SE422631B - Anordning vid fotoresistelement innefattande ett overskikt av fotokensligt material och ett underskikt av framkallarlosligt material - Google Patents
Anordning vid fotoresistelement innefattande ett overskikt av fotokensligt material och ett underskikt av framkallarlosligt materialInfo
- Publication number
- SE422631B SE422631B SE7412818A SE7412818A SE422631B SE 422631 B SE422631 B SE 422631B SE 7412818 A SE7412818 A SE 7412818A SE 7412818 A SE7412818 A SE 7412818A SE 422631 B SE422631 B SE 422631B
- Authority
- SE
- Sweden
- Prior art keywords
- overview
- photo
- substance
- elements including
- developable
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/094—Multilayer resist systems, e.g. planarising layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
- H05K2203/0577—Double layer of resist having the same pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
- H05K2203/0585—Second resist used as mask for selective stripping of first resist
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Architecture (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Materials For Photolithography (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US40964673A | 1973-10-25 | 1973-10-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
SE7412818L SE7412818L (es) | 1975-04-28 |
SE422631B true SE422631B (sv) | 1982-03-15 |
Family
ID=23621393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7412818A SE422631B (sv) | 1973-10-25 | 1974-10-11 | Anordning vid fotoresistelement innefattande ett overskikt av fotokensligt material och ett underskikt av framkallarlosligt material |
Country Status (13)
Country | Link |
---|---|
JP (1) | JPS5529426B2 (es) |
AU (1) | AU466665B2 (es) |
BE (1) | BE821421A (es) |
BR (1) | BR7408768D0 (es) |
CA (1) | CA1051707A (es) |
DE (1) | DE2450380C2 (es) |
ES (2) | ES431310A1 (es) |
FR (1) | FR2249364B1 (es) |
GB (2) | GB1493833A (es) |
IT (1) | IT1025144B (es) |
NL (1) | NL7413916A (es) |
SE (1) | SE422631B (es) |
ZA (1) | ZA746683B (es) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2660951C2 (de) * | 1975-06-03 | 1986-08-07 | E.I. Du Pont De Nemours And Co., Wilmington, Del. | Lichtempfindliches Mehrschichtmaterial |
US4191572A (en) | 1975-06-03 | 1980-03-04 | E. I. Du Pont De Nemours And Company | Process for image reproduction using multilayer photosensitive element with solvent-soluble layer |
US4316951A (en) | 1975-06-03 | 1982-02-23 | E. I. Du Pont De Nemours And Company | Multilayer photosensitive element with solvent-soluble layer |
US4311784A (en) | 1978-05-09 | 1982-01-19 | E. I. Du Pont De Nemours And Company | Multilayer photosensitive solvent-processable litho element |
JPS55501072A (es) * | 1978-12-25 | 1980-12-04 | ||
US4357416A (en) | 1980-04-21 | 1982-11-02 | E. I. Du Pont De Nemours And Company | Process for preparation of multilayer photosensitive solvent-processable litho element |
DE3036710A1 (de) * | 1980-09-29 | 1982-05-13 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur erzeugung von photolackstrukuren |
EP0091651B1 (en) * | 1982-04-12 | 1988-08-03 | Nippon Telegraph And Telephone Corporation | Method for forming micropattern |
US4756988A (en) * | 1982-09-29 | 1988-07-12 | Minnesota Mining And Manufacturing Company | Multilayer dry-film negative-acting photoresist |
US4672020A (en) * | 1982-09-29 | 1987-06-09 | Minnesota Mining And Manufacturing Company | Multilayer dry-film positive-acting o-quinone diazide photoresist with integral laminable layer, photoresist layer, and strippable carrier layer |
JPH0612452B2 (ja) * | 1982-09-30 | 1994-02-16 | ブリュ−ワ−・サイエンス・インコ−ポレイテッド | 集積回路素子の製造方法 |
JPS5997137A (ja) * | 1982-11-01 | 1984-06-04 | イ−・アイ・デユポン・ド・ネモア−ス・アンド・コンパニ− | 多層光可溶化性リスエレメント |
