JPH06104503A - Bimorph piezoelectric actuator - Google Patents

Bimorph piezoelectric actuator

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Publication number
JPH06104503A
JPH06104503A JP4249718A JP24971892A JPH06104503A JP H06104503 A JPH06104503 A JP H06104503A JP 4249718 A JP4249718 A JP 4249718A JP 24971892 A JP24971892 A JP 24971892A JP H06104503 A JPH06104503 A JP H06104503A
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Japan
Prior art keywords
piezoelectric actuator
direction
intermediate electrode
actuator
piezoelectric
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Pending
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JP4249718A
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Japanese (ja)
Inventor
Kazuki Murata
一樹 村田
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Sharp Corp
シャープ株式会社
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Priority to JP4249718A priority Critical patent/JPH06104503A/en
Publication of JPH06104503A publication Critical patent/JPH06104503A/en
Application status is Pending legal-status Critical

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Abstract

PURPOSE:To constitute a stabilized closed loop position control system in which flexural rigidity of piezoelectric actuator is set higher in the longitudinal direction than in the lateral direction. CONSTITUTION:Lateral slits are made in the intermediate electrode 2 of a bimorph piezoelectric actuator having flexural rigity higher in the longitudinal direction than in the lateral direction. Piezoelectric ceramics 1a, 1b are bonded to the intermediate electrode 2 and when a voltage is applied thereon, voltages are induced between the intermediate electrode 2 and the surface electrodes provided on the opposite surfaces of the actuator thus producing electric fields. The piezoelectric ceramic 1a, 1b elongates or contracts depending on the fact that the direction of the electric field matches with the polarizing direction of the piezoelectric ceramic or not. Vibration characteristics of piezoelectric actuator include single node primary resonance mode in longitudinal direction and double node secondary resonance mode in lateral direction. This constitution realizes a stabilized control system.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は、微小変動を行う際に用いるバイモルフ型圧電アクチュエータの改良に関するものである。 The present invention relates to relates to an improvement of the bimorph type piezoelectric actuator used in making small variations.

【0002】 [0002]

【従来の技術】圧電アクチュエータには、電界を加えると伸縮する性質をもつ圧電セラミックスがよく用いられている。 BACKGROUND OF THE INVENTION piezoelectric actuator, a piezoelectric ceramic having the property of stretching and application of an electric field is often used. 図7は、従来用いられてきたバイモルフ型圧電アクチュエータの構成の一例を示している。 Figure 7 shows an example of a configuration of a bimorph piezoelectric actuator which has been conventionally used. 2枚の圧電アクチュエータ1a、1bの片面には表面電極が、また2枚の圧電セラミックス1a、1bの貼り合わせ面には中間電極2が設けられている。 Two piezoelectric actuators 1a, the surface electrode on one side of the 1b are also intermediate electrode 2 is provided on the bonding surface of the two piezoelectric ceramics 1a, 1b. 中間電極2には、一般にリン青銅などの薄い金属板が用いられる。 The intermediate electrode 2, generally a thin metal plate such as phosphor bronze is used. 中間電極2に電圧が供給されると、中間電極とアクチュエータ両面の表面電極との間に電界が生じ、圧電セラミックス1a、 When a voltage to the intermediate electrode 2 is supplied, an electric field is generated between the intermediate electrode and the actuator side of the surface electrodes, the piezoelectric ceramic 1a,
1bに長手方向の伸縮が生じる。 Longitudinal stretching occurs 1b. このとき2枚の圧電セラミックス1a、1bの一方を伸長、もう一方を収縮させるような構成にすることにより、アクチュエータが撓み、先端部が変動する。 In this case two piezoelectric ceramics 1a, extending one 1b, the by the configuration to contract the other, the actuator is deflected, the tip section fluctuates. バイモルフ型圧電アクチュエータの設計を行うときには、アクチュエータに許されるスペースと、必要とする変位量及び固有振動数から形状寸法を決定する。 When the design of the bimorph type piezoelectric actuator, and a space allowed for the actuator, to determine the geometry of the displacement amount and the natural frequency need. 従って、圧電アクチュエータの変位量を大きく得るためには、アクチュエータの長手方向の長さ(自由長)を長く取り、厚みを薄くする必要がある。 Therefore, in order to obtain large displacement of the piezoelectric actuator, the longitudinal length of the actuator (free length) takes longer, it is necessary to reduce the thickness. ここで、幅方向の長さが自由長に対して一定以上の値を取る場合、幅方向の撓みが問題となる。 Here, if the length in the width direction has a value above a certain relative free length, bending in the width direction it becomes a problem. これを解消する方法として、幅方向に対して両持梁(長手方向に対しては片持梁)の形態をとる必要がある。 As a method to solve this problem, it is necessary to take the form of a (cantilever is with respect to the longitudinal direction) doubly supported beam with respect to the width direction.

【0003】 [0003]

【発明が解決しようとする課題】上記形状を用いた場合、従来のバイモルフ型圧電アクチュエータでは、長手方向及び幅方向に対して一様な曲げ剛性を持つため、それぞれの振動モードにおける共振点どうし、すなわち長手方向の1次共振モード、幅方向の2次共振モードが図8に示したアクチュエータの周波数特性の一例のように比較的近い周波数に存在する。 When using the shape [0005] In the conventional bimorph piezoelectric actuator, to have a uniform flexural rigidity to the longitudinal direction and the width direction, the resonance point each other in the respective vibration modes, that longitudinal primary resonance mode, the secondary resonance mode in the width direction exist in the frequency relatively close to one example of the frequency characteristics of the actuator shown in FIG. このように、2次共振モードが1次共振モードに対して近いと、アクチュエータの閉ループ位置制御を行った場合、追従性を高めるためにループゲインを高く設定するときに、2次共振モードにおけるピークゲインが高いためにゲイン余裕が十分得られず、安定な制御系を構成することができない。 Thus, when the secondary resonance mode is close to the primary resonance mode is set, and closed-loop position control of the actuator, when set high loop gain in order to enhance the followability, a peak in the secondary resonance mode gain can not be obtained enough gain margin due to the high, it can not constitute a stable control system.

【0004】本発明は、従来のバイモルフ型圧電アクチュエータを改良することにより、上述のような問題点を取り除くことを目的としている。 [0004] The present invention, by improving the conventional bimorph piezoelectric actuators, it is an object to eliminate the problems described above.

【0005】 [0005]

【課題を解決するための手段】上記目的を達成するために、バイモルフ型圧電アクチュエータの曲げ剛性が、圧電アクチュエータの長手方向よりも幅方向に高くなるように構成されていることを特徴とし、中間電極に、圧電アクチュエータの幅方向に対していくつかのスリットを形成する。 To achieve the above object, according to the Invention The flexural rigidity of the bimorph type piezoelectric actuator is characterized by being configured to be higher in the width direction than the longitudinal direction of the piezoelectric actuator, the intermediate the electrodes form several slits in the width direction of the piezoelectric actuator.

【0006】また、圧電アクチュエータ表面に、曲げ剛性がアクチュエータの長手方向よりも幅方向に高くなるように補強材を取り付けることもできる。 [0006] It is also possible to attach the piezoelectric actuator surface, a reinforcing material such flexural stiffness is higher in the width direction than the longitudinal direction of the actuator.

【0007】また、中間電極に、曲げ剛性がアクチュエータの長手方向よりも幅方向に高い異方性材料を使用することもできる。 Further, the intermediate electrode, the bending stiffness can also be used high anisotropy material in the width direction than the longitudinal direction of the actuator.

【0008】 [0008]

【作用】上記のように構成されたバイモルフ型圧電アクチュエータにおいて、圧電アクチュエータの曲げ剛性が、長手方向よりも幅方向に高くなるため圧電アクチュエータの2次共振モードを1次共振モードに対して十分高くすることができる。 [Action] In the bimorph piezoelectric actuator configured as described above, the bending rigidity of the piezoelectric actuator is sufficiently high with respect to the second resonance mode first-order resonance mode of the piezoelectric actuator for higher in the width direction than the longitudinal can do.

