NO931790L - Optisk transduser for kraftm}ling - Google Patents
Optisk transduser for kraftm}lingInfo
- Publication number
- NO931790L NO931790L NO931790A NO931790A NO931790L NO 931790 L NO931790 L NO 931790L NO 931790 A NO931790 A NO 931790A NO 931790 A NO931790 A NO 931790A NO 931790 L NO931790 L NO 931790L
- Authority
- NO
- Norway
- Prior art keywords
- optical
- detector
- resonator
- sensor element
- light source
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 8
- 238000005259 measurement Methods 0.000 title 1
- 239000004020 conductor Substances 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000010408 sweeping Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Measuring Fluid Pressure (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Micromachines (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
Transduser for måling av kraft. Transduseren omfatter et legeme (15), et følerelement (27, 37) som er fjærende montert på legemet (15), hvor det aktiverte følerelement virker som et kraftmottagende element hvis avbøyning i forhold til legemet (15) kan benyttes til å beregne den kraft som er påtrykt følerelementet (27, 37), og en optisk detektorenhet (l, 6, 8) for å bestemme avbøyningen av følerelementet (27, 37). Ifølge oppfinnelsen danner legemet (15) og følerelementet (27, 37) en kort op- tisk Fabry-Perot-type resonator (21, 23) som opereres i refleksjonsmodus, og den optiske deteksjonsenhet (l, 6, 8) om- fatter en lyskilde (l ) med bredt spekt- rum, en intensitetsdetektor (8) for detektere lysintensiteten som mottas fra følerresonatoren (21, 23), optiske le- dere (3) for å lede en lysstråle fra lyskilden (1) til resonatoren (21, 23) og tilbake til detektoren (8), og plas- sert langs den optiske bane mellom lys- kilden (l) og detektoren (8), en sveip- ende Fabry-Perot-resonator (41, 49, 51) med en optisk lengde som er syklisk styrbar over den optiske lengde for følerresonatoren (4 ), slik at detektoren
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI922263A FI98095C (fi) | 1992-05-19 | 1992-05-19 | Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori |
Publications (2)
Publication Number | Publication Date |
---|---|
NO931790D0 NO931790D0 (no) | 1993-05-18 |
NO931790L true NO931790L (no) | 1993-11-22 |
Family
ID=8535311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO931790A NO931790L (no) | 1992-05-19 | 1993-05-18 | Optisk transduser for kraftm}ling |
Country Status (9)
Country | Link |
---|---|
EP (1) | EP0571107B1 (no) |
JP (1) | JPH0634474A (no) |
KR (1) | KR930023710A (no) |
CN (1) | CN1047663C (no) |
BR (1) | BR9301922A (no) |
DE (1) | DE69316082T2 (no) |
FI (1) | FI98095C (no) |
MX (1) | MX9302895A (no) |
NO (1) | NO931790L (no) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0729051A3 (en) * | 1995-02-21 | 1998-06-17 | Ascom Tech Ag | Optical reflection modulator |
US5831262A (en) * | 1997-06-27 | 1998-11-03 | Lucent Technologies Inc. | Article comprising an optical fiber attached to a micromechanical device |
US7330271B2 (en) | 2000-11-28 | 2008-02-12 | Rosemount, Inc. | Electromagnetic resonant sensor with dielectric body and variable gap cavity |
GB2391617B (en) * | 2000-11-28 | 2005-05-18 | Rosemount Inc | Optical sensor for measuring physical and material properties |
NO315177B1 (no) * | 2001-11-29 | 2003-07-21 | Sinvent As | Optisk forskyvnings-sensor |
DE10224790B4 (de) * | 2002-06-04 | 2004-10-21 | Infineon Technologies Ag | Beschleunigungssensor und Verfahren zum Herstellen eines Beschleunigungssensors |
