RU2503616C2 - Способ и система для получения чистого кремния - Google Patents

Способ и система для получения чистого кремния Download PDF

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RU2503616C2
RU2503616C2 RU2010142993/05A RU2010142993A RU2503616C2 RU 2503616 C2 RU2503616 C2 RU 2503616C2 RU 2010142993/05 A RU2010142993/05 A RU 2010142993/05A RU 2010142993 A RU2010142993 A RU 2010142993A RU 2503616 C2 RU2503616 C2 RU 2503616C2
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Russia
Prior art keywords
installation
reactor
silicon
monosilane
trichlorosilane
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RU2010142993/05A
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English (en)
Russian (ru)
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RU2010142993A (ru
Inventor
Кристиан ШМИД
Адольф ПЕТРИК
Йохем ХАН
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Шмид Силикон Текнолоджи Гмбх
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=40900722&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=RU2503616(C2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Шмид Силикон Текнолоджи Гмбх filed Critical Шмид Силикон Текнолоджи Гмбх
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
    • C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10773—Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/10—Process efficiency

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
RU2010142993/05A 2008-03-31 2009-03-31 Способ и система для получения чистого кремния RU2503616C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008017304.5 2008-03-31
DE102008017304A DE102008017304A1 (de) 2008-03-31 2008-03-31 Verfahren und Anlage zur Herstellung von Reinstsilizium
PCT/EP2009/002336 WO2009121558A2 (de) 2008-03-31 2009-03-31 Verfahren und anlage zur herstellung von reinstsilizium

Publications (2)

Publication Number Publication Date
RU2010142993A RU2010142993A (ru) 2012-05-10
RU2503616C2 true RU2503616C2 (ru) 2014-01-10

Family

ID=40900722

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2010142993/05A RU2503616C2 (ru) 2008-03-31 2009-03-31 Способ и система для получения чистого кремния

Country Status (9)

Country Link
US (1) US20110262338A1 (enExample)
EP (1) EP2265546B1 (enExample)
JP (1) JP5632362B2 (enExample)
KR (1) KR20110015527A (enExample)
CN (1) CN102046529B (enExample)
CA (1) CA2719858C (enExample)
DE (1) DE102008017304A1 (enExample)
RU (1) RU2503616C2 (enExample)
WO (1) WO2009121558A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2593634C2 (ru) * 2014-12-25 2016-08-10 федеральное государственное бюджетное образовательное учреждение высшего образования "Нижегородский государственный технический университет им. Р.Е. Алексеева" Способ глубокой очистки моносилана
RU2688763C1 (ru) * 2015-05-15 2019-05-22 Шмид Силикон Текнолоджи Гмбх Способ и установка для разложения моносилана

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011128292A1 (de) 2010-04-13 2011-10-20 Schmid Silicon Technology Gmbh Herstellung von monokristallinen halbleiterwerkstoffen
DE102010021004A1 (de) 2010-05-14 2011-11-17 Schmid Silicon Technology Gmbh Herstellung von monokristallinen Halbleiterwerkstoffen
DE102010015354A1 (de) 2010-04-13 2011-10-13 Schmid Silicon Technology Gmbh Herstellung eines kristallinen Halbleiterwerkstoffs
DE102010034469A1 (de) * 2010-08-06 2012-02-09 Schmid Silicon Technology Gmbh Anlage zur Herstellung von Monosilan
DE102010044755A1 (de) * 2010-09-08 2012-03-08 Spawnt Private S.À.R.L. Verfahren zur Herstellung von Silicium hoher Reinheit
CN103260716B (zh) * 2010-12-20 2015-10-14 Memc电子材料有限公司 在涉及歧化操作的基本闭环方法中制备多晶硅
US9493360B2 (en) * 2011-11-14 2016-11-15 Sitec Gmbh Processes and systems for non-equilibrium trichlorosilane production
CN102807222B (zh) * 2012-08-17 2014-04-02 中国天辰工程有限公司 一种四氯化硅提纯方法
CN102951646A (zh) * 2012-11-22 2013-03-06 覃攀 硅烷的生产方法
CN103112860B (zh) * 2013-02-26 2015-09-02 天津大学 改良西门子法联产制备高纯硅烷的方法
CN103241743B (zh) * 2013-05-22 2015-07-22 黄国强 三氯氢硅直接歧化制备硅烷的反应精馏方法及设备
CN103936009B (zh) * 2014-04-21 2015-12-30 浙江中宁硅业有限公司 一种硅烷热分解生产纳米级高纯硅粉的装置及方法
CN104828827B (zh) * 2015-05-15 2017-03-08 国电内蒙古晶阳能源有限公司 提纯三氯氢硅的方法