【0009】 [0009]

【実施例】実施例を図に基づいて説明する。 EXAMPLES be described with reference to FIG examples.

【0010】(実施例1)図1は、幅方向にスリットが設けられており、長手方向よりも幅方向の曲げ剛性が高くなるような形状となっているバイモルフ型圧電アクチュエータの中間電極を示している。 [0010] (Embodiment 1) FIG. 1 is a slit is provided in the width direction, shows an intermediate electrode of the bimorph type piezoelectric actuator has a shape such as bending stiffness in the width direction than the longitudinal increases ing. 中間電極には、リン青銅を用いているが、金属板を用いる場合は、材質としてはアクチュエータが帯磁しにくいような非磁性の金属を用いる。 The intermediate electrode, but using a phosphor bronze, the case of using a metal plate, as the material actuator a nonmagnetic metal such as hard magnetization.

【0011】図2は、2枚の圧電セラミックス1a、1 [0011] Figure 2, two piezoelectric ceramics 1a, 1
bの間に、図1で示した形状の中間電極2を挟んだ形で構成した圧電アクチュエータを示している。 b during depicts a piezoelectric actuator configured in a form sandwiching the intermediate electrode 2 having the shape shown in FIG. 圧電セラミックス1a、1bと中間電極2の間は接着されており、 Piezoelectric ceramics 1a, between 1b and the intermediate electrode 2 is bonded,
中間電極2に電圧を印加すると、アクチュエータの両面に設けられている表面電極との間に電圧が生じ電界が発生する。 When a voltage is applied to the intermediate electrode 2, the voltage electric field is generated occurs between the surface electrodes provided on both sides of the actuator. 電界の方向と圧電セラミックスの分極方向の一致、不一致によって圧電セラミックス1a、1bに伸縮が生じ、その効果によりアクチュエータに撓みが生じる。 Matching the polarization direction of the electric field direction and the piezoelectric ceramics, piezoelectric ceramics 1a, is stretchable to 1b caused by mismatch, the deflection actuator is caused by the effect. ここで、圧電アクチュエータの振動特性には、長手方向の片持梁の1次共振モードと、幅方向の両持梁の2 Here, the vibration characteristics of the piezoelectric actuator, and a primary resonance mode in the longitudinal direction of the cantilever, the doubly supported beam in the width direction 2
次共振モードが存在する。 The following resonance modes exist. 図9は、本発明を用いた圧電アクチュエータの周波数特性の一例を示しているが、図8に示した従来の圧電アクチュエータでの周波数特性と比較すると、1次共振モードに対して2次共振モードが離れ、2次共振モードにおけるピークゲインが0dB以下になる。 9, when it shows an example of the frequency characteristics of the piezoelectric actuator using the present invention, compared with the frequency characteristics of a conventional piezoelectric actuator shown in FIG. 8, the secondary resonance mode relative to the first resonance mode leaves, peak gain in the second resonance mode is less 0 dB. このように、2次共振モードが1次共振モードに対して十分高いと、アクチュエータの閉ループ位置制御を行ったときに、追従性を高めるために位置制御に用いるループゲインを高く設定しても2次共振モードにおけるピークゲインが0dB以下と低いためゲイン余裕が十分得られ、安定な制御系を構成することができた。 Thus, when the secondary resonance mode is sufficiently high relative to the primary resonance mode, when performing closed-loop position control of the actuator, setting a high loop gain used in the position control in order to enhance the followability 2 peak gain in order resonance mode can be obtained sufficient gain margin for following low 0 dB, it was possible to constitute a stable control system.

