JP2746105B2 - Mirror deflector - Google Patents
Mirror deflectorInfo
- Publication number
- JP2746105B2 JP2746105B2 JP6057950A JP5795094A JP2746105B2 JP 2746105 B2 JP2746105 B2 JP 2746105B2 JP 6057950 A JP6057950 A JP 6057950A JP 5795094 A JP5795094 A JP 5795094A JP 2746105 B2 JP2746105 B2 JP 2746105B2
- Authority
- JP
- Japan
- Prior art keywords
- expansion
- contraction
- piezoelectric element
- mirror
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明はミラー偏向器に関し、特
に、圧電素子を駆動源とする信頼度の高い高速のミラー
偏向器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mirror deflector, and more particularly to a highly reliable and high-speed mirror deflector driven by a piezoelectric element.
【０００２】[0002]
【従来の技術】従来のミラー偏向器は、図３に示すよう
に、光ビームを偏向するためのミラー１と、ミラー１を
保持し、第１圧電素子１６と第２圧電素子１７の伸縮差
を角度に変換するための２系統のヒンジを有する可動部
２と、ミラー偏向器全体を固定するための固定部３と、
電極１８，１９に電圧を加えることにより伸縮させられ
る第１圧電素子１６と、電極２０，２１に電圧を加える
ことにより伸縮させられる第２圧電素子１７とからな
る。2. Description of the Related Art A conventional mirror deflector, as shown in FIG. 3, holds a mirror 1 for deflecting a light beam, holds the mirror 1, and expands / contracts a first piezoelectric element 16 and a second piezoelectric element 17. A movable unit 2 having two hinges for converting the angle into an angle, a fixing unit 3 for fixing the entire mirror deflector,
The first piezoelectric element 16 is expanded and contracted by applying a voltage to the electrodes 18 and 19, and the second piezoelectric element 17 is expanded and contracted by applying a voltage to the electrodes 20 and 21.
【０００３】電極１８，１９に電圧を印加すると、第１
圧電素子１６は長さ方向に伸縮し、電極２０，２１に電
圧を印加すると、第２圧電素子１７も長さ方向に伸縮
し、その伸縮量は印加電圧にほぼ比例する。第１圧電素
子１６への印加電圧を第２圧電素子１７への印加電圧よ
りも大きくすると、第１圧電素子１６の伸長量が第２圧
電素子１７の伸長量より大きくなり、伸長量の差が可動
部２のヒンジ部分で角度変化に変換され、可動部２に保
持されたミラー１は＋θ方向に偏向される。第１圧電素
子１６と第２圧電素子１７に印加する電圧の大小関係を
逆転すれば、ミラー１は−θ方向に偏向される。このよ
うに、ミラー１は第１圧電素子１６と第２圧電素子１７
に印加する電圧を制御することにより、±θ方向に偏向
することができる。When a voltage is applied to the electrodes 18 and 19, the first
The piezoelectric element 16 expands and contracts in the length direction, and when a voltage is applied to the electrodes 20 and 21, the second piezoelectric element 17 also expands and contracts in the length direction, and the amount of expansion and contraction is almost proportional to the applied voltage. When the voltage applied to the first piezoelectric element 16 is higher than the voltage applied to the second piezoelectric element 17, the extension amount of the first piezoelectric element 16 becomes larger than the extension amount of the second piezoelectric element 17, and the difference in the extension amount becomes smaller. The angle is converted by the hinge portion of the movable part 2 and the mirror 1 held by the movable part 2 is deflected in the + θ direction. If the magnitude relationship between the voltages applied to the first piezoelectric element 16 and the second piezoelectric element 17 is reversed, the mirror 1 is deflected in the -θ direction. As described above, the mirror 1 has the first piezoelectric element 16 and the second piezoelectric element 17.
Can be deflected in the ± θ direction by controlling the voltage applied to the.
【０００４】[0004]
【発明が解決しようとする課題】この従来のミラー偏向
器は第１圧電素子及び第２圧電素子が駆動源であり、第
１圧電素子及び第２圧電素子に設けた電極の破損によ
り、一方が故障した場合、ミラーの偏向角は＋θ方向か
又は−θ方向のいずれかしか駆動できず、そのため、故
障時には光ビームをトラッキングするような、±θ方向
に駆動する用途には使用できなくなるという問題があっ
た。In this conventional mirror deflector, the first piezoelectric element and the second piezoelectric element are driving sources, and one of the mirror deflectors is driven by breakage of electrodes provided on the first piezoelectric element and the second piezoelectric element. In the event of a failure, the mirror can only be driven in the + θ direction or the −θ direction, and therefore cannot be used in applications where the mirror is driven in the ± θ direction, such as tracking a light beam when a failure occurs. was there.
