DE60129732D1 - Wandler zwischen anspannung/elektrischem potential - Google Patents

Wandler zwischen anspannung/elektrischem potential

Info

Publication number
DE60129732D1
DE60129732D1 DE60129732T DE60129732T DE60129732D1 DE 60129732 D1 DE60129732 D1 DE 60129732D1 DE 60129732 T DE60129732 T DE 60129732T DE 60129732 T DE60129732 T DE 60129732T DE 60129732 D1 DE60129732 D1 DE 60129732D1
Authority
DE
Germany
Prior art keywords
stack
base
displacement
transducer
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60129732T
Other languages
English (en)
Other versions
DE60129732T2 (de
Inventor
Jeremy Rex Wallis
Philip Wayne Loveday
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Council for Scientific and Industrial Research CSIR
Original Assignee
Council for Scientific and Industrial Research CSIR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Council for Scientific and Industrial Research CSIR filed Critical Council for Scientific and Industrial Research CSIR
Publication of DE60129732D1 publication Critical patent/DE60129732D1/de
Application granted granted Critical
Publication of DE60129732T2 publication Critical patent/DE60129732T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/33—Transforming infrared radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Fuel-Injection Apparatus (AREA)
DE60129732T 2000-11-21 2001-11-20 Dehnungs/elektropotential-umwandler Expired - Lifetime DE60129732T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ZA200006812 2000-11-21
ZA200006812 2000-11-21
PCT/IB2001/002182 WO2002043163A2 (en) 2000-11-21 2001-11-20 Strain/electrical potential transducer

Publications (2)

Publication Number Publication Date
DE60129732D1 true DE60129732D1 (de) 2007-09-13
DE60129732T2 DE60129732T2 (de) 2008-04-30

Family

ID=25588987

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60129732T Expired - Lifetime DE60129732T2 (de) 2000-11-21 2001-11-20 Dehnungs/elektropotential-umwandler

Country Status (8)

Country Link
US (1) US6820495B2 (de)
EP (1) EP1336206B1 (de)
JP (1) JP4184080B2 (de)
KR (1) KR100785760B1 (de)
AT (1) ATE368940T1 (de)
AU (1) AU2002220941A1 (de)
DE (1) DE60129732T2 (de)
WO (1) WO2002043163A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2538972A1 (en) 2003-10-07 2005-04-21 Craig Strong Flexible lens mount system for rapid tilt photography
WO2008027846A2 (en) 2006-08-30 2008-03-06 Lensbabies, Llc Movable lens systems and associated methods
US7681290B2 (en) * 2006-10-20 2010-03-23 The Boeing Company Piezoelectric bimorph beam manufacturing method
CN102245348B (zh) * 2008-10-09 2015-08-12 纽卡斯尔创新有限公司 定位系统和方法
FR2971650B1 (fr) * 2011-02-11 2013-02-22 Commissariat Energie Atomique Didspositif de conversion d'energie mecanique en energie electrique optimise
EP3118630A1 (de) * 2015-07-15 2017-01-18 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Positionierungsarm zur und verfahren zur platzierung eines abtastkopfes auf eine stützfläche
KR102349127B1 (ko) * 2016-10-20 2022-01-10 에이에스엠엘 네델란즈 비.브이. 압력 제어 밸브, 리소그래피 장치용 유체 핸들링 구조체 및 리소그래피 장치
CN110870194B (zh) * 2017-07-07 2023-09-22 有限会社机械变压器 位移放大机构、研磨装置、促动器、分配器及气阀
KR102653987B1 (ko) * 2018-06-11 2024-04-02 회르비거 플로우 컨트롤 게엠베하 안전 밸브

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748623A (en) * 1972-07-25 1973-07-24 Millar Instruments Pressure transducers
US4093883A (en) * 1975-06-23 1978-06-06 Yujiro Yamamoto Piezoelectric multimorph switches
JPH05304323A (ja) 1992-02-06 1993-11-16 Nec Corp 変位拡大機構
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5903085A (en) 1997-06-18 1999-05-11 Phase Metrics, Inc. Piezoelectric nanopositioner
DE19739877C2 (de) * 1997-09-11 2003-04-17 Eurocopter Deutschland Mechanischer Resonator mit variabler Resonanzfrequenz
DE19742205A1 (de) 1997-09-24 1998-03-12 Heinzl Joachim Mikropositioniereinrichtung
DE19827603A1 (de) 1998-06-20 1999-12-23 Zeiss Carl Fa Optisches System, insbesondere Projektions-Belichtungsanlage der Mikrolithographie

Also Published As

Publication number Publication date
WO2002043163A3 (en) 2002-08-29
KR20030074624A (ko) 2003-09-19
ATE368940T1 (de) 2007-08-15
US20040027780A1 (en) 2004-02-12
EP1336206B1 (de) 2007-08-01
DE60129732T2 (de) 2008-04-30
EP1336206A2 (de) 2003-08-20
WO2002043163A2 (en) 2002-05-30
US6820495B2 (en) 2004-11-23
JP2004523369A (ja) 2004-08-05
JP4184080B2 (ja) 2008-11-19
KR100785760B1 (ko) 2007-12-18
AU2002220941A1 (en) 2002-06-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition