RU2199027C2 - Геттерный насос - Google Patents

Геттерный насос Download PDF

Info

Publication number
RU2199027C2
RU2199027C2 RU99105210/06A RU99105210A RU2199027C2 RU 2199027 C2 RU2199027 C2 RU 2199027C2 RU 99105210/06 A RU99105210/06 A RU 99105210/06A RU 99105210 A RU99105210 A RU 99105210A RU 2199027 C2 RU2199027 C2 RU 2199027C2
Authority
RU
Russia
Prior art keywords
getter
cartridge
pump
pump according
getter device
Prior art date
Application number
RU99105210/06A
Other languages
English (en)
Russian (ru)
Other versions
RU99105210A (ru
Inventor
Роберто ДЖАННАНТОНИО
Андреа КОНТЕ
Original Assignee
Саес Геттерс С.П.А.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Саес Геттерс С.П.А. filed Critical Саес Геттерс С.П.А.
Publication of RU99105210A publication Critical patent/RU99105210A/ru
Application granted granted Critical
Publication of RU2199027C2 publication Critical patent/RU2199027C2/ru

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
RU99105210/06A 1997-06-17 1998-06-11 Геттерный насос RU2199027C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITMI97A001420 1997-06-17
IT97MI001420A IT1292175B1 (it) 1997-06-17 1997-06-17 Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare

Publications (2)

Publication Number Publication Date
RU99105210A RU99105210A (ru) 2001-01-10
RU2199027C2 true RU2199027C2 (ru) 2003-02-20

Family

ID=11377378

Family Applications (1)

Application Number Title Priority Date Filing Date
RU99105210/06A RU2199027C2 (ru) 1997-06-17 1998-06-11 Геттерный насос

Country Status (10)

Country Link
US (1) US6074171A (instruction)
EP (1) EP0918934B1 (instruction)
JP (1) JP2000517031A (instruction)
KR (1) KR100544591B1 (instruction)
CN (1) CN1103871C (instruction)
CA (1) CA2263559A1 (instruction)
DE (1) DE69814312T2 (instruction)
IT (1) IT1292175B1 (instruction)
RU (1) RU2199027C2 (instruction)
WO (1) WO1998058173A1 (instruction)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2520709C2 (ru) * 2009-03-17 2014-06-27 Саес Геттерс С.П.А. Комбинированная откачивающая система, содержащая геттерный насос и ионный насос

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
US6347925B1 (en) * 2000-06-29 2002-02-19 Beacon Power Corporation Flywheel system with parallel pumping arrangement
US6931711B2 (en) * 2002-09-03 2005-08-23 Honeywell International Inc. Methods and apparatus for removing gases from enclosures
ITTO20070447A1 (it) * 2007-06-21 2008-12-22 Vincenzo Commisso Procedimento e mezzi per lo stampaggio di materie plastiche, elastomeri, termoindurenti, metalli e loro leghe mediante iniezione e pressofusione.
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter
CN104728075B (zh) * 2013-12-19 2017-02-08 北京有色金属研究总院 一种内加热型吸气剂元件和大抽速吸气剂泵
CN104728076A (zh) * 2013-12-23 2015-06-24 北京有色金属研究总院 一种新型结构的大抽速吸气剂泵
TWI660125B (zh) 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵
CN109681406B (zh) * 2018-12-18 2020-02-18 有研工程技术研究院有限公司 一种内加热式吸气剂泵
JP7564128B2 (ja) * 2019-05-29 2024-10-08 エドワーズ リミテッド ターボ分子ポンプ、真空ポンプシステム、及び真空チャンバを排気する方法
CN112012908A (zh) * 2020-09-01 2020-12-01 宁波盾科新材料有限公司 一种吸气泵及使用该吸气泵的移动储罐
JP2025526251A (ja) * 2022-08-01 2025-08-13 サエス・ゲッターズ・エッセ・ピ・ア スナップオンゲッターポンプアセンブリとその使用
CN117846986A (zh) * 2024-01-02 2024-04-09 北京中科科仪股份有限公司 一种分子泵

