SE0602773L - Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner - Google Patents

Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner

Info

Publication number
SE0602773L
SE0602773L SE0602773A SE0602773A SE0602773L SE 0602773 L SE0602773 L SE 0602773L SE 0602773 A SE0602773 A SE 0602773A SE 0602773 A SE0602773 A SE 0602773A SE 0602773 L SE0602773 L SE 0602773L
Authority
SE
Sweden
Prior art keywords
workpiece holder
forces
processing machines
processing machine
geometric errors
Prior art date
Application number
SE0602773A
Other languages
English (en)
Other versions
SE530700C2 (sv
Inventor
Bo Pettersson
Original Assignee
Hexagon Metrology Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hexagon Metrology Ab filed Critical Hexagon Metrology Ab
Priority to SE0602773A priority Critical patent/SE530700C2/sv
Priority to US12/520,427 priority patent/US20100078866A1/en
Priority to EP07835440.4A priority patent/EP2094437B1/en
Priority to CN2007800465882A priority patent/CN101595373B/zh
Priority to PCT/SE2007/050857 priority patent/WO2008076054A1/en
Publication of SE0602773L publication Critical patent/SE0602773L/sv
Publication of SE530700C2 publication Critical patent/SE530700C2/sv

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/013—Control or regulation of feed movement
    • B23Q15/06—Control or regulation of feed movement according to measuring results produced by two or more gauging methods using different measuring principles, e.g. by both optical and mechanical gauging
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
    • B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
    • B23Q1/545—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces
    • B23Q1/5462—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces with one supplementary sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/18—Compensation of tool-deflection due to temperature or force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
    • B23Q16/02—Indexing equipment
    • B23Q16/04—Indexing equipment having intermediate members, e.g. pawls, for locking the relatively movable parts in the indexed position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50132—Jig, fixture

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • Jigs For Machine Tools (AREA)
SE0602773A 2006-12-21 2006-12-21 Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner SE530700C2 (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE0602773A SE530700C2 (sv) 2006-12-21 2006-12-21 Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner
US12/520,427 US20100078866A1 (en) 2006-12-21 2007-11-16 Method and device for the compensation of geometrical errors in machining machinery
EP07835440.4A EP2094437B1 (en) 2006-12-21 2007-11-16 Method and device for the compensation of geometrical errors in machining machinery
CN2007800465882A CN101595373B (zh) 2006-12-21 2007-11-16 用于补偿加工机械中的几何误差的方法和装置
PCT/SE2007/050857 WO2008076054A1 (en) 2006-12-21 2007-11-16 Method and device for the compensation of geometrical errors in machining machinery.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0602773A SE530700C2 (sv) 2006-12-21 2006-12-21 Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner

Publications (2)

Publication Number Publication Date
SE0602773L true SE0602773L (sv) 2008-06-22
SE530700C2 SE530700C2 (sv) 2008-08-19

Family

ID=39536561

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0602773A SE530700C2 (sv) 2006-12-21 2006-12-21 Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner

Country Status (5)

