NO930849L - Kapasitiv akselerasjonsfoeler og dens anvendelse ved et ikke-servoakselerometer - Google Patents

Kapasitiv akselerasjonsfoeler og dens anvendelse ved et ikke-servoakselerometer

Info

Publication number
NO930849L
NO930849L NO93930849A NO930849A NO930849L NO 930849 L NO930849 L NO 930849L NO 93930849 A NO93930849 A NO 93930849A NO 930849 A NO930849 A NO 930849A NO 930849 L NO930849 L NO 930849L
Authority
NO
Norway
Prior art keywords
measuring arm
armeter
faults
accelerator
capacity
Prior art date
Application number
NO93930849A
Other languages
English (en)
Other versions
NO930849D0 (no
Inventor
Michel Levy
Alfred Permuy
Original Assignee
Applic Gen D Electricite Et De
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applic Gen D Electricite Et De filed Critical Applic Gen D Electricite Et De
Publication of NO930849D0 publication Critical patent/NO930849D0/no
Publication of NO930849L publication Critical patent/NO930849L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)

Abstract

Miniatyriserbar føler innbefattende et isolerende substrat (10) som bærer en første måleelektrode (24) og Innbefatter en fleksibel målearm (18) av ledende eller halvledende materiale, hvilke ene ende er fastgjort til substratet (10) og den andre enden utgjør en andre elektrode som vender mot den første elektroden. Den første endentil målearmen er fastgjort til substratet via en bjelke (16) med en bøyekoeffIslent som er i det minste ti ganger større enn den til målearmen (18) og anordnet i hovedsaken parallelt med målearmen og fastgjort via en fot (14) stivt med substratet (10) og anbragt mellom de to endene til målearmen, idet forbindelsene mellom bjelken (16) og målearmen (18) og foten (14) er av fast-endetypen.
NO93930849A 1992-03-09 1993-03-08 Kapasitiv akselerasjonsfoeler og dens anvendelse ved et ikke-servoakselerometer NO930849L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9202782A FR2688315B1 (fr) 1992-03-09 1992-03-09 Capteur accelerometrique capacitif et accelerometre non asservi en comportant application.

Publications (2)

Publication Number Publication Date
NO930849D0 NO930849D0 (no) 1993-03-08
NO930849L true NO930849L (no) 1993-09-10

Family

ID=9427492

Family Applications (1)

Application Number Title Priority Date Filing Date
NO93930849A NO930849L (no) 1992-03-09 1993-03-08 Kapasitiv akselerasjonsfoeler og dens anvendelse ved et ikke-servoakselerometer

Country Status (6)

Country Link
US (1) US5375469A (no)
EP (1) EP0560661B1 (no)
DE (1) DE69301044T2 (no)
ES (1) ES2081693T3 (no)
FR (1) FR2688315B1 (no)
NO (1) NO930849L (no)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4324692A1 (de) * 1993-07-23 1995-01-26 Bosch Gmbh Robert Piezoelektrischer Kraftsensor
US5814727A (en) * 1993-11-08 1998-09-29 Motorola, Inc. Semiconductor accelerometer having reduced sensor plate flexure
US5594170A (en) * 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
EP0752159B1 (en) * 1994-11-23 2000-01-05 Koninklijke Philips Electronics N.V. Semiconductor device provided with a microcomponent having a fixed and a movable electrode
EP1847850B1 (en) * 1999-03-17 2013-04-24 ION Geophysical Corporation Hydrophone assembly
US6776043B1 (en) * 2003-02-07 2004-08-17 The Boeing Company Variable capacitance bridge accelerometer
JP4437699B2 (ja) * 2004-05-14 2010-03-24 富士通マイクロエレクトロニクス株式会社 センサ
US7131315B2 (en) 2004-09-28 2006-11-07 Honeywell International Inc. Methods and apparatus for reducing vibration rectification errors in closed-loop accelerometers
KR100899812B1 (ko) * 2006-12-05 2009-05-27 한국전자통신연구원 정전 용량형 가속도계
US8939029B2 (en) * 2008-09-05 2015-01-27 Analog Devices, Inc. MEMS sensor with movable Z-axis sensing element

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3012192A (en) * 1961-12-05 Electric system
DE1466708A1 (de) * 1964-08-04 1969-01-30 Hellige & Co Gmbh F Traegerfrequenzmessbrueckenverstaerker mit selbsttaetigem Brueckenabgleich
SU534694A1 (ru) * 1975-04-14 1976-11-05 Московское Ордена Ленина И Ордена Трудового Красного Знамени Высшее Техническое Училище Им.Н.Э.Баумана Акселерометр
US4356730A (en) * 1981-01-08 1982-11-02 International Business Machines Corporation Electrostatically deformographic switches
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
CH648929A5 (fr) * 1982-07-07 1985-04-15 Tesa Sa Dispositif de mesure capacitif de deplacement.
FR2558263B1 (fr) * 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
IL80550A0 (en) * 1986-11-07 1987-02-27 Israel Aircraft Ind Ltd Resonant element force transducer for acceleration sensing
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer

Also Published As

Publication number Publication date
FR2688315A1 (fr) 1993-09-10
US5375469A (en) 1994-12-27
DE69301044T2 (de) 1996-08-22
EP0560661B1 (fr) 1995-12-20
DE69301044D1 (de) 1996-02-01
FR2688315B1 (fr) 1994-05-27
NO930849D0 (no) 1993-03-08
ES2081693T3 (es) 1996-03-16
EP0560661A1 (fr) 1993-09-15

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