【０００５】本発明の目的は、圧電素子（ミラー偏向
器）の信頼度を高め、高速駆動を可能とするものであ
る。An object of the present invention is to provide a piezoelectric element (mirror deflection).
Device) , and enables high-speed driving.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明は、光ビームを偏向するためのミラーと、所
定の方向に伸縮する第１および第２の２系統の伸縮手段
と、前記ミラーを保持し、前記第１および第２の伸縮手
段の一端とそれぞれ接続され、前記第１および第２の伸
縮手段における伸縮差を角度に変換するための第１およ
び第２のヒンジを有する可動部と、前記第１および第２
の伸縮手段の他端を固定する固定部と、を有するミラー
偏光器において、前記第１の伸縮手段として伸縮方向に
対して垂直な方向に電界がかかるよう両側面に対向して
電極を有し、伸縮方向に対して直列に接続された複数の
圧電素子を備え、前記第２の伸縮手段として伸縮方向に
対して垂直な方向に電界がかかるよう両側面に対向して
電極を有し、伸縮方向に対して直列に接続された複数の
圧電素子を備える。これにより、前記第１の伸縮手段に
おける複数の圧電素子のうちの少なくとも１つにおける
伸縮動作と、前記第２の伸縮手段における複数の圧電素
子のうちの少なくとも１つにおける伸縮動作のみによる
偏向動作が可能となり、ミラー偏向器の信頼度を大きく
高めることができる。 To achieve the above object of the Invention The present invention provides a mirror for deflecting the light beam, where
First and second two expansion and contraction means which expand and contract in a predetermined direction
And the first and second telescopic hands holding the mirror.
Connected to one end of the step, respectively,
First and second steps for converting the expansion / contraction difference in the compression means into an angle.
A movable portion having a beauty second hinge, the first and second
Mirror having a fixed portion, a for fixing the other end of the elastic means
In the polarizer, as the first expansion / contraction means,
Facing both sides so that an electric field is applied in the direction perpendicular to
Having a plurality of electrodes connected in series in the direction of expansion and contraction
A piezoelectric element, and as a second expansion / contraction means,
Facing both sides so that an electric field is applied in the direction perpendicular to
Having a plurality of electrodes connected in series in the direction of expansion and contraction
A piezoelectric element is provided. Thereby, the first expansion / contraction means
At least one of the plurality of piezoelectric elements in
Telescopic operation and a plurality of piezoelectric elements in the second telescopic means
Only by the telescopic movement on at least one of the children
Deflection operation is possible, increasing the reliability of the mirror deflector
Can be enhanced.
【０００７】そして、本発明は、前記第１および第２の
伸縮手段が、伸縮方向に対して直列に接続された２つの
圧電素子によりそれぞれ伸縮動作するように構成したも
のである。これにより、第１の伸縮手段における２つの
圧電素子のうちの少なくとも１つにおける伸縮動作と第
２の伸縮手段における２つの圧電素子のうちの少なくと
も１つにおける伸縮動作によって偏向動作を可能とし、
ミラー偏向器の信頼度を高めることができる。 [0007] The present invention provides the first and second embodiments.
The expansion and contraction means are connected in series in the expansion and contraction direction.
It is configured to extend and contract by piezoelectric elements.
It is. As a result, the two
Expansion and contraction of at least one of the piezoelectric elements
At least one of the two piezoelectric elements in the two expansion / contraction means
Also enables the deflection operation by the expansion and contraction operation in one,
The reliability of the mirror deflector can be increased.
【０００８】また、本発明は、第１圧電素子と第２圧電
素子に印加する電圧の増減を互いに異なる方向に制御
し、第３圧電素子と第４圧電素子に印加する電圧の増減
を互いに異なる方向に制御するようにしたものである。Further, according to the present invention, the increase and decrease of the voltage applied to the first and second piezoelectric elements are controlled in different directions, and the increase and decrease of the voltage applied to the third and fourth piezoelectric elements are different from each other. This is to control in the direction.