Citations (4)

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US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
US6887448B2 (en) * 2000-12-11 2005-05-03 Solarworld Ag Method for production of high purity silicon
US6905576B1 (en) * 1998-12-24 2005-06-14 Solarworld Ag Method and system for producing silane
RU2313485C2 (ru) * 2005-10-10 2007-12-27 Юрий Александрович Касаткин Способ получения моносилана

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US3968199A (en) * 1974-02-25 1976-07-06 Union Carbide Corporation Process for making silane
GB2028289B (en) 1978-08-18 1982-09-02 Schumacher Co J C Producing silicon
US4340574A (en) * 1980-08-28 1982-07-20 Union Carbide Corporation Process for the production of ultrahigh purity silane with recycle from separation columns
US4526769A (en) * 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
FR2572312B1 (fr) 1984-10-30 1989-01-20 Rhone Poulenc Spec Chim Procede de fabrication de barreaux de silicium ultra-pur
US4585643A (en) * 1985-05-31 1986-04-29 Union Carbide Corporation Process for preparing chlorosilanes from silicon and hydrogen chloride using an oxygen promoter
US5910295A (en) * 1997-11-10 1999-06-08 Memc Electronic Materials, Inc. Closed loop process for producing polycrystalline silicon and fumed silica
DE10044794A1 (de) * 2000-09-11 2002-04-04 Bayer Ag Verfahren zur Herstellung von Trichlorsilan
DE10057522B4 (de) * 2000-11-21 2009-04-16 Evonik Degussa Gmbh Verfahren zur Herstellung von Silanen
DE10062413A1 (de) * 2000-12-14 2002-07-04 Solarworld Ag Verfahren zur Herstellung von Trichlorsilan
DE102005046105B3 (de) 2005-09-27 2007-04-26 Degussa Gmbh Verfahren zur Herstellung von Monosilan

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
US6905576B1 (en) * 1998-12-24 2005-06-14 Solarworld Ag Method and system for producing silane
US6887448B2 (en) * 2000-12-11 2005-05-03 Solarworld Ag Method for production of high purity silicon
RU2313485C2 (ru) * 2005-10-10 2007-12-27 Юрий Александрович Касаткин Способ получения моносилана

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2593634C2 (ru) * 2014-12-25 2016-08-10 федеральное государственное бюджетное образовательное учреждение высшего образования "Нижегородский государственный технический университет им. Р.Е. Алексеева" Способ глубокой очистки моносилана
RU2688763C1 (ru) * 2015-05-15 2019-05-22 Шмид Силикон Текнолоджи Гмбх Способ и установка для разложения моносилана

Also Published As

Publication number Publication date
EP2265546A2 (de) 2010-12-29
JP2011516376A (ja) 2011-05-26
JP5632362B2 (ja) 2014-11-26
WO2009121558A3 (de) 2010-02-04
RU2010142993A (ru) 2012-05-10
CA2719858A1 (en) 2009-10-08
WO2009121558A2 (de) 2009-10-08
DE102008017304A1 (de) 2009-10-01
US20110262338A1 (en) 2011-10-27
CN102046529B (zh) 2013-04-24
WO2009121558A9 (de) 2010-04-29
CN102046529A (zh) 2011-05-04
EP2265546B1 (de) 2013-12-04
CA2719858C (en) 2016-06-21
KR20110015527A (ko) 2011-02-16

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Effective date: 20210401