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US662522A (en) * 1899-12-13 1900-11-27 Samuel H Butterworth Propeller for boats.
EP0397051A1 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
RU2037649C1 (ru) * 1992-07-08 1995-06-19 Анатолий Иванович Волчкевич Нераспыляемый газопоглотитель для сорбционного насоса

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE133697C (instruction) *
DE2034633C3 (de) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
DD133697A1 (de) * 1977-08-04 1979-01-17 Juergen Liebich Verdampfer fuer vakuum-getterpumpen
JP2756686B2 (ja) * 1989-02-17 1998-05-25 株式会社大阪真空機器製作所 ターボ分子ポンプ
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5935395A (en) * 1995-11-08 1999-08-10 Mitel Corporation Substrate processing apparatus with non-evaporable getter pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US662522A (en) * 1899-12-13 1900-11-27 Samuel H Butterworth Propeller for boats.
EP0397051A1 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
RU2037649C1 (ru) * 1992-07-08 1995-06-19 Анатолий Иванович Волчкевич Нераспыляемый газопоглотитель для сорбционного насоса

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2520709C2 (ru) * 2009-03-17 2014-06-27 Саес Геттерс С.П.А. Комбинированная откачивающая система, содержащая геттерный насос и ионный насос

Also Published As

Publication number Publication date
CA2263559A1 (en) 1998-12-23
US6074171A (en) 2000-06-13
JP2000517031A (ja) 2000-12-19
ITMI971420A0 (instruction) 1997-06-17
CN1229456A (zh) 1999-09-22
DE69814312D1 (de) 2003-06-12
EP0918934A1 (en) 1999-06-02
KR100544591B1 (ko) 2006-01-24
WO1998058173A1 (en) 1998-12-23
EP0918934B1 (en) 2003-05-07
ITMI971420A1 (it) 1998-12-17
IT1292175B1 (it) 1999-01-25
KR20000068123A (ko) 2000-11-25
DE69814312T2 (de) 2004-03-25
CN1103871C (zh) 2003-03-26

Similar Documents

Publication Publication Date Title
RU2199027C2 (ru) Геттерный насос
KR100302178B1 (ko) 게터펌프및반도체공정장치
RU2195579C2 (ru) Геттерный насос с высокой скоростью газовой сорбции
RU2520709C2 (ru) Комбинированная откачивающая система, содержащая геттерный насос и ионный насос
KR100302157B1 (ko) 조합크라이오펌프/게터펌프및그재생방법
EP2260502B1 (en) Combined pumping system comprising a getter pump and an ion pump
JPH07176601A (ja) 準無限な熱源／熱シンク
JP2019090384A (ja) 真空ポンプ、および真空ポンプに備わる昇温ステータ、排気口部材、加熱手段
KR100707053B1 (ko) 반도체 웨이퍼 프로세싱 챔버로부터 부품을 차폐하기 위한 방법 및 장치
CN115295375B (zh) 一种结合充气系统的热阴极
Heiz et al. A new cluster source for the generation of binary metal clusters
CN215113926U (zh) 管式热处理炉
JPH08193573A (ja) クライオポンプの安全弁装置
US20180345215A1 (en) Anneal chamber with getter
US3239134A (en) Residual gas removing means for vacuum pumps
SU1244375A1 (ru) Тепловой компрессор
Donovan Developments in Vacuum Sintering Furnaces
WO2025206206A1 (ja) 真空排気装置
JP2025150336A (ja) 真空排気装置
SU1211826A1 (ru) Вакуумный титановый насос
Roemer Combined sputter-ion and NEG pump
CN111530118A (zh) 一种用于真空环境下的外部加热装置及超高真空设备
ITMI20080250U1 (it) Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
HK1164405B (en) Combined pumping system comprising a getter pump and an ion pump

Legal Events

Date Code Title Description
MM4A The patent is invalid due to non-payment of fees

Effective date: 20090612