SE409337B - Forfarande och apparat for applicering av en beleggning pa ett upphettat underlag - Google Patents
Forfarande och apparat for applicering av en beleggning pa ett upphettat underlagInfo
- Publication number
- SE409337B SE409337B SE7316812A SE7316812A SE409337B SE 409337 B SE409337 B SE 409337B SE 7316812 A SE7316812 A SE 7316812A SE 7316812 A SE7316812 A SE 7316812A SE 409337 B SE409337 B SE 409337B
- Authority
- SE
- Sweden
- Prior art keywords
- coating
- carrier gas
- gaseous mixture
- temperature
- substrate
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims description 83
- 239000011248 coating agent Substances 0.000 title claims description 76
- 238000000034 method Methods 0.000 title claims description 26
- 239000000376 reactant Substances 0.000 claims description 56
- 239000012159 carrier gas Substances 0.000 claims description 43
- 238000001704 evaporation Methods 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 42
- 230000008020 evaporation Effects 0.000 claims description 34
- 238000010438 heat treatment Methods 0.000 claims description 28
- 239000002904 solvent Substances 0.000 claims description 27
- 239000008246 gaseous mixture Substances 0.000 claims description 21
- 239000000203 mixture Substances 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 13
- 239000007921 spray Substances 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 6
- 238000002156 mixing Methods 0.000 claims description 5
- 238000000354 decomposition reaction Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 229920006395 saturated elastomer Polymers 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 2
- 230000000977 initiatory effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 32
- 239000002184 metal Substances 0.000 description 19
- 229910052751 metal Inorganic materials 0.000 description 19
- 238000009826 distribution Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 15
- 239000012530 fluid Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 239000008199 coating composition Substances 0.000 description 9
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 230000001105 regulatory effect Effects 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 5
- 101100493714 Caenorhabditis elegans bath-47 gene Proteins 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- -1 hexoates Chemical class 0.000 description 4
- 125000002524 organometallic group Chemical group 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 239000005329 float glass Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 2
- QPFMBZIOSGYJDE-UHFFFAOYSA-N 1,1,2,2-tetrachloroethane Chemical compound ClC(Cl)C(Cl)Cl QPFMBZIOSGYJDE-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- RWNKSTSCBHKHTB-UHFFFAOYSA-N Hexachloro-1,3-butadiene Chemical compound ClC(Cl)=C(Cl)C(Cl)=C(Cl)Cl RWNKSTSCBHKHTB-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000006124 Pilkington process Methods 0.000 description 2
- 239000010425 asbestos Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- DIKBFYAXUHHXCS-UHFFFAOYSA-N bromoform Chemical compound BrC(Br)Br DIKBFYAXUHHXCS-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 229910052895 riebeckite Inorganic materials 0.000 description 2
- HJUGFYREWKUQJT-UHFFFAOYSA-N tetrabromomethane Chemical compound BrC(Br)(Br)Br HJUGFYREWKUQJT-UHFFFAOYSA-N 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- ZXUJWPHOPHHZLR-UHFFFAOYSA-N 1,1,1-trichloro-2-fluoroethane Chemical compound FCC(Cl)(Cl)Cl ZXUJWPHOPHHZLR-UHFFFAOYSA-N 0.000 description 1
- QUMDOMSJJIFTCA-UHFFFAOYSA-N 1,1,2-tribromoethane Chemical compound BrCC(Br)Br QUMDOMSJJIFTCA-UHFFFAOYSA-N 0.000 description 1
