ATE372508T1 - Druckaufnehmer mit bezüglich mechanischer spannungen isolierter trägerplatte - Google Patents
Druckaufnehmer mit bezüglich mechanischer spannungen isolierter trägerplatteInfo
- Publication number
- ATE372508T1 ATE372508T1 AT04077973T AT04077973T ATE372508T1 AT E372508 T1 ATE372508 T1 AT E372508T1 AT 04077973 T AT04077973 T AT 04077973T AT 04077973 T AT04077973 T AT 04077973T AT E372508 T1 ATE372508 T1 AT E372508T1
- Authority
- AT
- Austria
- Prior art keywords
- regard
- support plate
- pressure transducer
- mechanical stresses
- plate insulated
- Prior art date
Links
- 238000002955 isolation Methods 0.000 abstract 3
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/699,752 US6993975B2 (en) | 2003-11-03 | 2003-11-03 | Pressure sensor module having stress isolation platform |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE372508T1 true ATE372508T1 (de) | 2007-09-15 |
Family
ID=34423457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04077973T ATE372508T1 (de) | 2003-11-03 | 2004-10-28 | Druckaufnehmer mit bezüglich mechanischer spannungen isolierter trägerplatte |
Country Status (4)
Country | Link |
---|---|
US (1) | US6993975B2 (de) |
EP (1) | EP1528383B1 (de) |
AT (1) | ATE372508T1 (de) |
DE (1) | DE602004008723T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004063098B4 (de) * | 2004-12-22 | 2008-09-04 | Airbus Deutschland Gmbh | Klebeverbindung zum Verbinden von Bauteilen von Verkehrsmitteln sowie Verfahren zur Ermittlung eines in einer Klebeverbindung herrschenden mechanischen Belastungszustandes |
US7243552B2 (en) | 2005-05-09 | 2007-07-17 | Delphi Technologies, Inc. | Pressure sensor assembly |
US7331212B2 (en) * | 2006-01-09 | 2008-02-19 | Delphi Technologies, Inc. | Sensor module |
US7798010B2 (en) * | 2007-10-11 | 2010-09-21 | Honeywell International Inc. | Sensor geometry for improved package stress isolation |
US9574959B2 (en) | 2014-09-02 | 2017-02-21 | Apple Inc. | Various stress free sensor packages using wafer level supporting die and air gap technique |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0263190A1 (de) | 1986-10-02 | 1988-04-13 | Dräger Nederland B.V. | Druckwandler für medizinische Anwendungen |
DE4342665A1 (de) | 1993-12-14 | 1995-06-22 | Robert Seuffer Gmbh & Co | Drucksensor |
US6240785B1 (en) * | 1996-07-22 | 2001-06-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Cryogenic, absolute, high pressure sensor |
US5740594A (en) | 1996-07-22 | 1998-04-21 | Texas Instruments Incorporated | Method for making a fluid pressure transducer |
US5808210A (en) * | 1996-12-31 | 1998-09-15 | Honeywell Inc. | Thin film resonant microbeam absolute pressure sensor |
US6092425A (en) * | 1999-02-24 | 2000-07-25 | Delco Electronics Corp. | Differential pressure sensor having an alloy or metal isolator |
-
2003
- 2003-11-03 US US10/699,752 patent/US6993975B2/en not_active Expired - Lifetime
-
2004
- 2004-10-28 EP EP04077973A patent/EP1528383B1/de active Active
- 2004-10-28 AT AT04077973T patent/ATE372508T1/de not_active IP Right Cessation
- 2004-10-28 DE DE602004008723T patent/DE602004008723T2/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP1528383A1 (de) | 2005-05-04 |
EP1528383B1 (de) | 2007-09-05 |
DE602004008723D1 (de) | 2007-10-18 |
DE602004008723T2 (de) | 2008-06-12 |
US20050092095A1 (en) | 2005-05-05 |
US6993975B2 (en) | 2006-02-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |