FI922263A - Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori - Google Patents

Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori Download PDF

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Publication number
FI922263A
FI922263A FI922263A FI922263A FI922263A FI 922263 A FI922263 A FI 922263A FI 922263 A FI922263 A FI 922263A FI 922263 A FI922263 A FI 922263A FI 922263 A FI922263 A FI 922263A
Authority
FI
Finland
Prior art keywords
fabry
perot resonator
detector
optical power
sensor based
Prior art date
Application number
FI922263A
Other languages
English (en)
Swedish (sv)
Other versions
FI98095C (fi
FI922263A0 (fi
FI98095B (fi
Inventor
Ari Lehto
Markku Orpana
Anssi Korhonen
Simo Tammela
Original Assignee
Vaisala Technologies Inc Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Technologies Inc Oy filed Critical Vaisala Technologies Inc Oy
Publication of FI922263A0 publication Critical patent/FI922263A0/fi
Priority to FI922263A priority Critical patent/FI98095C/fi
Priority to EP93303505A priority patent/EP0571107B1/en
Priority to DE69316082T priority patent/DE69316082T2/de
Priority to BR9301922A priority patent/BR9301922A/pt
Priority to MX9302895A priority patent/MX9302895A/es
Priority to NO931790A priority patent/NO931790L/no
Priority to CN93106162A priority patent/CN1047663C/zh
Priority to JP5117200A priority patent/JPH0634474A/ja
Priority to KR1019930008561A priority patent/KR930023710A/ko
Publication of FI922263A publication Critical patent/FI922263A/fi
Application granted granted Critical
Publication of FI98095B publication Critical patent/FI98095B/fi
Publication of FI98095C publication Critical patent/FI98095C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Micromachines (AREA)
  • Spectrometry And Color Measurement (AREA)
FI922263A 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori FI98095C (fi)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FI922263A FI98095C (fi) 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori
EP93303505A EP0571107B1 (en) 1992-05-19 1993-05-06 Optical force transducer based on a Fabry-Perot resonator, with a sweeping Fabry-Perot resonator as an element of the transducing part
DE69316082T DE69316082T2 (de) 1992-05-19 1993-05-06 Optischer Kraftwandler mit Fabry-Perot Resonator und einem weiteren abtastendem Fabry-Perot Resonator
MX9302895A MX9302895A (es) 1992-05-19 1993-05-18 Transductor de fuerza optica basado en un resonador fabry-perot, con un resonador fabry-perot de barrido como un elemento de la parte transductora.
BR9301922A BR9301922A (pt) 1992-05-19 1993-05-18 Transdutor para medicao de forca
NO931790A NO931790L (no) 1992-05-19 1993-05-18 Optisk transduser for kraftm}ling
CN93106162A CN1047663C (zh) 1992-05-19 1993-05-19 以扫描法布里珀罗共振器作为传感部分元件的光学压力传感器
JP5117200A JPH0634474A (ja) 1992-05-19 1993-05-19 力測定変換器
KR1019930008561A KR930023710A (ko) 1992-05-19 1993-05-19 페브리 페로 공진기를 포함하는 광력변환기

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI922263A FI98095C (fi) 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori
FI922263 1992-05-19

Publications (4)

Publication Number Publication Date
FI922263A0 FI922263A0 (fi) 1992-05-19
FI922263A true FI922263A (fi) 1993-11-20
FI98095B FI98095B (fi) 1996-12-31
FI98095C FI98095C (fi) 1997-04-10

Family

ID=8535311

Family Applications (1)

Application Number Title Priority Date Filing Date
FI922263A FI98095C (fi) 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori

Country Status (9)

Country Link
EP (1) EP0571107B1 (fi)
JP (1) JPH0634474A (fi)
KR (1) KR930023710A (fi)
CN (1) CN1047663C (fi)
BR (1) BR9301922A (fi)
DE (1) DE69316082T2 (fi)
FI (1) FI98095C (fi)
MX (1) MX9302895A (fi)
NO (1) NO931790L (fi)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0729051A3 (en) * 1995-02-21 1998-06-17 Ascom Tech Ag Optical reflection modulator
US5831262A (en) * 1997-06-27 1998-11-03 Lucent Technologies Inc. Article comprising an optical fiber attached to a micromechanical device
US7330271B2 (en) 2000-11-28 2008-02-12 Rosemount, Inc. Electromagnetic resonant sensor with dielectric body and variable gap cavity
WO2002044672A2 (en) * 2000-11-28 2002-06-06 Rosemount Inc. Arrangement for measuring physical parameters with an optical sensor
NO315177B1 (no) 2001-11-29 2003-07-21 Sinvent As Optisk forskyvnings-sensor
DE10224790B4 (de) * 2002-06-04 2004-10-21 Infineon Technologies Ag Beschleunigungssensor und Verfahren zum Herstellen eines Beschleunigungssensors
US7043115B2 (en) 2002-12-18 2006-05-09 Rosemount, Inc. Tunable optical filter
US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US7835598B2 (en) 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
US7689071B2 (en) * 2004-12-22 2010-03-30 Opsens Inc. Fiber optic pressure sensor for catheter use
EP1869737B1 (en) 2005-03-16 2021-05-12 Davidson Instruments, Inc. High intensity fabry-perot sensor
JP4817786B2 (ja) * 2005-10-03 2011-11-16 株式会社山武 差圧測定システム及び差圧測定方法
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
WO2007126475A2 (en) 2006-04-26 2007-11-08 Davidson Instruments, Inc. Fiber optic mems seismic sensor with mass supported by hinged beams
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
EP2381329B1 (en) 2008-12-25 2013-08-21 Toyota Jidosha Kabushiki Kaisha Damping force controller
US8904867B2 (en) * 2010-11-04 2014-12-09 Qualcomm Mems Technologies, Inc. Display-integrated optical accelerometer
DE102012217700B4 (de) * 2012-09-28 2015-03-12 Carl Zeiss Smt Gmbh Messvorrichtung zur Messung einer Strahlposition
GB2508908B (en) 2012-12-14 2017-02-15 Gen Electric Resonator device
FR3000545B1 (fr) * 2012-12-27 2015-07-31 Commissariat Energie Atomique Microbarometre a soufflet et a transducteur interferometrique
CN113281579B (zh) * 2021-04-28 2023-01-24 西安理工大学 一种基于f-p干涉原理的芯片封装静电测量传感器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0769520B2 (ja) * 1985-10-16 1995-07-31 ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ 可動部材の取付構造
GB2186708B (en) * 1985-11-26 1990-07-11 Sharp Kk A variable interferometric device and a process for the production of the same
DE3816529A1 (de) * 1988-05-14 1989-11-23 Kistler Instr Gmbh Druckmessvorrichtung

Also Published As

Publication number Publication date
CN1079822A (zh) 1993-12-22
FI98095C (fi) 1997-04-10
DE69316082T2 (de) 1998-08-27
CN1047663C (zh) 1999-12-22
FI922263A0 (fi) 1992-05-19
NO931790D0 (no) 1993-05-18
FI98095B (fi) 1996-12-31
JPH0634474A (ja) 1994-02-08
MX9302895A (es) 1994-02-28
KR930023710A (ko) 1993-12-21
BR9301922A (pt) 1993-11-23
NO931790L (no) 1993-11-22
EP0571107B1 (en) 1998-01-07
EP0571107A1 (en) 1993-11-24
DE69316082D1 (de) 1998-02-12

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Legal Events

Date Code Title Description
GB Transfer or assigment of application

Owner name: VAISALA TECHNOLOGIES INC., OY

BB Publication of examined application
MA Patent expired