AU7446074A - Photoresist film - Google Patents

Photoresist film

Info

Publication number
AU7446074A
AU7446074A AU74460/74A AU7446074A AU7446074A AU 7446074 A AU7446074 A AU 7446074A AU 74460/74 A AU74460/74 A AU 74460/74A AU 7446074 A AU7446074 A AU 7446074A AU 7446074 A AU7446074 A AU 7446074A
Authority
AU
Australia
Prior art keywords
photoresist film
photoresist
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU74460/74A
Other versions
AU466665B2 (en
Inventor
CARL W. CHRISTENSEN and MICHAEL J. ODDI MICHAEL GULLA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Application granted granted Critical
Publication of AU466665B2 publication Critical patent/AU466665B2/en
Publication of AU7446074A publication Critical patent/AU7446074A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/094—Multilayer resist systems, e.g. planarising layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0577—Double layer of resist having the same pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0585—Second resist used as mask for selective stripping of first resist

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Architecture (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Materials For Photolithography (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AU74460/74A 1973-10-25 1974-10-17 Photoresist film Expired AU466665B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40964673A 1973-10-25 1973-10-25
USUS409646 1973-10-25

Publications (2)

Publication Number Publication Date
AU466665B2 AU466665B2 (en) 1975-11-06
AU7446074A true AU7446074A (en) 1975-11-06

Family

ID=23621393

Family Applications (1)

Application Number Title Priority Date Filing Date
AU74460/74A Expired AU466665B2 (en) 1973-10-25 1974-10-17 Photoresist film

Country Status (13)

Country Link
JP (1) JPS5529426B2 (en)
AU (1) AU466665B2 (en)
BE (1) BE821421A (en)
BR (1) BR7408768D0 (en)
CA (1) CA1051707A (en)
DE (1) DE2450380C2 (en)
ES (2) ES431310A1 (en)
FR (1) FR2249364B1 (en)
GB (2) GB1493834A (en)
IT (1) IT1025144B (en)
NL (1) NL7413916A (en)
SE (1) SE422631B (en)
ZA (1) ZA746683B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1986001010A1 (en) * 1984-07-25 1986-02-13 Davies Brothers Limited Product and process for producing an image on a substrate

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4191572A (en) 1975-06-03 1980-03-04 E. I. Du Pont De Nemours And Company Process for image reproduction using multilayer photosensitive element with solvent-soluble layer
US4316951A (en) 1975-06-03 1982-02-23 E. I. Du Pont De Nemours And Company Multilayer photosensitive element with solvent-soluble layer
DE2660951C2 (en) * 1975-06-03 1986-08-07 E.I. Du Pont De Nemours And Co., Wilmington, Del. Multi-layer photosensitive material
US4311784A (en) 1978-05-09 1982-01-19 E. I. Du Pont De Nemours And Company Multilayer photosensitive solvent-processable litho element
JPS55501072A (en) * 1978-12-25 1980-12-04
US4357416A (en) 1980-04-21 1982-11-02 E. I. Du Pont De Nemours And Company Process for preparation of multilayer photosensitive solvent-processable litho element
DE3036710A1 (en) * 1980-09-29 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Photolacquer structure with photoresist layer - is on deep UV or electron positive resist
EP0091651B1 (en) * 1982-04-12 1988-08-03 Nippon Telegraph And Telephone Corporation Method for forming micropattern
US4756988A (en) * 1982-09-29 1988-07-12 Minnesota Mining And Manufacturing Company Multilayer dry-film negative-acting photoresist
US4672020A (en) * 1982-09-29 1987-06-09 Minnesota Mining And Manufacturing Company Multilayer dry-film positive-acting o-quinone diazide photoresist with integral laminable layer, photoresist layer, and strippable carrier layer
JPH0612452B2 (en) * 1982-09-30 1994-02-16 ブリュ−ワ−・サイエンス・インコ−ポレイテッド Method of manufacturing integrated circuit device
US4504566A (en) * 1982-11-01 1985-03-12 E. I. Du Pont De Nemours And Company Single exposure positive contact multilayer photosolubilizable litho element with two quinone diazide layers
EP0110145B1 (en) * 1982-11-01 1989-05-31 E.I. Du Pont De Nemours And Company Single exposure positive contact litho film
US4815800A (en) * 1984-12-21 1989-03-28 Hughes Aircraft Company Flare reduction in holograms
US4687720A (en) * 1984-12-21 1987-08-18 Hughes Aircraft Company Side lobe suppression in holograms using pre-exposure
US4571374A (en) * 1984-12-27 1986-02-18 Minnesota Mining And Manufacturing Company Multilayer dry-film positive-acting laminable photoresist with two photoresist layers wherein one layer includes thermal adhesive
US4799746A (en) * 1985-02-27 1989-01-24 Hughes Aircraft Company Efficient holograms and method for making same
US4854674A (en) * 1985-02-27 1989-08-08 Hughes Aircraft Company Process for improving holographic efficiency
JPH07113773B2 (en) * 1986-07-04 1995-12-06 株式会社日立製作所 Pattern formation method
JP2602511B2 (en) * 1987-10-30 1997-04-23 株式会社日立製作所 Pattern formation method
AU613463B2 (en) * 1988-03-28 1991-08-01 Kansai Paint Company, Limited Electrodeposition coating process of photoresist for printed circuit board
EP0433720A3 (en) * 1989-12-22 1992-08-26 Siemens Aktiengesellschaft Method of applying a solder stop coating on printed circuit boards
JP2004140313A (en) * 2002-08-22 2004-05-13 Jsr Corp Method for forming bump on electrode pad using bilayer multilayer film
CN112980410B (en) * 2021-02-25 2022-09-13 山东滨州昱诚化工科技有限公司 Temporary plugging agent for oil field and preparation method thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE711043C (en) * 1935-08-09 1941-09-25 Bekk & Kaulen Chem Fab G M B H Process for producing planographic printing forms by projecting screened images
GB907718A (en) * 1957-11-01 1962-10-10 Lithoplate Inc Hydrophilic base plates for diazo presensitized lithographic printing plates
US3549373A (en) * 1966-03-19 1970-12-22 Ricoh Kk Negative-to-positive reversible copy sheet
US3474719A (en) * 1966-04-15 1969-10-28 Gaf Corp Offset printing plates
US3469982A (en) * 1968-09-11 1969-09-30 Jack Richard Celeste Process for making photoresists

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1986001010A1 (en) * 1984-07-25 1986-02-13 Davies Brothers Limited Product and process for producing an image on a substrate

Also Published As

Publication number Publication date
NL7413916A (en) 1975-04-29
CA1051707A (en) 1979-04-03
ES431310A1 (en) 1977-04-16
BR7408768D0 (en) 1975-08-05
JPS5529426B2 (en) 1980-08-04
BE821421A (en) 1975-04-24
SE7412818L (en) 1975-04-28
SE422631B (en) 1982-03-15
DE2450380C2 (en) 1984-10-11
AU466665B2 (en) 1975-11-06
GB1493834A (en) 1977-11-30
FR2249364B1 (en) 1982-04-23
ZA746683B (en) 1975-11-26
GB1493833A (en) 1977-11-30
JPS5072704A (en) 1975-06-16
FR2249364A1 (en) 1975-05-23
ES448212A1 (en) 1977-12-01
DE2450380A1 (en) 1975-05-07
IT1025144B (en) 1978-08-10

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