JPH05304323A - Displacement enlargement mechanism - Google Patents

Displacement enlargement mechanism

Info

Publication number
JPH05304323A
JPH05304323A JP4020834A JP2083492A JPH05304323A JP H05304323 A JPH05304323 A JP H05304323A JP 4020834 A JP4020834 A JP 4020834A JP 2083492 A JP2083492 A JP 2083492A JP H05304323 A JPH05304323 A JP H05304323A
Authority
JP
Japan
Prior art keywords
displacement
piezoelectric element
fixed
piezoelectric
piezoelectric elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP4020834A
Other languages
Japanese (ja)
Inventor
Akira Oshimi
晃 押味
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP4020834A priority Critical patent/JPH05304323A/en
Publication of JPH05304323A publication Critical patent/JPH05304323A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To protect the other piezoelectric element against breakdown by additionally disposing a displacement regulating section between two piezoelectric elements and setting the stiffness at the displacement regulating section such that an angular displacement takes place at a displacement part, with hinges at the opposite ends of the other piezoelectric element as fulcrums, when a voltage is applied only on one piezoelectric element. CONSTITUTION:A rod type displacement regulating section 4 is disposed between piezoelectric elements 2, 3 while being secured through hinge sections 4a, 4b at the opposite ends to the surface 1a of a displacement part 1 and the surface 5a of a fixed part 5. The piezoelectric element 3 elongates upon application of voltage but the piezoelectric element 2 does not elongate because no voltage is applied thereon. Consequently, an angular displacement takes place between the surface 1a of the displacement part 1 and the surface 5a of the fixed part 5. Since stiffness at the displacement regulating section 4 is set in such a way that an angular displacement takes place between the surfaces 1a, 5a with hinges 6a, 6b secured to the piezoelectric element 2 as fulcrums, tensile force is not applied on the piezoelectric element 2 which is thereby protected against breakdown.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は固定部と変位部との相互
の面間の微小角度制御を行うことが必要な構造物の変位
拡大機構に関し、特に圧電素子の伸張により上記固定部
と変位部との間の角度変位を行う変位拡大機構に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a displacement magnifying mechanism for a structure that requires a minute angle control between mutual surfaces of a fixed portion and a displaced portion, and more particularly to the fixed portion and the displaced portion due to expansion of a piezoelectric element. The present invention relates to a displacement magnifying mechanism that performs an angular displacement with respect to a portion.

【0002】[0002]

【従来の技術】従来の変位拡大機構について図3の正面
図を参照して説明すると、この機構の変位部1の一面1
bは、変位部1に対向する固定部5の一面5bとの間を
両端にヒンジ6aおよび6bを固定した棒状の圧電素子
2と、同様の両端にヒンジ7aおよび7bを固定した圧
電素子3とにより固定部5の一面5bとの間を固定され
ている。この構成において、変位部1の面1aは、別々
に制御された電圧を加えられた上記圧電素子2および3
それぞれの伸張により固定部1から押上げられ、上記圧
電素子2および3の伸張長の差により固定部5の面1a
となす角度を2方向に制御される。なお、ヒンジ6a,
6b,7aおよび7bは、一般に、可とう性を持つよう
に圧電素子2および3より太さを小さくしてあり、固定
部5の面5aと変位部1の面1aとの間の角度変位を生
じやすくしている。また、上記ヒンジ6a,6b,7a
および7bに固定部5および変位部1と同一材質,例え
ば金属等を使用する場合には、それぞれ固定部5および
変位部1と一体に構成してもよい。さらに、圧電素子2
および3はスタックされていてもよい。
2. Description of the Related Art A conventional displacement magnifying mechanism will be described with reference to the front view of FIG.
b is a rod-shaped piezoelectric element 2 having hinges 6a and 6b fixed at both ends between one surface 5b of the fixed portion 5 facing the displacement portion 1, and a piezoelectric element 3 having hinges 7a and 7b fixed at both ends. Is fixed to the one surface 5b of the fixing portion 5. In this configuration, the surface 1a of the displacement portion 1 has the piezoelectric elements 2 and 3 to which the voltages controlled separately are applied.
It is pushed up from the fixed portion 1 by each extension, and the surface 1a of the fixed portion 5 is caused by the difference in extension length of the piezoelectric elements 2 and 3.
The angle formed by and is controlled in two directions. The hinge 6a,
6b, 7a and 7b generally have a smaller thickness than the piezoelectric elements 2 and 3 so as to have flexibility, so that the angular displacement between the surface 5a of the fixed portion 5 and the surface 1a of the displacement portion 1 is reduced. It is easy to occur. Also, the hinges 6a, 6b, 7a
When the same material as that of the fixed portion 5 and the displacement portion 1 is used for 7 and 7b, for example, metal or the like, they may be integrally formed with the fixed portion 5 and the displacement portion 1, respectively. Furthermore, the piezoelectric element 2
And 3 may be stacked.

