NO931789L - Optisk krafttransduser basert p} en Fabry-Perot-resonator - Google Patents

Optisk krafttransduser basert p} en Fabry-Perot-resonator

Info

Publication number
NO931789L
NO931789L NO931789A NO931789A NO931789L NO 931789 L NO931789 L NO 931789L NO 931789 A NO931789 A NO 931789A NO 931789 A NO931789 A NO 931789A NO 931789 L NO931789 L NO 931789L
Authority
NO
Norway
Prior art keywords
sensor element
resonator
optical
spectrum
force
Prior art date
Application number
NO931789A
Other languages
English (en)
Other versions
NO931789D0 (no
Inventor
Ari Lehto
Markku Orpana
Anssi Korhonen
Simo Tammela
Original Assignee
Vaisala Technologies Inc Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Technologies Inc Oy filed Critical Vaisala Technologies Inc Oy
Publication of NO931789D0 publication Critical patent/NO931789D0/no
Publication of NO931789L publication Critical patent/NO931789L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Oppfinnelsen angår en transduser for måling av kraft. Transduseren omfatter et legeme (15), et sensorelement (27, 37) som er fjærende montert på legemet (15), hvor det aktiverte følerelement virker som et kraftmottagende element hvis avbøyning i forhold til legemet (15) kan benyttes til å beregne den kraft som utøves på følerelementet (27, 37), og en optisk detektorenhet (l, 2, 3, 5, 6) for å bestemme avbøyningen av følerelementet (27, 37). Ifølge oppfin- nelsen danner legemet (15) og følerele- mentet (27, 37) en kort optisk Fabry- Perot-resonator (21, 23) som opereres i refleksjonsmodus, og den optiske detek- sjonsenhet (l, 2, 3, 5, 6) omfatter en lyskilde (1) med bredt spektrum, optiske ledere (2, 3) for å lede en lysstråle fra lyskilden (1) til resonatoren (33) og tilbake derfra til deteksjonselemen- tene, et dispersjonselement (5) for å oppløse lysspekteret som mottas fra resonatoren (33) til bølgelengdebånd, og detektorelementer (6) for å detektere bølgelengdene for absorpsjonsmaksima (Al, A2) i det spredte lysspektrum, slik at plasseringen av spekterets intensi- tetsminima kan brukes til å beregne den optiske lengde for resonatoren (33) som er proporsjonal med den kraft (F, F') som utøves på følerelementet (27, 37).
NO931789A 1992-05-19 1993-05-18 Optisk krafttransduser basert p} en Fabry-Perot-resonator NO931789L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI922262A FI98094C (fi) 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi

Publications (2)

Publication Number Publication Date
NO931789D0 NO931789D0 (no) 1993-05-18
NO931789L true NO931789L (no) 1993-11-22

Family

ID=8535310

Family Applications (1)

Application Number Title Priority Date Filing Date
NO931789A NO931789L (no) 1992-05-19 1993-05-18 Optisk krafttransduser basert p} en Fabry-Perot-resonator

Country Status (8)

Country Link
EP (1) EP0571106A1 (no)
JP (1) JPH0634469A (no)
KR (1) KR930023713A (no)
CN (1) CN1047662C (no)
BR (1) BR9301923A (no)
FI (1) FI98094C (no)
MX (1) MX9302894A (no)
NO (1) NO931789L (no)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI98094C (fi) * 1992-05-19 1997-04-10 Vaisala Technologies Inc Oy Fabry-Perot resonaattoriin perustuva optinen voima-anturi
JP2005291945A (ja) * 2004-03-31 2005-10-20 Masaki Esashi センサ装置
JP2005291946A (ja) * 2004-03-31 2005-10-20 Masaki Esashi 光ファイバセンサ
CN100386598C (zh) * 2005-03-04 2008-05-07 南开大学 应力长周期光纤光栅可读施力构件
WO2007019714A1 (de) * 2005-08-12 2007-02-22 Inficon Gmbh Optischer interferometrische drucksensor
US7728984B2 (en) * 2008-02-28 2010-06-01 Inficon Gmbh Method for evaluating a measured parameter
US9320942B2 (en) 2010-01-20 2016-04-26 Nike, Inc. Golf ball with cover layer having zones of differing materials
DE102012111533A1 (de) 2012-11-28 2014-05-28 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
GB2509105B (en) * 2012-12-20 2017-02-22 Oxsensis Ltd Mechanical resonator sensor
CN106969874B (zh) * 2016-01-14 2019-09-13 中国科学院上海微系统与信息技术研究所 力敏薄膜厚度精确可控的差压传感结构及其制备方法
CN111366189A (zh) * 2020-02-24 2020-07-03 北京理工大学 用于感测压力或振动的系统和方法
JP2023067342A (ja) * 2021-11-01 2023-05-16 朝日インテック株式会社 光学式圧力センサおよびその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8414671D0 (en) * 1984-06-08 1984-07-11 Sira Ltd Wavelength detection
DE3816529A1 (de) * 1988-05-14 1989-11-23 Kistler Instr Gmbh Druckmessvorrichtung
US5020910A (en) * 1990-03-05 1991-06-04 Motorola, Inc. Monolithic diffraction spectrometer
EP0460357A3 (en) * 1990-06-08 1992-07-29 Landis & Gyr Betriebs Ag Device for optical measurement of pressure differences
FI98094C (fi) * 1992-05-19 1997-04-10 Vaisala Technologies Inc Oy Fabry-Perot resonaattoriin perustuva optinen voima-anturi

Also Published As

Publication number Publication date
NO931789D0 (no) 1993-05-18
MX9302894A (es) 1994-02-28
KR930023713A (ko) 1993-12-21
BR9301923A (pt) 1993-11-23
FI922262A0 (fi) 1992-05-19
CN1079821A (zh) 1993-12-22
EP0571106A1 (en) 1993-11-24
FI98094C (fi) 1997-04-10
FI922262A (fi) 1993-11-20
FI98094B (fi) 1996-12-31
JPH0634469A (ja) 1994-02-08
CN1047662C (zh) 1999-12-22

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Legal Events

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