US4504566A (en) * | 1982-11-01 | 1985-03-12 | E. I. Du Pont De Nemours And Company | Single exposure positive contact multilayer photosolubilizable litho element with two quinone diazide layers |
GB8418938D0 (en) * | 1984-07-25 | 1984-08-30 | Davies Bros Ltd | Image on substrate |
US4687720A (en) * | 1984-12-21 | 1987-08-18 | Hughes Aircraft Company | Side lobe suppression in holograms using pre-exposure |
US4815800A (en) * | 1984-12-21 | 1989-03-28 | Hughes Aircraft Company | Flare reduction in holograms |
US4571374A (en) * | 1984-12-27 | 1986-02-18 | Minnesota Mining And Manufacturing Company | Multilayer dry-film positive-acting laminable photoresist with two photoresist layers wherein one layer includes thermal adhesive |
US4854674A (en) * | 1985-02-27 | 1989-08-08 | Hughes Aircraft Company | Process for improving holographic efficiency |
US4799746A (en) * | 1985-02-27 | 1989-01-24 | Hughes Aircraft Company | Efficient holograms and method for making same |
JPH07113773B2 (ja) * | 1986-07-04 | 1995-12-06 | 株式会社日立製作所 | パタ−ン形成方法 |
JP2602511B2 (ja) * | 1987-10-30 | 1997-04-23 | 株式会社日立製作所 | パターン形成方法 |
US4898656A (en) * | 1988-03-28 | 1990-02-06 | Kansai Paint Co., Ltd. | Electrodeposition coating process of photoresist for printed circuit board |
EP0433720A3 (en) * | 1989-12-22 | 1992-08-26 | Siemens Aktiengesellschaft | Method of applying a solder stop coating on printed circuit boards |
JP2004140313A (ja) * | 2002-08-22 | 2004-05-13 | Jsr Corp | 二層積層膜を用いた電極パッド上へのバンプ形成方法 |
CN112980410B (zh) * | 2021-02-25 | 2022-09-13 | 山东滨州昱诚化工科技有限公司 | 一种油田暂堵剂及其制备方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE711043C (de) * | 1935-08-09 | 1941-09-25 | Bekk & Kaulen Chem Fab G M B H | Verfahren zum Herstellen von Flachdruckformen durch Projektion gerasterter Bilder |
GB907718A (en) * | 1957-11-01 | 1962-10-10 | Lithoplate Inc | Hydrophilic base plates for diazo presensitized lithographic printing plates |
US3549373A (en) * | 1966-03-19 | 1970-12-22 | Ricoh Kk | Negative-to-positive reversible copy sheet |
US3474719A (en) * | 1966-04-15 | 1969-10-28 | Gaf Corp | Offset printing plates |
US3469982A (en) * | 1968-09-11 | 1969-09-30 | Jack Richard Celeste | Process for making photoresists |
-
1974
- 1974-10-10 CA CA211,185A patent/CA1051707A/en not_active Expired
- 1974-10-11 SE SE7412818A patent/SE422631B/xx unknown
- 1974-10-17 AU AU74460/74A patent/AU466665B2/en not_active Expired
- 1974-10-22 ZA ZA00746683A patent/ZA746683B/xx unknown
- 1974-10-22 BR BR8768/74A patent/BR7408768D0/pt unknown
- 1974-10-23 DE DE2450380A patent/DE2450380C2/de not_active Expired
- 1974-10-23 IT IT28721/74A patent/IT1025144B/it active
- 1974-10-23 GB GB45826/74A patent/GB1493833A/en not_active Expired
- 1974-10-23 GB GB30114/77A patent/GB1493834A/en not_active Expired
- 1974-10-24 ES ES431310A patent/ES431310A1/es not_active Expired
- 1974-10-24 BE BE149831A patent/BE821421A/xx unknown
- 1974-10-24 FR FR7435708A patent/FR2249364B1/fr not_active Expired
- 1974-10-24 NL NL7413916A patent/NL7413916A/xx not_active Application Discontinuation
- 1974-10-25 JP JP12328674A patent/JPS5529426B2/ja not_active Expired
-
1976
- 1976-05-25 ES ES448212A patent/ES448212A1/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1493834A (en) | 1977-11-30 |
NL7413916A (nl) | 1975-04-29 |
FR2249364A1 (es) | 1975-05-23 |
CA1051707A (en) | 1979-04-03 |
AU466665B2 (en) | 1975-11-06 |
JPS5529426B2 (es) | 1980-08-04 |
IT1025144B (it) | 1978-08-10 |
DE2450380C2 (de) | 1984-10-11 |
JPS5072704A (es) | 1975-06-16 |
ES431310A1 (es) | 1977-04-16 |
ZA746683B (en) | 1975-11-26 |
DE2450380A1 (de) | 1975-05-07 |
ES448212A1 (es) | 1977-12-01 |
SE7412818L (es) | 1975-04-28 |
FR2249364B1 (es) | 1982-04-23 |
BR7408768D0 (pt) | 1975-08-05 |
GB1493833A (en) | 1977-11-30 |
BE821421A (fr) | 1975-04-24 |
AU7446074A (en) | 1975-11-06 |
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