US7043115B2 (en) | 2002-12-18 | 2006-05-09 | Rosemount, Inc. | Tunable optical filter |
US7492463B2 (en) * | 2004-04-15 | 2009-02-17 | Davidson Instruments Inc. | Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor |
US7835598B2 (en) | 2004-12-21 | 2010-11-16 | Halliburton Energy Services, Inc. | Multi-channel array processor |
US7689071B2 (en) * | 2004-12-22 | 2010-03-30 | Opsens Inc. | Fiber optic pressure sensor for catheter use |
EP1869737B1 (en) | 2005-03-16 | 2021-05-12 | Davidson Instruments, Inc. | High intensity fabry-perot sensor |
JP4817786B2 (ja) * | 2005-10-03 | 2011-11-16 | 株式会社山武 | 差圧測定システム及び差圧測定方法 |
US7684051B2 (en) | 2006-04-18 | 2010-03-23 | Halliburton Energy Services, Inc. | Fiber optic seismic sensor based on MEMS cantilever |
WO2007126475A2 (en) | 2006-04-26 | 2007-11-08 | Davidson Instruments, Inc. | Fiber optic mems seismic sensor with mass supported by hinged beams |
US8115937B2 (en) | 2006-08-16 | 2012-02-14 | Davidson Instruments | Methods and apparatus for measuring multiple Fabry-Perot gaps |
CA2676246C (en) | 2007-01-24 | 2013-03-19 | Halliburton Energy Services, Inc. | Transducer for measuring environmental parameters |
CN102265231B (zh) | 2008-12-25 | 2014-07-09 | 丰田自动车株式会社 | 阻尼力控制装置 |
US8904867B2 (en) | 2010-11-04 | 2014-12-09 | Qualcomm Mems Technologies, Inc. | Display-integrated optical accelerometer |
DE102012217700B4 (de) * | 2012-09-28 | 2015-03-12 | Carl Zeiss Smt Gmbh | Messvorrichtung zur Messung einer Strahlposition |
GB2508908B (en) | 2012-12-14 | 2017-02-15 | Gen Electric | Resonator device |
FR3000545B1 (fr) * | 2012-12-27 | 2015-07-31 | Commissariat Energie Atomique | Microbarometre a soufflet et a transducteur interferometrique |
CN113281579B (zh) * | 2021-04-28 | 2023-01-24 | 西安理工大学 | 一种基于f-p干涉原理的芯片封装静电测量传感器 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0690329B2 (ja) * | 1985-10-16 | 1994-11-14 | ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ | ファブリペロ−干渉計 |
GB2186708B (en) * | 1985-11-26 | 1990-07-11 | Sharp Kk | A variable interferometric device and a process for the production of the same |
DE3816529A1 (de) * | 1988-05-14 | 1989-11-23 | Kistler Instr Gmbh | Druckmessvorrichtung |
-
1992
- 1992-05-19 FI FI922263A patent/FI98095C/fi not_active IP Right Cessation
-
1993
- 1993-05-06 EP EP93303505A patent/EP0571107B1/en not_active Expired - Lifetime
- 1993-05-06 DE DE69316082T patent/DE69316082T2/de not_active Expired - Fee Related
- 1993-05-18 BR BR9301922A patent/BR9301922A/pt not_active Application Discontinuation
- 1993-05-18 MX MX9302895A patent/MX9302895A/es unknown
- 1993-05-18 NO NO931790A patent/NO931790L/no unknown
- 1993-05-19 JP JP5117200A patent/JPH0634474A/ja active Pending
- 1993-05-19 KR KR1019930008561A patent/KR930023710A/ko not_active Application Discontinuation
- 1993-05-19 CN CN93106162A patent/CN1047663C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1079822A (zh) | 1993-12-22 |
DE69316082D1 (de) | 1998-02-12 |
FI98095B (fi) | 1996-12-31 |
EP0571107B1 (en) | 1998-01-07 |
FI922263A (fi) | 1993-11-20 |
EP0571107A1 (en) | 1993-11-24 |
CN1047663C (zh) | 1999-12-22 |
FI98095C (fi) | 1997-04-10 |
JPH0634474A (ja) | 1994-02-08 |
FI922263A0 (fi) | 1992-05-19 |
BR9301922A (pt) | 1993-11-23 |
MX9302895A (es) | 1994-02-28 |
DE69316082T2 (de) | 1998-08-27 |
NO931790D0 (no) | 1993-05-18 |
KR930023710A (ko) | 1993-12-21 |
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