【0003】[0003]

【発明が解決しようとする課題】この従来の変位拡大機
構では、上記圧電素子に加電して上記固定部と変位部の
面間に角度変位を生じさせる際に、加電伸張度の少ない
方の圧電素子に引張力が加わることにより、この引張ら
れた方の圧電素子を破損させる恐れがあった。
In this conventional displacement magnifying mechanism, when the piezoelectric element is energized to generate an angular displacement between the surfaces of the fixed part and the displacing part, the one having a small degree of extension of the applied electric power. When a tensile force is applied to the piezoelectric element, the piezoelectric element that is pulled may be damaged.

【0004】[0004]

【課題を解決するための手段】本発明の変位拡大機構
は、固定部と、上記固定部に対向する変位部と、上記固
定部の一面と上記変位部の一面とをそれぞれ両端のヒン
ジによって固定するとともに加電によって伸張する2つ
の圧電素子とを有し、上記圧電素子のいずれか一方およ
び両方に加電することによって上記固定部と上記変位部
との相互の面間の角度変位を2方向制御する変位拡大機
構において、上記変位拡大機構が、さらに、上記2つの
圧電素子の間に配置されて上記固定部の一面と上記変位
部の一面とを両端のヒンジ部によって固定するととも
に、上記圧電素子の一方に加電があるときには上記圧電
素子の他方のヒンジを支点として上記角度変位を生じせ
しめる剛性を有する変位調整部を備えている。
DISCLOSURE OF THE INVENTION A displacement magnifying mechanism of the present invention comprises a fixed portion, a displaced portion facing the fixed portion, and one surface of the fixed portion and one surface of the displaced portion fixed by hinges at both ends. And two piezoelectric elements that expand by applying electric power, and by applying electric power to one or both of the piezoelectric elements, the angular displacement between the surfaces of the fixed portion and the displaced portion in two directions. In the displacement magnifying mechanism to be controlled, the displacement magnifying mechanism is further arranged between the two piezoelectric elements to fix the one surface of the fixed portion and the one surface of the displaced portion by the hinge portions at both ends, and the piezoelectric element. A displacement adjusting portion having rigidity to cause the angular displacement with the other hinge of the piezoelectric element as a fulcrum when one of the elements is energized is provided.

【0005】[0005]

【実施例】次に本発明について図面を参照して説明す
る。
The present invention will be described below with reference to the drawings.

【0006】図1は本発明の一実施例の側面図である。
図1の変位拡大機構は、図3に示した従来技術の変位拡
大機構に加えて、上記圧電素子2と3との間に、両端に
ヒンジ部4aおよび4bを有し上記ヒンジ部4aおよび
4bによって上記変位部1の面1aおよび固定部5の面
5aに固定された棒状の変位調整部4を備えている。上
記変位調整部4は、インバー等でつくられており、一方
の圧電素子,例えば圧電素子3に加電してこの圧電素子
3が伸張したときに、他方の圧電素子2に固定されたヒ
ンジ7aおよび7bを支点として上記変位部1を角度変
位させる剛性値を有している。この剛性値は、例えば変
位調整部4の太さを変化させることにより選ぶことがで
きる。
FIG. 1 is a side view of an embodiment of the present invention.
The displacement magnifying mechanism of FIG. 1 has, in addition to the displacement magnifying mechanism of the prior art shown in FIG. 3, hinge portions 4a and 4b at both ends between the piezoelectric elements 2 and 3 and the hinge portions 4a and 4b. Thus, a rod-shaped displacement adjusting portion 4 fixed to the surface 1a of the displacement portion 1 and the surface 5a of the fixed portion 5 is provided. The displacement adjusting section 4 is made of Invar or the like, and when one piezoelectric element, for example, the piezoelectric element 3 is energized to expand the piezoelectric element 3, the hinge 7a fixed to the other piezoelectric element 2 is used. And 7b have a rigidity value for angularly displacing the displacement portion 1 with the fulcrum as a fulcrum. This rigidity value can be selected by changing the thickness of the displacement adjusting section 4, for example.

【0007】次に、図2に示した図1の実施例の動作時
の正面図を参照してこの変位拡大機構の動作を説明す
る。圧電素子3に電圧を加えると、この素子3は伸張す
るが、一方、圧電素子2には電圧を加えておらず、この
素子2は伸張していない。従って、変位部1の面1a
は、この変位部1が圧電素子3に押上げられることによ
って、固定部5の面5aとの間に角度変位を生じる。こ
こで、変位調整部4の剛性が圧電素子2に固定されたヒ
ンジ6aおよび6bを支点に上記変位部1と固定部5の
面1aと5a相互間に角度変位が生じるような値となっ
ているので、圧電素子2には引張力が発生しない。な
お、上記とは逆方向の角度変位を生じさせるには、一例
として圧電素子2にのみ加電すればよい。
Next, the operation of the displacement magnifying mechanism will be described with reference to the front view of the embodiment of FIG. 1 in operation shown in FIG. When a voltage is applied to the piezoelectric element 3, this element 3 expands. On the other hand, no voltage is applied to the piezoelectric element 2 and this element 2 does not expand. Therefore, the surface 1a of the displacement portion 1
When the displacement portion 1 is pushed up by the piezoelectric element 3, an angular displacement is generated between the displacement portion 1 and the surface 5a of the fixed portion 5. Here, the rigidity of the displacement adjusting portion 4 is a value such that angular displacement occurs between the surfaces 1a and 5a of the displacement portion 1 and the fixed portion 5 with the hinges 6a and 6b fixed to the piezoelectric element 2 as fulcrums. Therefore, no tensile force is generated in the piezoelectric element 2. In addition, in order to generate the angular displacement in the opposite direction to the above, as an example, it suffices to apply electricity only to the piezoelectric element 2.

【0008】[0008]

【発明の効果】以上説明したように本発明は、変位部の
面と固定部の面との間に2方向角度変位を生じさせる2
つの圧電素子の間にさらに変位調整部を設け、一方の圧
電素子のみに加電したときには、他方の圧電素子の両端
のヒンジを支点に上記変位部に角度変位が生じるように
上記変位調整部の剛性を設定しているので、他方の圧電
素子に引張力が加わってこの他方の圧電素子を破損する
ことを防ぐことができるという効果がある。
As described above, according to the present invention, two-direction angular displacement is generated between the surface of the displacement portion and the surface of the fixed portion.
When a displacement adjusting section is further provided between two piezoelectric elements and only one piezoelectric element is energized, the displacement adjusting section of the displacement adjusting section is arranged so that the hinges at both ends of the other piezoelectric element serve as fulcrums to cause an angular displacement in the displaced section. Since the rigidity is set, there is an effect that it is possible to prevent a tensile force from being applied to the other piezoelectric element to damage the other piezoelectric element.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の正面図である。FIG. 1 is a front view of an embodiment of the present invention.

【図2】図1の実施例の動作時の正面図である。FIG. 2 is a front view of the embodiment of FIG. 1 in operation.

【図3】従来の変位拡大機構の正面図である。FIG. 3 is a front view of a conventional displacement magnifying mechanism.

【符号の説明】[Explanation of symbols]

1 変位部 1a,1b 変位部の面 2,3 圧電素子 4 変位調整部 4a,4b ヒンジ部 5 固定部 5a,5b 固定部の面 6a,6b,7a,7b ヒンジ 1 Displacement part 1a, 1b Displacement part surface 2,3 Piezoelectric element 4 Displacement adjusting part 4a, 4b Hinge part 5 Fixed part 5a, 5b Fixed part surface 6a, 6b, 7a, 7b Hinge

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 固定部と、上記固定部に対向する変位部
と、上記固定部の一面と上記変位部の一面とをそれぞれ
両端のヒンジによって固定するとともに加電によって伸
張する2つの圧電素子とを有し、上記圧電素子のいずれ
か一方および両方に加電することによって上記固定部と
上記変位部との相互の面間の角度変位を2方向制御する
変位拡大機構において、 上記変位拡大機構が、さらに、上記2つの圧電素子の間
に配置されて上記固定部の一面と上記変位部の一面とを
両端のヒンジ部によって固定するとともに、上記圧電素
子の一方に加電があるときには上記圧電素子の他方のヒ
ンジを支点として上記角度変位を生じせしめる剛性を有
する変位調整部を備えることを特徴とする変位拡大機
構。
1. A fixed part, a displacement part facing the fixed part, and two piezoelectric elements that fix one surface of the fixed part and one surface of the displaced part with hinges at both ends and expand by applying electricity. In the displacement enlarging mechanism for controlling the angular displacement between the surfaces of the fixed portion and the displacing portion in two directions by applying electric power to one or both of the piezoelectric elements, Further, the piezoelectric element is arranged between the two piezoelectric elements to fix one surface of the fixed portion and one surface of the displacement portion by hinge portions at both ends, and the piezoelectric element when one of the piezoelectric elements is energized. A displacement magnifying mechanism comprising a displacement adjusting portion having rigidity to cause the above-mentioned angular displacement with the other hinge as a fulcrum.
JP4020834A 1992-02-06 1992-02-06 Displacement enlargement mechanism Withdrawn JPH05304323A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4020834A JPH05304323A (en) 1992-02-06 1992-02-06 Displacement enlargement mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4020834A JPH05304323A (en) 1992-02-06 1992-02-06 Displacement enlargement mechanism

