SE337635B - - Google Patents
Info
- Publication number
- SE337635B SE337635B SE03760/67A SE376067A SE337635B SE 337635 B SE337635 B SE 337635B SE 03760/67 A SE03760/67 A SE 03760/67A SE 376067 A SE376067 A SE 376067A SE 337635 B SE337635 B SE 337635B
- Authority
- SE
- Sweden
- Prior art keywords
- wafer
- march
- forming
- applying
- channel
- Prior art date
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 238000010791 quenching Methods 0.000 abstract 1
- 230000000171 quenching effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 abstract 1
- 229910052723 transition metal Inorganic materials 0.000 abstract 1
- 150000003624 transition metals Chemical class 0.000 abstract 1
- 229910001935 vanadium oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
- H10N70/026—Formation of switching materials, e.g. deposition of layers by physical vapor deposition, e.g. sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Thermistors And Varistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1966D0049648 DE1278626C2 (de) | 1966-03-19 | 1966-03-19 | Elektrisches schaltelement und verfahren zu seiner herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE337635B true SE337635B (xx) | 1971-08-16 |
Family
ID=7052045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE03760/67A SE337635B (xx) | 1966-03-19 | 1967-03-17 |
Country Status (8)
| Country | Link |
|---|---|
| AT (1) | AT269998B (xx) |
| BE (1) | BE695237A (xx) |
| DE (1) | DE1278626C2 (xx) |
| DK (1) | DK130440B (xx) |
| FR (1) | FR1515426A (xx) |
| GB (1) | GB1147557A (xx) |
| NL (1) | NL6703784A (xx) |
| SE (1) | SE337635B (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2509530A1 (fr) * | 1981-07-10 | 1983-01-14 | Centre Nat Rech Scient | Dispositif de commutation a couche semi-conductrice de pentoxyde de vanadium et son procede de preparation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1252819B (de) * | 1961-11-06 | 1967-10-26 | Western Electric Company Incorporated, New York, N. Y. (V. St. A.) | Elektronisches Festkörperbauelement |
-
1966
- 1966-03-19 DE DE1966D0049648 patent/DE1278626C2/de not_active Expired
-
1967
- 1967-02-24 AT AT187667A patent/AT269998B/de active
- 1967-03-07 GB GB10671/67A patent/GB1147557A/en not_active Expired
- 1967-03-09 BE BE695237D patent/BE695237A/xx unknown
- 1967-03-13 NL NL6703784A patent/NL6703784A/xx unknown
- 1967-03-17 SE SE03760/67A patent/SE337635B/xx unknown
- 1967-03-17 FR FR99317A patent/FR1515426A/fr not_active Expired
- 1967-03-20 DK DK143867AA patent/DK130440B/da unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE1278626B (de) | 1968-09-26 |
| DK130440C (xx) | 1975-07-21 |
| DK130440B (da) | 1975-02-17 |
| NL6703784A (xx) | 1967-09-20 |
| AT269998B (de) | 1969-04-10 |
| GB1147557A (en) | 1969-04-02 |
| DE1278626C2 (de) | 1976-11-04 |
| FR1515426A (fr) | 1968-03-01 |
| BE695237A (xx) | 1967-08-14 |
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