Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N19/00—Investigating materials by mechanical methods
  • G01N19/06—Investigating by removing material, e.g. spark-testing
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
  • H01L22/10—Measuring as part of the manufacturing process
  • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N13/00—Investigating surface or boundary effects, e.g. wetting power; Investigating diffusion effects; Analysing materials by determining surface, boundary, or diffusion effects
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
  • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
  • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
  • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
  • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Biochemistry (AREA)
• Health & Medical Sciences (AREA)
• General Health & Medical Sciences (AREA)
• Chemical & Material Sciences (AREA)
• Immunology (AREA)
• Pathology (AREA)
• Life Sciences & Earth Sciences (AREA)
• Analytical Chemistry (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Application Of Or Painting With Fluid Materials (AREA)
• Coating Apparatus (AREA)
• Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
• Investigating Or Analysing Materials By Optical Means (AREA)
• Surface Treatment Of Glass (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=54288753

Family Applications (1)

Country Status (8)

Families Citing this family (3)

Family Cites Families (7)

• 2014
  • 2014-09-26 DE DE102014219496.2A patent/DE102014219496B3/de not_active Expired - Fee Related
• 2015
  • 2015-09-18 CN CN201580017034.4A patent/CN106415805B/zh active Active
  • 2015-09-18 WO PCT/EP2015/071474 patent/WO2016046085A1/de active Application Filing
  • 2015-09-18 MX MX2016013755A patent/MX356165B/es active IP Right Grant
  • 2015-09-18 PT PT157778861T patent/PT3111191T/pt unknown
  • 2015-09-18 EP EP15777886.1A patent/EP3111191B1/de active Active
  • 2015-09-18 ES ES15777886.1T patent/ES2643737T3/es active Active
• 2017
  • 2017-03-27 US US15/470,537 patent/US9778170B2/en active Active

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