Country Link
US (1) US20100078866A1 (sv)
EP (1) EP2094437B1 (sv)
CN (1) CN101595373B (sv)
SE (1) SE530700C2 (sv)
WO (1) WO2008076054A1 (sv)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009015920B4 (de) 2009-03-25 2014-11-20 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
US9210288B2 (en) 2009-11-20 2015-12-08 Faro Technologies, Inc. Three-dimensional scanner with dichroic beam splitters to capture a variety of signals
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
DE102009057101A1 (de) 2009-11-20 2011-05-26 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US8630314B2 (en) 2010-01-11 2014-01-14 Faro Technologies, Inc. Method and apparatus for synchronizing measurements taken by multiple metrology devices
US8875409B2 (en) 2010-01-20 2014-11-04 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9879976B2 (en) 2010-01-20 2018-01-30 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
US8832954B2 (en) 2010-01-20 2014-09-16 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8898919B2 (en) 2010-01-20 2014-12-02 Faro Technologies, Inc. Coordinate measurement machine with distance meter used to establish frame of reference
US8677643B2 (en) 2010-01-20 2014-03-25 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
WO2011090895A1 (en) 2010-01-20 2011-07-28 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with multi-bus arm technology
US8028432B2 (en) * 2010-01-20 2011-10-04 Faro Technologies, Inc. Mounting device for a coordinate measuring machine
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US8615893B2 (en) 2010-01-20 2013-12-31 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine having integrated software controls
GB2489370B (en) 2010-01-20 2014-05-14 Faro Tech Inc Coordinate measuring machine having an illuminated probe end and method of operation
DE102010020925B4 (de) 2010-05-10 2014-02-27 Faro Technologies, Inc. Verfahren zum optischen Abtasten und Vermessen einer Umgebung
CN103003713B (zh) 2010-09-08 2015-04-01 法罗技术股份有限公司 具有投影器的激光扫描器或激光跟踪器
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
DE102011000628A1 (de) * 2011-02-10 2012-08-16 Maquet Gmbh & Co. Kg Operationstischsäule
DE102012100609A1 (de) 2012-01-25 2013-07-25 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
AT512802B1 (de) 2012-05-07 2014-02-15 Anger Machining Gmbh Positionsausgleichssystem in einem Transferzentrum zur spanenden Bearbeitung von Werkstücken
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
DE102012109481A1 (de) 2012-10-05 2014-04-10 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
CN103308233A (zh) * 2013-06-17 2013-09-18 中国飞机强度研究所 一种三向测力平台装置
CN104057363B (zh) * 2014-06-10 2016-06-01 浙江大学 一种基于工件模型重建的三轴数控机床几何误差补偿方法
CN104827312B (zh) * 2015-05-11 2017-04-19 吴中区横泾嘉运模具厂 衬套自动攻丝机的夹紧机构
DE102015122844A1 (de) 2015-12-27 2017-06-29 Faro Technologies, Inc. 3D-Messvorrichtung mit Batteriepack
CN109318090B (zh) * 2018-10-24 2020-08-07 武汉理工大学 一种环形零件机器人打磨工艺中的尺寸补偿方法及系统
CN115415847A (zh) * 2022-08-17 2022-12-02 中山市庆丰五金机械有限公司 一种高尔夫球头管柄的加工方法

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE571924C (de) * 1927-01-21 1933-03-07 Zh Rikagaku Kenkyujo Fa Vorrichtung zur Bestimmung der Schneidkraft von Werkzeugen
US3917930A (en) * 1974-11-25 1975-11-04 Cincinnati Milacron Inc Method and apparatus for adaptively positioning a machine element
US4338659A (en) * 1978-12-15 1982-07-06 Fujitsu Fanuc Ltd. Position control system for a closed loop type numerical-controlled machine tool
US4370721A (en) * 1980-09-02 1983-01-25 Cincinnati Milacron Inc. Method for modifying programmed positions by using a programmably controlled surface sensing element
US4396975A (en) * 1980-10-01 1983-08-02 Fujitsu Fanuc Limited Position control system for a closed loop type numerical-controlled machine tool
US4628441A (en) * 1983-06-29 1986-12-09 Kearney & Trecker Corporation Automatic dynamic error compensator
DE3402988A1 (de) * 1984-01-28 1985-08-08 SMW Schneider & Weißhaupt GmbH, 7996 Meckenbeuren Einrichtung zur ueberwachung des betriebszustandes eines kraftspannfutters
FR2612635B1 (fr) * 1987-03-19 1989-12-29 Commissariat Energie Atomique Capteur de moments de flexion-torsion
US5028180A (en) * 1989-09-01 1991-07-02 Sheldon Paul C Six-axis machine tool
US4988244A (en) * 1989-09-01 1991-01-29 Kearney & Trecker Six-axis machine tool
US5374884A (en) * 1992-11-18 1994-12-20 University Of Michigan, The Board Of Regents Acting . . . Model-based position-repeatable disturbance compensation
US5492440A (en) * 1993-05-18 1996-02-20 U.S. Philips Corporation Apparatus for movement of an object
DE4413442A1 (de) 1994-04-18 1994-09-08 Fm Automation Elektronik Gmbh Montageplattform mit prozeßbeobachtender Funktion
CN2224060Y (zh) * 1995-06-23 1996-04-10 浙江大学 一种用于机床切削加工的空间六自由度工作台
JPH0976135A (ja) * 1995-09-18 1997-03-25 Canon Inc 円筒体の加工装置およびその加工方法と支持方法
US5752834A (en) * 1995-11-27 1998-05-19 Ling; Shou Hung Motion/force simulators with six or three degrees of freedom
US5987726A (en) * 1996-03-11 1999-11-23 Fanuc Robotics North America, Inc. Programmable positioner for the stress-free assembly of components
US5870834A (en) * 1996-10-22 1999-02-16 Sheldon/Van Someren, Inc. Six-axis metrology sensor device
AU9036098A (en) * 1997-08-28 1999-03-16 Microdexterity Systems Parallel mechanism
US6021579A (en) * 1998-04-01 2000-02-08 Joseph M. Schimmels Spatial parallel compliant mechanism
FR2779086B1 (fr) * 1998-04-27 2000-06-30 Const Mecaniques Des Vosges Ma Systeme compensateur pour hexapode
US6453211B1 (en) * 2000-03-02 2002-09-17 General Electric Company Nominal shift machining
FR2825445B1 (fr) * 2001-05-31 2004-02-13 Innovation Technologie Conseil Procede d'orientation d'une tourelle hexapode
US6671975B2 (en) * 2001-12-10 2004-01-06 C. William Hennessey Parallel kinematic micromanipulator
TW546595B (en) * 2002-07-23 2003-08-11 Internet Motion Navigator Corp Six-axis translation-type dynamic simulation device
US6637737B1 (en) * 2002-07-31 2003-10-28 Unova Ip Corp. Workpiece micro-positioning apparatus
AT501264B8 (de) * 2004-09-10 2007-02-15 Trumpf Maschinen Austria Gmbh Verfahren zur herstellung eines werkteils durch biegeumformung
CN100363157C (zh) * 2006-03-17 2008-01-23 燕山大学 具有全位姿反馈的六自由度微操作机器人
US8346488B2 (en) * 2006-09-25 2013-01-01 Aktiebolaget Skf Devices for measuring a force, monitoring a machining tool, and compensating for a deflection
SE530573C2 (sv) * 2006-11-16 2008-07-08 Hexagon Metrology Ab Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner
JP4267027B2 (ja) * 2006-12-07 2009-05-27 ファナック株式会社 ロボット制御装置
US20110032090A1 (en) * 2008-04-15 2011-02-10 Provancher William R Active Handrest For Haptic Guidance and Ergonomic Support
US8215199B2 (en) * 2008-11-17 2012-07-10 Marcroft Sacha L Parallel kinematic positioning system
CN102452074A (zh) * 2010-10-27 2012-05-16 鸿富锦精密工业（深圳）有限公司 并联机器人

