FI922262A - Fabry-Perot resonaattoriin perustuva optinen voima-anturi - Google Patents

Fabry-Perot resonaattoriin perustuva optinen voima-anturi Download PDF

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Publication number
FI922262A
FI922262A FI922262A FI922262A FI922262A FI 922262 A FI922262 A FI 922262A FI 922262 A FI922262 A FI 922262A FI 922262 A FI922262 A FI 922262A FI 922262 A FI922262 A FI 922262A
Authority
FI
Finland
Prior art keywords
fabry
force sensor
sensor based
perot resonator
optical force
Prior art date
Application number
FI922262A
Other languages
English (en)
Swedish (sv)
Other versions
FI98094C (fi
FI98094B (fi
FI922262A0 (fi
Inventor
Ari Lehto
Markku Orpana
Anssi Korhonen
Simo Tammela
Original Assignee
Vaisala Technologies Inc Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Technologies Inc Oy filed Critical Vaisala Technologies Inc Oy
Publication of FI922262A0 publication Critical patent/FI922262A0/fi
Priority to FI922262A priority Critical patent/FI98094C/fi
Priority to EP93303504A priority patent/EP0571106A1/en
Priority to MX9302894A priority patent/MX9302894A/es
Priority to JP5115978A priority patent/JPH0634469A/ja
Priority to BR9301923A priority patent/BR9301923A/pt
Priority to NO931789A priority patent/NO931789L/no
Priority to KR1019930008560A priority patent/KR930023713A/ko
Priority to CN93106073A priority patent/CN1047662C/zh
Publication of FI922262A publication Critical patent/FI922262A/fi
Application granted granted Critical
Publication of FI98094B publication Critical patent/FI98094B/fi
Publication of FI98094C publication Critical patent/FI98094C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FI922262A 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi FI98094C (fi)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI922262A FI98094C (fi) 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi
EP93303504A EP0571106A1 (en) 1992-05-19 1993-05-06 Optical force transducer based on a fabry-perot resonator
BR9301923A BR9301923A (pt) 1992-05-19 1993-05-18 Transdutor para medicao de forca
JP5115978A JPH0634469A (ja) 1992-05-19 1993-05-18 力測定用変換器
MX9302894A MX9302894A (es) 1992-05-19 1993-05-18 Transductor de fuerza optica basado en un resonador fabry-perot.
NO931789A NO931789L (no) 1992-05-19 1993-05-18 Optisk krafttransduser basert p} en Fabry-Perot-resonator
KR1019930008560A KR930023713A (ko) 1992-05-19 1993-05-19 힘측정용 변환기
CN93106073A CN1047662C (zh) 1992-05-19 1993-05-19 基于法布里－珀罗共振腔的光学压力传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI922262A FI98094C (fi) 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi
FI922262 1992-05-19

Publications (4)

Publication Number Publication Date
FI922262A0 FI922262A0 (fi) 1992-05-19
FI922262A true FI922262A (fi) 1993-11-20
FI98094B FI98094B (fi) 1996-12-31
FI98094C FI98094C (fi) 1997-04-10

Family

ID=8535310

Family Applications (1)

Application Number Title Priority Date Filing Date
FI922262A FI98094C (fi) 1992-05-19 1992-05-19 Fabry-Perot resonaattoriin perustuva optinen voima-anturi

Country Status (8)

Country Link
EP (1) EP0571106A1 (fi)
JP (1) JPH0634469A (fi)
KR (1) KR930023713A (fi)
CN (1) CN1047662C (fi)
BR (1) BR9301923A (fi)
FI (1) FI98094C (fi)
MX (1) MX9302894A (fi)
NO (1) NO931789L (fi)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI98094C (fi) * 1992-05-19 1997-04-10 Vaisala Technologies Inc Oy Fabry-Perot resonaattoriin perustuva optinen voima-anturi
JP2005291945A (ja) * 2004-03-31 2005-10-20 Masaki Esashi センサ装置
JP2005291946A (ja) * 2004-03-31 2005-10-20 Masaki Esashi 光ファイバセンサ
CN100386598C (zh) * 2005-03-04 2008-05-07 南开大学 应力长周期光纤光栅可读施力构件
WO2007019714A1 (de) * 2005-08-12 2007-02-22 Inficon Gmbh Optischer interferometrische drucksensor
US7728984B2 (en) 2008-02-28 2010-06-01 Inficon Gmbh Method for evaluating a measured parameter
US9320942B2 (en) 2010-01-20 2016-04-26 Nike, Inc. Golf ball with cover layer having zones of differing materials
DE102012111533A1 (de) 2012-11-28 2014-05-28 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
GB2509105B (en) * 2012-12-20 2017-02-22 Oxsensis Ltd Mechanical resonator sensor
CN106969874B (zh) * 2016-01-14 2019-09-13 中国科学院上海微系统与信息技术研究所 力敏薄膜厚度精确可控的差压传感结构及其制备方法
CN111366189A (zh) * 2020-02-24 2020-07-03 北京理工大学 用于感测压力或振动的系统和方法
JP2023067342A (ja) * 2021-11-01 2023-05-16 朝日インテック株式会社 光学式圧力センサおよびその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8414671D0 (en) * 1984-06-08 1984-07-11 Sira Ltd Wavelength detection
DE3816529A1 (de) * 1988-05-14 1989-11-23 Kistler Instr Gmbh Druckmessvorrichtung
US5020910A (en) * 1990-03-05 1991-06-04 Motorola, Inc. Monolithic diffraction spectrometer
EP0460357A3 (en) * 1990-06-08 1992-07-29 Landis & Gyr Betriebs Ag Device for optical measurement of pressure differences
FI98094C (fi) * 1992-05-19 1997-04-10 Vaisala Technologies Inc Oy Fabry-Perot resonaattoriin perustuva optinen voima-anturi

Also Published As

Publication number Publication date
FI98094C (fi) 1997-04-10
CN1047662C (zh) 1999-12-22
NO931789L (no) 1993-11-22
MX9302894A (es) 1994-02-28
NO931789D0 (no) 1993-05-18
FI98094B (fi) 1996-12-31
KR930023713A (ko) 1993-12-21
FI922262A0 (fi) 1992-05-19
BR9301923A (pt) 1993-11-23
CN1079821A (zh) 1993-12-22
JPH0634469A (ja) 1994-02-08
EP0571106A1 (en) 1993-11-24

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Legal Events

Date Code Title Description
GB Transfer or assigment of application

Owner name: VAISALA TECHNOLOGIES INC., OY

BB Publication of examined application
MA Patent expired