AREA)
SE8701902A 1986-05-10 1987-05-08 Foerfarande foer framstaellning av en avbildning och daertill avsedd komposition SE467379B (sv)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB868611480A GB8611480D0 (en) 1986-05-10 1986-05-10 Forming images
GB868614529A GB8614529D0 (en) 1986-06-14 1986-06-14 Forming images

Publications (3)

Publication Number Publication Date
SE8701902D0 SE8701902D0 (sv) 1987-05-08
SE8701902L SE8701902L (sv) 1987-11-11
SE467379B true SE467379B (sv) 1992-07-06

Family

ID=26290751

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8701902A SE467379B (sv) 1986-05-10 1987-05-08 Foerfarande foer framstaellning av en avbildning och daertill avsedd komposition

Country Status (12)

Country Link
US (1) US4849320A (US06342305-20020129-C00040.png)
JP (1) JP2660835B2 (US06342305-20020129-C00040.png)
BE (1) BE1001615A4 (US06342305-20020129-C00040.png)
CA (1) CA1315592C (US06342305-20020129-C00040.png)
CH (1) CH678897A5 (US06342305-20020129-C00040.png)
DE (1) DE3715181C2 (US06342305-20020129-C00040.png)
ES (1) ES2003717A6 (US06342305-20020129-C00040.png)
FR (1) FR2598522B1 (US06342305-20020129-C00040.png)
GB (1) GB2191199B (US06342305-20020129-C00040.png)
IT (1) IT1205008B (US06342305-20020129-C00040.png)
NL (1) NL8701100A (US06342305-20020129-C00040.png)
SE (1) SE467379B (US06342305-20020129-C00040.png)

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Also Published As

Publication number Publication date
BE1001615A4 (fr) 1989-12-19
GB2191199A (en) 1987-12-09
IT8720448A0 (it) 1987-05-08
FR2598522A1 (fr) 1987-11-13
SE8701902L (sv) 1987-11-11
DE3715181C2 (de) 1998-10-29
IT1205008B (it) 1989-03-10
JP2660835B2 (ja) 1997-10-08
US4849320A (en) 1989-07-18
CA1315592C (en) 1993-04-06
JPS62273529A (ja) 1987-11-27
GB8710794D0 (en) 1987-06-10
FR2598522B1 (fr) 1994-05-27
NL8701100A (nl) 1987-12-01
GB2191199B (en) 1990-06-13
DE3715181A1 (de) 1987-11-12
SE8701902D0 (sv) 1987-05-08
CH678897A5 (US06342305-20020129-C00040.png) 1991-11-15
ES2003717A6 (es) 1988-11-01

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