MX9302895A - Transductor de fuerza optica basado en un resonador fabry-perot, con un resonador fabry-perot de barrido como un elemento de la parte transductora. - Google Patents

Transductor de fuerza optica basado en un resonador fabry-perot, con un resonador fabry-perot de barrido como un elemento de la parte transductora.

Info

Publication number
MX9302895A
MX9302895A MX9302895A MX9302895A MX9302895A MX 9302895 A MX9302895 A MX 9302895A MX 9302895 A MX9302895 A MX 9302895A MX 9302895 A MX9302895 A MX 9302895A MX 9302895 A MX9302895 A MX 9302895A
Authority
MX
Mexico
Prior art keywords
fabry
perot
resonator
sweeping
transducer
Prior art date
Application number
MX9302895A
Other languages
English (en)
Inventor
Simo Tammela
Ari Lehto
Markku Orpana
Anssi Korhonen
Original Assignee
Vaisala Technologies Inc Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Technologies Inc Oy filed Critical Vaisala Technologies Inc Oy
Publication of MX9302895A publication Critical patent/MX9302895A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

La presente invención se refiere a un transductor para medir fuerza. El transductor incluye una parte de cuerpo (15), un elemento de percepción (27 37) montado con resorte sobre la parte de cuerpo (15), actuando el elemento de percepción activado como un elemento de recepción de fuerza, cuya desviación en relación con la parte de cuerpo (15), se puede emplear para calcular la fuerza aplicada sobre el elemento de percepción (27, 37), y un conjunto de detección óptica (1, 6, 8), para determinar la desviación del elemento de percepción (27, 37).
MX9302895A 1992-05-19 1993-05-18 Transductor de fuerza optica basado en un resonador fabry-perot, con un resonador fabry-perot de barrido como un elemento de la parte transductora. MX9302895A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI922263A FI98095C (fi) 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori

Publications (1)

Publication Number Publication Date
MX9302895A true MX9302895A (es) 1994-02-28

Family

ID=8535311

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9302895A MX9302895A (es) 1992-05-19 1993-05-18 Transductor de fuerza optica basado en un resonador fabry-perot, con un resonador fabry-perot de barrido como un elemento de la parte transductora.

Country Status (9)

Country Link
EP (1) EP0571107B1 (es)
JP (1) JPH0634474A (es)
KR (1) KR930023710A (es)
CN (1) CN1047663C (es)
BR (1) BR9301922A (es)
DE (1) DE69316082T2 (es)
FI (1) FI98095C (es)
MX (1) MX9302895A (es)
NO (1) NO931790L (es)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0729051A3 (en) * 1995-02-21 1998-06-17 Ascom Tech Ag Optical reflection modulator
US5831262A (en) * 1997-06-27 1998-11-03 Lucent Technologies Inc. Article comprising an optical fiber attached to a micromechanical device
US7330271B2 (en) 2000-11-28 2008-02-12 Rosemount, Inc. Electromagnetic resonant sensor with dielectric body and variable gap cavity
WO2002044672A2 (en) * 2000-11-28 2002-06-06 Rosemount Inc. Arrangement for measuring physical parameters with an optical sensor
NO315177B1 (no) 2001-11-29 2003-07-21 Sinvent As Optisk forskyvnings-sensor
DE10224790B4 (de) * 2002-06-04 2004-10-21 Infineon Technologies Ag Beschleunigungssensor und Verfahren zum Herstellen eines Beschleunigungssensors
US7043115B2 (en) 2002-12-18 2006-05-09 Rosemount, Inc. Tunable optical filter
US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US7835598B2 (en) 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
US7689071B2 (en) * 2004-12-22 2010-03-30 Opsens Inc. Fiber optic pressure sensor for catheter use
EP1869737B1 (en) 2005-03-16 2021-05-12 Davidson Instruments, Inc. High intensity fabry-perot sensor
JP4817786B2 (ja) * 2005-10-03 2011-11-16 株式会社山武 差圧測定システム及び差圧測定方法
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
WO2007126475A2 (en) 2006-04-26 2007-11-08 Davidson Instruments, Inc. Fiber optic mems seismic sensor with mass supported by hinged beams
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
EP2381329B1 (en) 2008-12-25 2013-08-21 Toyota Jidosha Kabushiki Kaisha Damping force controller
US8904867B2 (en) * 2010-11-04 2014-12-09 Qualcomm Mems Technologies, Inc. Display-integrated optical accelerometer
DE102012217700B4 (de) * 2012-09-28 2015-03-12 Carl Zeiss Smt Gmbh Messvorrichtung zur Messung einer Strahlposition
GB2508908B (en) 2012-12-14 2017-02-15 Gen Electric Resonator device
FR3000545B1 (fr) * 2012-12-27 2015-07-31 Commissariat Energie Atomique Microbarometre a soufflet et a transducteur interferometrique
CN113281579B (zh) * 2021-04-28 2023-01-24 西安理工大学 一种基于f-p干涉原理的芯片封装静电测量传感器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0769520B2 (ja) * 1985-10-16 1995-07-31 ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ 可動部材の取付構造
GB2186708B (en) * 1985-11-26 1990-07-11 Sharp Kk A variable interferometric device and a process for the production of the same
DE3816529A1 (de) * 1988-05-14 1989-11-23 Kistler Instr Gmbh Druckmessvorrichtung

Also Published As

Publication number Publication date
CN1079822A (zh) 1993-12-22
FI98095C (fi) 1997-04-10
DE69316082T2 (de) 1998-08-27
CN1047663C (zh) 1999-12-22
FI922263A0 (fi) 1992-05-19
NO931790D0 (no) 1993-05-18
FI98095B (fi) 1996-12-31
JPH0634474A (ja) 1994-02-08
KR930023710A (ko) 1993-12-21
BR9301922A (pt) 1993-11-23
NO931790L (no) 1993-11-22
EP0571107B1 (en) 1998-01-07
FI922263A (fi) 1993-11-20
EP0571107A1 (en) 1993-11-24
DE69316082D1 (de) 1998-02-12

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