- MVVYPRYEJILXPT-UHFFFAOYSA-N 1-bromo-1,1,2,2-tetrafluoroethane Chemical compound FC(F)C(F)(F)Br MVVYPRYEJILXPT-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 125000005595 acetylacetonate group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229950005228 bromoform Drugs 0.000 description 1
- 230000001914 calming effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- FJDJVBXSSLDNJB-LNTINUHCSA-N cobalt;(z)-4-hydroxypent-3-en-2-one Chemical compound [Co].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O FJDJVBXSSLDNJB-LNTINUHCSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- FJBFPHVGVWTDIP-UHFFFAOYSA-N dibromomethane Chemical compound BrCBr FJBFPHVGVWTDIP-UHFFFAOYSA-N 0.000 description 1
- HNLZCOJXSLDGKD-UHFFFAOYSA-N dichloro(iodo)methane Chemical compound ClC(Cl)I HNLZCOJXSLDGKD-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 150000004675 formic acid derivatives Chemical class 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000013072 incoming material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- LZKLAOYSENRNKR-LNTINUHCSA-N iron;(z)-4-oxoniumylidenepent-2-en-2-olate Chemical compound [Fe].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O LZKLAOYSENRNKR-LNTINUHCSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011490 mineral wool Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- BNIXVQGCZULYKV-UHFFFAOYSA-N pentachloroethane Chemical compound ClC(Cl)C(Cl)(Cl)Cl BNIXVQGCZULYKV-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229950011008 tetrachloroethylene Drugs 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/217—FeOx, CoOx, NiOx
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/219—CrOx, MoOx, WOx
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/23—Mixtures
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Coating Apparatus (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31539572A | 1972-12-15 | 1972-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE409337B true SE409337B (sv) | 1979-08-13 |
Family
ID=23224212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7316812A SE409337B (sv) | 1972-12-15 | 1973-12-12 | Forfarande och apparat for applicering av en beleggning pa ett upphettat underlag |
Country Status (11)
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1524326A (en) * | 1976-04-13 | 1978-09-13 | Bfg Glassgroup | Coating of glass |
| DE2739258C2 (de) * | 1977-08-31 | 1985-06-20 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur Aufbringung einer Siliciumcarbid und Siliciumnitrid enthaltenden Schutzschicht auf Kohlenstofformkörper |
| US4393095A (en) * | 1982-02-01 | 1983-07-12 | Ppg Industries, Inc. | Chemical vapor deposition of vanadium oxide coatings |
| US4501602A (en) * | 1982-09-15 | 1985-02-26 | Corning Glass Works | Process for making sintered glasses and ceramics |
| JPS60142303A (ja) * | 1983-12-29 | 1985-07-27 | Sumitomo Electric Ind Ltd | 多心コア光伝送用フアイバならびに製造方法 |
| GB8531424D0 (en) * | 1985-12-20 | 1986-02-05 | Glaverbel | Coating glass |
| NO168762C (no) * | 1985-12-20 | 1992-04-01 | Glaverbel | Belagt, flatt glass. |
| JPH09169545A (ja) | 1995-12-21 | 1997-06-30 | Th Goldschmidt Ag | 酸化アンチモンドープした酸化スズからなる透過率を低下する層をガラスおよびガラスセラミックに熱分解的に製造する方法、およびそのための配合物 |
| KR20010066533A (ko) * | 1999-12-31 | 2001-07-11 | 정종순 | 안정한 코팅용 기화물 생성방법 및 장치 |
| JP2015113273A (ja) * | 2013-12-13 | 2015-06-22 | 日本電気硝子株式会社 | ロールクリーニング装置 |
| DE102014116991A1 (de) * | 2014-11-20 | 2016-05-25 | Aixtron Se | CVD- oder PVD-Reaktor zum Beschichten großflächiger Substrate |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3438803A (en) * | 1965-05-18 | 1969-04-15 | Anchor Hocking Glass Corp | Method and means for vapor coating |
