AU2002220941A1 - Strain/electrical potential transducer - Google Patents

Strain/electrical potential transducer

Info

Publication number
AU2002220941A1
AU2002220941A1 AU2002220941A AU2094102A AU2002220941A1 AU 2002220941 A1 AU2002220941 A1 AU 2002220941A1 AU 2002220941 A AU2002220941 A AU 2002220941A AU 2094102 A AU2094102 A AU 2094102A AU 2002220941 A1 AU2002220941 A1 AU 2002220941A1
Authority
AU
Australia
Prior art keywords
stack
strain
base
transducer
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002220941A
Inventor
Philip Wayne Loveday
Jeremy Rex Wallis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Council for Scientific and Industrial Research CSIR
Original Assignee
Council for Scientific and Industrial Research CSIR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Council for Scientific and Industrial Research CSIR filed Critical Council for Scientific and Industrial Research CSIR
Publication of AU2002220941A1 publication Critical patent/AU2002220941A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50Constructional details
    • H04N23/55Optical parts specially adapted for electronic image sensors; Mounting thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302Sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/30Transforming light or analogous information into electric information
    • H04N5/33Transforming infrared radiation

Abstract

A strain/electrical potential transducer (10) includes a rigid base (12), a rigid beam (18) hinged to the base (12) at (20), an elongate stack (14) of dielectric substance, e.g. piezoelectric material, generally parallel with the beam (18) and hinged to the base at (16), and a rigid link (22) interconnecting ends of the beam and stack remote from the base (12). The transducer can be operated as a displacement generator by applying potential difference to the stack (14) via contacts (15) to strain the stack (14) and to cause amplified, transverse displacement as shown at (32). Conversely, the transducer can be operated as a sensor. Displacement at (32) causes strain in the stack (14) which generates a potential difference at the contacts (15). Composite transducers are disclosed. A manipulating device in the form of an arrangement of displacement generators and use thereof for microscanning are disclosed.
AU2002220941A 2000-11-21 2001-11-20 Strain/electrical potential transducer Abandoned AU2002220941A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ZA200006812 2000-11-21
ZA2000/6812 2000-11-21
PCT/IB2001/002182 WO2002043163A2 (en) 2000-11-21 2001-11-20 Strain/electrical potential transducer

Publications (1)

Publication Number Publication Date
AU2002220941A1 true AU2002220941A1 (en) 2002-06-03

Family

ID=25588987

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002220941A Abandoned AU2002220941A1 (en) 2000-11-21 2001-11-20 Strain/electrical potential transducer

Country Status (8)

Country Link
US (1) US6820495B2 (en)
EP (1) EP1336206B1 (en)
JP (1) JP4184080B2 (en)
KR (1) KR100785760B1 (en)
AT (1) ATE368940T1 (en)
AU (1) AU2002220941A1 (en)
DE (1) DE60129732T2 (en)
WO (1) WO2002043163A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1864086B (en) 2003-10-07 2011-06-29 伦兹芭芘斯有限公司 Flexible lens mount system for rapid tilt photography
WO2008027846A2 (en) 2006-08-30 2008-03-06 Lensbabies, Llc Movable lens systems and associated methods
US7681290B2 (en) * 2006-10-20 2010-03-23 The Boeing Company Piezoelectric bimorph beam manufacturing method
JP5563581B2 (en) * 2008-10-09 2014-07-30 ニューカッスル イノベイション リミテッド Positioning system and method
FR2971650B1 (en) * 2011-02-11 2013-02-22 Commissariat Energie Atomique MECHANICAL ENERGY CONVERSION DIDSPOSITIVE IN OPTIMIZED ELECTRICITY
EP3118630A1 (en) * 2015-07-15 2017-01-18 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Positioning arm for and method of placing a scan head on a support surface
JP6818881B2 (en) * 2016-10-20 2021-01-20 エーエスエムエル ネザーランズ ビー.ブイ. Pressure control valves, fluid handling structures for lithographic equipment, and lithographic equipment
WO2019009035A1 (en) * 2017-07-07 2019-01-10 有限会社メカノトランスフォーマ Displacement magnifying mechanism, polishing device, actuator, dispenser, and air valve
KR102653987B1 (en) * 2018-06-11 2024-04-02 회르비거 플로우 컨트롤 게엠베하 safety valve

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748623A (en) * 1972-07-25 1973-07-24 Millar Instruments Pressure transducers
US4093883A (en) * 1975-06-23 1978-06-06 Yujiro Yamamoto Piezoelectric multimorph switches
JPH05304323A (en) 1992-02-06 1993-11-16 Nec Corp Displacement enlargement mechanism
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5903085A (en) * 1997-06-18 1999-05-11 Phase Metrics, Inc. Piezoelectric nanopositioner
DE19739877C2 (en) * 1997-09-11 2003-04-17 Eurocopter Deutschland Mechanical resonator with variable resonance frequency
DE19742205A1 (en) 1997-09-24 1998-03-12 Heinzl Joachim Micropositioning appliance, e.g. for industrial robot
DE19827603A1 (en) 1998-06-20 1999-12-23 Zeiss Carl Fa Projection light exposure system for microlithography

Also Published As

Publication number Publication date
WO2002043163A2 (en) 2002-05-30
ATE368940T1 (en) 2007-08-15
US20040027780A1 (en) 2004-02-12
KR20030074624A (en) 2003-09-19
US6820495B2 (en) 2004-11-23
DE60129732T2 (en) 2008-04-30
EP1336206A2 (en) 2003-08-20
JP2004523369A (en) 2004-08-05
WO2002043163A3 (en) 2002-08-29
JP4184080B2 (en) 2008-11-19
DE60129732D1 (en) 2007-09-13
EP1336206B1 (en) 2007-08-01
KR100785760B1 (en) 2007-12-18

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