【0012】なお上記例では、図1の形状を中間電極として用いているが、補強材として用いてもよい。 [0012] Note that in the above example, are used to shape of FIG. 1 as an intermediate electrode may be used as a reinforcing material. 図3 Figure 3
は、圧電アクチュエータの表面に、図1で示した形状の補強材3a、3bを貼りつけた場合を示している。 Is on the surface of the piezoelectric actuator, which shows a case where pasted stiffener 3a, 3b of the shape shown in FIG. 補強材には、電極としての機能はないので金属以外の材質を使用してもよい。 The reinforcing member may use a material other than metal because not function as an electrode.

【0013】また、補強材を用いる場合は、図4のように短冊状の板をアクチュエータ表面に幅方向に短冊板の長辺がくるように一定の間隔を空けて貼る方法でもよい。 [0013] In the case of using a reinforcing material may be a method of affixing at regular intervals so that the long sides come strip plate strip-shaped plate in the width direction on the actuator surface as shown in FIG.

【0014】また、中間電極及び補強材の材料として、 Further, as the material of the intermediate electrode and the reinforcing member,
圧延を行うことにより長手方向より幅方向に曲げ剛性が高くなるように異方性を持たせた金属を用いてもよい。 Rolling anisotropy may be a metal which gave as flexural rigidity than the longitudinal in the width direction becomes higher by performing.

【0015】(実施例2)本発明を、VTR等の回転ヘッド型磁気記録再生装置において、磁気ヘッドがトラックの幅方向に変位することを可能とする回転磁気ヘッド装置に用いた場合の一例を説明する。 [0015] (Example 2) The present invention, in a rotary head type magnetic recording reproducing apparatus such as a VTR, an example in which the magnetic head is used in the rotary magnetic head apparatus that can be displaced in the width direction of the track explain.

【0016】図5に示すような小型ドラム7内に圧電アクチュエータ6を搭載する場合、圧電アクチュエータ6 [0016] When mounting the piezoelectric actuator 6 in a small drum 7 as shown in FIG. 5, the piezoelectric actuator 6
の形状をホームベース型にすることにより、自由長はホームベース型の斜辺dの長さとなり、単純にドラムの回転中心からの自由長cを取る場合に比べ長くなり、圧電アクチュエータ6の変位量を大きく得ることができる。 By the shape the home base type, free length becomes the length of the home base type hypotenuse d, longer than in the case of simply taking the free length c from the center of rotation of the drum, the amount of displacement of the piezoelectric actuator 6 it is possible to obtain a large.
しかし、幅方向の長さが自由長に比べ長くなり、幅方向の撓みが問題となるため、幅方向に対して両持梁、自由長方向は片持梁の形態をとる。 However, longer than the free length length in the width direction, since the deflection of the width direction becomes a problem, doubly supported beam with respect to the width direction, the free length direction is in the form of a cantilever. ここで、搭載する圧電アクチュエータ6に、図6に示すような中間電極2に幅方向に対してスリットを設けた形状のバイモルフ型圧電アクチュエータを用いることにより、自由長方向の1次共振モードと幅方向の2次共振モードにおける共振点を十分離すことができた。 Here, the piezoelectric actuator 6 to be mounted, by using the bimorph type piezoelectric actuator shape having a slit in the width direction to the intermediate electrode 2, as shown in FIG. 6, the free length direction first resonance mode and width it was possible to separate the resonance point in the direction of the second resonance mode enough.

【0017】 [0017]

【発明の効果】本発明は、以上説明したように、バイモルフ型圧電アクチュエータの曲げ剛性が、自由長方向よりも幅方向に高くなるように構成することにより、アクチュエータの2次共振モードが1次共振モードに対して十分高くすることができ、閉ループ位置制御を行うときに、安定な制御系を構成することができる。 The present invention according to the present invention, as described above, the bending rigidity of the bimorph type piezoelectric actuator, by configuring so as to be higher in the width direction than the free length direction, the secondary resonant mode is a primary actuator can be sufficiently high with respect to the resonance mode, when performing closed-loop position control, it is possible to construct a stable control system.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】バイモルフ型圧電アクチュエータの中間電極(もしくは補強材)の形状の一例を示す図である。 1 is a diagram showing an example of the shape of the intermediate electrode of the bimorph type piezoelectric actuator (or reinforcement).