| US3699027A (en) * | 1970-02-02 | 1972-10-17 | Ransburg Electro Coating Corp | Deposition method |
| DE2047813B2 (de) * | 1970-09-29 | 1971-10-07 | Battelle Institut e V , 6000 Frank fürt | Verfahren zur abscheidung von ueberzuegen |
| US3808035A (en) * | 1970-12-09 | 1974-04-30 | M Stelter | Deposition of single or multiple layers on substrates from dilute gas sweep to produce optical components, electro-optical components, and the like |
-
1973
- 1973-08-07 ZA ZA00735383A patent/ZA735383B/xx unknown
- 1973-09-10 CA CA180,590A patent/CA1022807A/en not_active Expired
- 1973-09-26 NL NL7313244.A patent/NL167402B/xx not_active Application Discontinuation
- 1973-10-24 FR FR7337899A patent/FR2214246A5/fr not_active Expired
- 1973-12-10 GB GB5707073A patent/GB1454378A/en not_active Expired
- 1973-12-12 SE SE7316812A patent/SE409337B/sv unknown
- 1973-12-12 DE DE2361744A patent/DE2361744B2/de not_active Ceased
- 1973-12-13 IT IT70688/73A patent/IT999992B/it active
- 1973-12-14 DK DK679973AA patent/DK142169B/da not_active IP Right Cessation
- 1973-12-14 JP JP48141144A patent/JPS5813505B2/ja not_active Expired
- 1973-12-14 BE BE138902A patent/BE808674A/xx not_active IP Right Cessation
-
1981
- 1981-12-17 JP JP56205042A patent/JPS6028772B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1454378A (en) | 1976-11-03 |
| FR2214246A5 (enrdf_load_stackoverflow) | 1974-08-09 |
| DE2361744A1 (de) | 1974-07-04 |
| JPS4989716A (enrdf_load_stackoverflow) | 1974-08-27 |
| AU5940973A (en) | 1975-02-20 |
| DE2361744B2 (de) | 1978-05-18 |
| DK142169C (enrdf_load_stackoverflow) | 1981-02-16 |
| ZA735383B (en) | 1975-03-26 |
| CA1022807A (en) | 1977-12-20 |
| NL167402B (nl) | 1981-07-16 |
| DK142169B (da) | 1980-09-15 |
| JPS5813505B2 (ja) | 1983-03-14 |
| IT999992B (it) | 1976-03-10 |
| JPS6028772B2 (ja) | 1985-07-06 |
| BE808674A (fr) | 1974-06-14 |
| JPS57129843A (en) | 1982-08-12 |
| NL7313244A (enrdf_load_stackoverflow) | 1974-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3970037A (en) | Coating composition vaporizer | |
| US3888649A (en) | Nozzle for chemical vapor deposition of coatings | |
| US3850679A (en) | Chemical vapor deposition of coatings | |
| EP0303911B1 (en) | Multiple, parallel packed column vaporizer | |
| FI110684B (fi) | Menetelmä alhaisen emissiviteetin omaavan tinaoksidin saostamiseksi lasialustalle | |
| EP0170216B1 (en) | Chemical vapor deposition of a reflective film on the bottom surface of a float glass ribbon | |
| US5835678A (en) | Liquid vaporizer system and method | |
| SE409337B (sv) | Forfarande och apparat for applicering av en beleggning pa ett upphettat underlag | |
| SE409322B (sv) | Forfarande och apparat for applicering av en beleggning pa en yta av ett underlag | |
| US9540277B2 (en) | Apparatus for depositing thin film coatings and method of deposition utilizing such apparatus | |
| SE438672B (sv) | Sett att bilda en tennoxidbeleggning pa ett varmst glassubstrat | |
| US3951100A (en) | Chemical vapor deposition of coatings | |
| US4900110A (en) | Chemical vapor deposition of a reflective film on the bottom surface of a float glass ribbon | |
| US4928627A (en) | Apparatus for coating a substrate | |
| SE463767B (sv) | Saett vid pyrolytisk bildning av en metalloxidbelaeggning paa glas och anordning haerfoer | |
| US3942469A (en) | Vapor deposition nozzle | |
| GB2026454A (en) | Coating glass with tin oxide | |
| US5190592A (en) | Aerosol injection system for producing composite layers by pyrolysis | |
| AU619212B2 (en) | Multiple, parallel packed column vaporizer | |
| KR20010066533A (ko) | 안정한 코팅용 기화물 생성방법 및 장치 |