NO941307L - Fremgangsmåte ved fremstilling av mikro-optiske elementer - Google Patents

Fremgangsmåte ved fremstilling av mikro-optiske elementer

Info

Publication number
NO941307L
NO941307L NO941307A NO941307A NO941307L NO 941307 L NO941307 L NO 941307L NO 941307 A NO941307 A NO 941307A NO 941307 A NO941307 A NO 941307A NO 941307 L NO941307 L NO 941307L
Authority
NO
Norway
Prior art keywords
optical elements
producing micro
substrate
layer
etching stage
Prior art date
Application number
NO941307A
Other languages
English (en)
Norwegian (no)
Other versions
NO941307D0 (no
Inventor
Edward J Gratrix
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO941307D0 publication Critical patent/NO941307D0/no
Publication of NO941307L publication Critical patent/NO941307L/no

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G02B6/1245—Geodesic lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/005—Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
NO941307A 1993-04-12 1994-04-12 Fremgangsmåte ved fremstilling av mikro-optiske elementer NO941307L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4606093A 1993-04-12 1993-04-12

Publications (2)

Publication Number Publication Date
NO941307D0 NO941307D0 (no) 1994-04-12
NO941307L true NO941307L (no) 1994-10-13

Family

ID=21941369

Family Applications (1)

Application Number Title Priority Date Filing Date
NO941307A NO941307L (no) 1993-04-12 1994-04-12 Fremgangsmåte ved fremstilling av mikro-optiske elementer

Country Status (5)

Country Link
EP (1) EP0620201A3 (de)
JP (1) JPH0749403A (de)
IL (1) IL109301A0 (de)
NO (1) NO941307L (de)
TW (1) TW239236B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3477254B2 (ja) * 1994-09-19 2003-12-10 株式会社タカノ機械製作所 抜き型の製造方法および抜き型
WO1999008149A1 (fr) * 1997-08-08 1999-02-18 Japan, As Represented By Director General Of Agency Of Industrial Science And Technology Element optique, procede et appareil de commande optique et procede de fabrication dudit element optique
TW200302355A (en) * 2002-01-18 2003-08-01 Nippon Sheet Glass Co Ltd Method for producing aspherical structure, and aspherical lens array molding tool and aspherical lens array produced by the same method
EP1500975A3 (de) * 2003-07-21 2006-01-18 Ingeneric GmbH Verfahren zur Herstellung von optischen Mikrostrukturen
WO2006087744A1 (en) * 2005-02-21 2006-08-24 Consiglio Nazionale Delle Ricerche - Infm Istituto Nazionale Per La Fisica Della Materia A method of fabricating tridimensional micro- and nano­structures as well as optical element assembly having a tridimensional convex structure obtained by the method
JP2016090957A (ja) * 2014-11-11 2016-05-23 セイコーエプソン株式会社 マイクロレンズアレイ基板、電気光学装置、及び電子機器
FR3137187A1 (fr) * 2022-06-28 2023-12-29 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procédé de fabrication de microcavités concaves

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1147699A1 (ru) * 1981-06-22 1985-03-30 Предприятие П/Я Г-4493 Способ изготовлени линзовых растров
JPS5891407A (ja) * 1981-11-27 1983-05-31 Oki Electric Ind Co Ltd シリコン回折格子の製造方法
JPS62191445A (ja) * 1985-10-01 1987-08-21 Hoya Corp マイクロレンズの製造方法
SU1368844A1 (ru) * 1986-07-09 1988-01-23 Предприятие П/Я Г-4493 Способ изготовлени линзовых растров
JPH0694381B2 (ja) * 1987-04-21 1994-11-24 岡谷電機産業株式会社 ガス放電表示パネル用集光レンズ板の製造方法
JPH02108003A (ja) * 1988-10-17 1990-04-19 Mitsubishi Electric Corp １次回折格子の形成方法
JP2811864B2 (ja) * 1990-02-07 1998-10-15 日本板硝子株式会社 平板レンズの製造方法
JPH0430103A (ja) * 1990-05-25 1992-02-03 Ricoh Co Ltd トレンチ溝付マイクロレンズ
JP3165167B2 (ja) * 1991-03-19 2001-05-14 株式会社リコー マイクロレンズ及びその製造方法

Also Published As

Publication number Publication date
NO941307D0 (no) 1994-04-12
EP0620201A2 (de) 1994-10-19
TW239236B (de) 1995-01-21
IL109301A0 (en) 1994-07-31
EP0620201A3 (de) 1995-01-25
JPH0749403A (ja) 1995-02-21

Similar Documents

Publication Publication Date Title
NO951871D0 (no) Fremgangsmåte for dannelse av et sölvbelegg på et vitröst substrat
EP0981168A3 (de) Mikro-optische Halbleiterbauelemente und Herstellungsverfahren
MY129454A (en) Methods & apparatus for producing integrated circuit devices
DE69426094T2 (de) Herstellungsmethode einer mikroelektronikanordnung unter verwendung eines alternierenden substrates.
CA2056307A1 (en) Method of manufacturing a stamper
ATE261612T1 (de) Vefahren zum herstellen eines halbleiterartikels unter verwendung eines substrates mit einer porösen halbleiterschicht
CA2192777A1 (en) Perforated Substrate and Method of Manufacture
MY109605A (en) Method for producing semiconductor device having alignment mark.
NO972676D0 (no) Framgangsmåte og anordning for lakkering eller belegging av et substrat
WO1998020531A3 (en) Method for forming a through-via in a laminated substrate
NO941307L (no) Fremgangsmåte ved fremstilling av mikro-optiske elementer
GB2304457B (en) Method of forming metal wirings on a semiconductor substrate by dry etching
CA2027067A1 (en) Method for forming a continuous oxide superconductor layer having different thickness portions for superconductor device
TW358215B (en) Coded marking on an interior surface of a CRT faceplate panel and method of marking same
TW357405B (en) Method for pre-shaping a semiconductor substrate for polishing and structure
MY126494A (en) Method and apparatus for bonding optical disk substrate
DK0660428T3 (da) Fremgangsmåde til dannelse af et trin på en aflejringsoverflade af et substrat til en superledende indretning, der anvender en oxidsuperleder
FR2714526B1 (fr) Procédé de gravure au plasma d'un substrat de HgCdTe.
MY113219A (en) Method of manufacturing display screen
FR2738670B1 (fr) Procede et appareil de formation d'un motif sur un substrat de circuit integre
CA2056308A1 (en) Method for manufacturing a photomask for an optical memory
FI943498A0 (fi) Menetelmä substraatin valmistamiseksi, jonka pinnalla on ikkunanmuotoisia ja kehysmuotoisia kalvoja
TW331699B (en) Fabricating a surface laminar circuit
CA2324675A1 (en) A substrate for mounting an optical component, a method for producing the same, and an optical module using the same
FR2704694B1 (fr) Procédé et dispositif de production d'un substrat semi-conducteur et procédé de production d'un dispositf semi-conducteur.