【図2】図1を中間電極として用いた場合のバイモルフ型圧電アクチュエータの断面図である。 It is a cross-sectional view of a bimorph piezoelectric actuator in the case of using the [2] Figure 1 as an intermediate electrode.

【図3】図1を補強材として用いた場合のバイモルフ型圧電アクチュエータの断面図である。 The [3] Figure 1 is a cross-sectional view of a bimorph piezoelectric actuator when used as a reinforcing material.

【図4】短冊状の板を補強材として用いた場合のバイモルフ型圧電アクチュエータの構造を示す図である。 4 is a diagram showing the structure of a bimorph type piezoelectric actuator in the case of using the strip-shaped plate as a reinforcing material.

【図5】小型ドラムにおけるヘッドアクチュエータを示す図である。 5 is a diagram showing a head actuator in a small drum.

【図6】図5の小型ドラムに搭載するバイモルフ型圧電アクチュエータの詳細を示す図である。 6 is a diagram showing details of the bimorph type piezoelectric actuator mounted on a small drum of FIG.

【図7】従来技術でのバイモルフ型圧電アクチュエータの構造を示す図である。 7 is a diagram showing the structure of a bimorph type piezoelectric actuator of the prior art.

【図8】従来技術によるバイモルフ型圧電アクチュエータの周波数特性の一例を示す図である。 8 is a diagram showing an example of frequency characteristics of the bimorph type piezoelectric actuator according to the prior art.

【図9】本発明によるバイモルフ型圧電アクチュエータの周波数特性の一例を示す図である。 Is a diagram showing an example of frequency characteristics of the bimorph type piezoelectric actuator according to the present invention; FIG.

【符号の説明】 DESCRIPTION OF SYMBOLS

1a、1b 圧電セラミックス 2 中間電極 3a、3b 補強材 4 ヘッドベース 5 ヘッドチップ 6 圧電アクチュエータ 7 上ドラム 1a, 1b piezoelectric ceramic 2 intermediate electrodes 3a, 3b stiffener 4 head base 5 a head chip 6 piezoelectric actuator 7 on the drum

Claims (4)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 長手方向に片持梁、幅方向に両持梁で支持される圧電アクチュエータにおいて、幅方向の曲げ剛性が長手方向の曲げ剛性よりも高くなるように構成されていることを特徴とするバイモルフ型圧電アクチュエータ。 1. A longitudinally cantilever, characterized in that the piezoelectric actuator is supported by both lifting beam in the width direction, is configured as a bending rigidity in the widthwise direction is higher than the longitudinal bending stiffness bimorph piezoelectric actuator as.
  2. 【請求項2】 中間電極に、幅方向に対していくつかのスリットが形成されていることを特徴とする請求項1記載のバイモルフ型圧電アクチュエータ。 Wherein the intermediate electrode, the bimorph type piezoelectric actuator according to claim 1, wherein the number of slits in the width direction are formed.
  3. 【請求項3】 圧電アクチュエータ表面に、長手方向よりも幅方向に曲げ剛性が高くなるように補強材が取り付けられていることを特徴とする請求項1記載のバイモルフ型圧電アクチュエータ。 Wherein the piezoelectric actuator surface, a bimorph type piezoelectric actuator according to claim 1, wherein the reinforcing member as bending rigidity in the widthwise direction than the longitudinal direction becomes high is mounted.
  4. 【請求項4】 中間電極に、長手方向よりも幅方向に曲げ剛性が高くなるような異方性材料を使用することを特徴とする請求項1記載のバイモルフ型圧電アクチュエータ。 Wherein the intermediate electrode, the bimorph type piezoelectric actuator according to claim 1, wherein the use of anisotropic materials, such as bending rigidity in the widthwise direction than the longitudinal direction becomes high.
JP4249718A 1992-09-18 1992-09-18 Bimorph piezoelectric actuator Pending JPH06104503A (en)

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