Also Published As

Publication number Publication date
SE530700C2 (sv) 2008-08-19
EP2094437B1 (en) 2014-04-30
WO2008076054A1 (en) 2008-06-26
EP2094437A1 (en) 2009-09-02
CN101595373A (zh) 2009-12-02
US20100078866A1 (en) 2010-04-01
CN101595373B (zh) 2011-09-14
EP2094437A4 (en) 2011-01-05

Similar Documents

Publication Publication Date Title
SE0602773L (sv) Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner
SE0602437L (sv) Förfarande och anordning för kompensering av geometriska fel i bearbetningsmaskiner
WO2009063765A1 (ja) 作業情報処理装置、プログラム及び作業情報処理方法
TW200617363A (en) Methods and apparatus for low distortion parameter measurements
GB0625260D0 (en) A method for measuring a workpiece using a machine tool
ATE421078T1 (de) Verfahren und vorrichtung zum vermessen von werkstücken mit einem messtaster an einer werkzeugmaschine
TW200741935A (en) Process apparatus with on-the-fly workpiece centering
AU2009331596A8 (en) Method for detecting an electric arc in photovoltaic equipment
EP1801537A3 (en) Hysteresis compensation in a coordinate measurement machine
TW200942977A (en) Exposure apparatus, exposure method, and device manufacturing method
WO2007137693A3 (en) Sensor device and method of measuring a position of an object
KR20180084622A (ko) 척 테이블의 막힘 검출 방법 및 가공 장치
AU2009289984A8 (en) Method and apparatus for defect detection
GB2449813A (en) Method and apparatus for use in real-time nanometer and subnanometer position measurements
GB201220371D0 (en) Photoelectric autocollimation method and apparatus based on beam drift compensation
EP2474388A3 (en) Workpiece centering apparatus and workpiece centering method
MY137648A (en) Apparatus and method for alignment of a bonding tool
WO2008059019A3 (de) Vorrichtung mit einer modular aufgebauten messwandlerschaltung
BR112018007032A2 (pt) sensor, e, métodos para determinar fatores ambientais e para detectar uma posição de um sensor
DE502005003078D1 (de) Verfahren und Vorrichtung zum Verarbeiten von Druckereierzeugnissen
WO2019234412A3 (en) Partial discharge location device and method
WO2007082855A3 (de) Messgerät mit signaleinheit
SE0201224L (sv) Metod och anordning för inriktning av komponenter
SG11201908161QA (en) Method and apparatus for measuring third rail
CN204339463U (zh) 用于铣刀的切削刃的振摆幅度检测装置

Legal Events

Date Code Title Description
NUG Patent has lapsed