Publications (1)

Publication Number Publication Date
JPH05304323A true JPH05304323A (en) 1993-11-16

Family

ID=12038092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4020834A Withdrawn JPH05304323A (en) 1992-02-06 1992-02-06 Displacement enlargement mechanism

Country Status (1)

Country Link
JP (1) JPH05304323A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08308262A (en) * 1995-05-02 1996-11-22 Nec Corp Piezoelectric actuator
EP1091423A2 (en) * 1999-10-08 2001-04-11 Siemens Aktiengesellschaft Device for actuating a positioning element
WO2002043163A2 (en) * 2000-11-21 2002-05-30 Csir Strain/electrical potential transducer
US6774539B2 (en) * 2002-09-23 2004-08-10 Lockheed Martin Corporation High pressure, high speed actuator
JP2006166638A (en) * 2004-12-08 2006-06-22 Eamex Co Element for expansion drive
US7259496B2 (en) * 2002-04-08 2007-08-21 University Of North Carolina At Charlotte Tunable vibratory actuator
JP2010057225A (en) * 2008-08-26 2010-03-11 Chuo Seiki Kk Piezoelectric actuator
KR101024997B1 (en) * 2009-01-16 2011-03-25 한국전기연구원 an angle control device using Piezoelectric actuator
JP2013004165A (en) * 2011-06-11 2013-01-07 Nhk Spring Co Ltd Remotely driven rotary head dual stage actuator
JP2014022013A (en) * 2012-07-19 2014-02-03 Nhk Spring Co Ltd Disk drive suspension
JP2017116514A (en) * 2015-12-26 2017-06-29 並木精密宝石株式会社 Precision tilt stage
CN111711381A (en) * 2020-06-16 2020-09-25 武汉大学 Stick-slip piezoelectric driver for realizing bidirectional driving and control method

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08308262A (en) * 1995-05-02 1996-11-22 Nec Corp Piezoelectric actuator
EP1091423A2 (en) * 1999-10-08 2001-04-11 Siemens Aktiengesellschaft Device for actuating a positioning element
EP1091423A3 (en) * 1999-10-08 2004-05-19 Siemens Aktiengesellschaft Device for actuating a positioning element
US6820495B2 (en) 2000-11-21 2004-11-23 Csir Strain/electrical potential transducer
WO2002043163A2 (en) * 2000-11-21 2002-05-30 Csir Strain/electrical potential transducer
WO2002043163A3 (en) * 2000-11-21 2002-08-29 Csir Strain/electrical potential transducer
US7259496B2 (en) * 2002-04-08 2007-08-21 University Of North Carolina At Charlotte Tunable vibratory actuator
US6774539B2 (en) * 2002-09-23 2004-08-10 Lockheed Martin Corporation High pressure, high speed actuator
JP2006166638A (en) * 2004-12-08 2006-06-22 Eamex Co Element for expansion drive
JP2010057225A (en) * 2008-08-26 2010-03-11 Chuo Seiki Kk Piezoelectric actuator
KR101024997B1 (en) * 2009-01-16 2011-03-25 한국전기연구원 an angle control device using Piezoelectric actuator
JP2013004165A (en) * 2011-06-11 2013-01-07 Nhk Spring Co Ltd Remotely driven rotary head dual stage actuator
JP2014022013A (en) * 2012-07-19 2014-02-03 Nhk Spring Co Ltd Disk drive suspension
JP2017116514A (en) * 2015-12-26 2017-06-29 並木精密宝石株式会社 Precision tilt stage
CN111711381A (en) * 2020-06-16 2020-09-25 武汉大学 Stick-slip piezoelectric driver for realizing bidirectional driving and control method
CN111711381B (en) * 2020-06-16 2021-10-22 武汉大学 Stick-slip piezoelectric driver for realizing bidirectional driving and control method

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Effective date: 19990518