【０００９】さらに、本発明は、光ビームを偏向するた
めのミラーと、所定の方向に伸縮する第１および第２の
２系統の伸縮手段と、前記ミラーを保持し、前記第１お
よび第２の伸縮手段の一端とそれぞれ接続され、前記第
１および第２の伸縮手段における伸縮差を角度に変換す
るための第１および第２のヒンジを有する可動部と、前
記第１および第２の伸縮手段の他端を固定する固定部
と、を備えたミラー偏光器において、前記第１の伸縮手
段は伸縮方向に対してそれぞれ垂直な方向に電界がかか
るよう両側面に２つに分割された第１および第２の対向
電極が設けられた第１の圧電素子により伸縮動作し、前
記第２の伸縮手段は伸縮方向に対してそれぞれ垂直な方
向に電界がかかるよう両側面に２つに分割された第３お
よび第４の対向電極が設けられた第２の圧電素子により
伸縮動作するように構成したものである。これにより、
前記第１または第２の対向電極に発生した電界による前
記第１の圧電素子の伸縮動作と、前記第３または第４の
対向電極に発生した電界による前記第２の圧電素子の何
れか一方における伸縮動作とによって偏向動作が可能と
なり、ミラー偏向器の信頼度を高めると共により高速な
ミラー偏向器の駆動が実現できる。 Further, the present invention provides a method for deflecting a light beam.
Mirror, and first and second mirrors that expand and contract in a predetermined direction.
Holding the two systems of expansion and contraction means and the mirror,
And one end of the second expansion / contraction means, respectively,
Convert the difference in expansion and contraction between the first and second expansion and contraction means into an angle.
A movable part having first and second hinges for
A fixing part for fixing the other ends of the first and second telescopic means;
And the first telescopic hand.
The steps have an electric field in the direction perpendicular to the stretching direction.
First and second opposed sides divided into two on both sides
The first piezoelectric element provided with electrodes expands and contracts,
The second expansion and contraction means are perpendicular to the expansion and contraction directions, respectively.
The third is divided into two on both sides so that an electric field is applied in the
And a second piezoelectric element provided with a fourth counter electrode
It is configured to extend and contract. This allows
Before the electric field generated at the first or second counter electrode
The expansion and contraction operation of the first piezoelectric element and the third or fourth
What is caused by the electric field generated in the counter electrode of the second piezoelectric element
Deflection operation is possible by expansion and contraction operation on either side
Higher reliability and higher speed mirror deflector
Driving of the mirror deflector can be realized.
【００１０】[0010]
【作用】本発明は、一方の系統の圧電素子を、両側面に
対向して設けられた電極を有する第１圧電素子と、両側
面に対向して設けられた電極を有する第２圧電素子との
直列接続から構成し、他方の系統の圧電素子を、両側面
に対向して設けられた電極を有する第３圧電素子と、両
側面に対向して設けられた電極を有する第４圧電素子と
の直列接続から構成して、各電極に電圧を印加し、各系
統の圧電素子を動作させているので、第１圧電素子の電
極が破損しても、第２圧電素子が動作しているので、ミ
ラー偏向器としての動作をしなくなることはない。According to the present invention, a piezoelectric element of one system is composed of a first piezoelectric element having electrodes provided on both sides and a second piezoelectric element having electrodes provided on both sides. And a third piezoelectric element having electrodes provided on both sides thereof and a fourth piezoelectric element having electrodes provided on both sides thereof. Since the voltage is applied to each electrode to operate the piezoelectric elements of each system, even if the electrode of the first piezoelectric element is damaged, the second piezoelectric element is operating. The operation as a mirror deflector does not stop.
【００１１】また、本発明は、各々の系統の圧電素子の
両側面に対向して電極を設け、電極を２つに分割して構
成し、各電極に電圧を印加し、各系統の圧電素子を動作
させているので、１つの電極が破損しても、その系統の
圧電素子は動作しているので、ミラー偏向器としての動
作をしなくなることはない。Further, according to the present invention, an electrode is provided on both sides of a piezoelectric element of each system, the electrode is divided into two parts, a voltage is applied to each electrode, and a piezoelectric element of each system is provided. Is operated, even if one electrode is damaged, the piezoelectric element of that system is operating, so that the operation as a mirror deflector does not stop.
【００１２】[0012]
【実施例】次に、本発明について図面を参照して説明す
る。図１は本発明の一実施例のミラー偏向器の構成図で
ある。ミラー偏向器は、光ビームを偏向するためのミラ
ー１と、ミラー１を保持し、第１圧電素子４と第２圧電
素子５とを直列接続したものと、第３圧電素子６と第４
圧電素子７とを直列接続したものとの伸縮差を角度に変
換するための２系統のヒンジを有する可動部２と、ミラ
ー偏向器全体を固定するための固定部３と、電極８，９
に電圧を加えることにより伸縮させられる第１圧電素子
４と、電極１０，１１に電圧を加えることにより伸縮さ
せられる第２圧電素子５と、電極１２，１３に電圧を加
えることにより伸縮させられる第３圧電素子６と、電極
１４，１５に電圧を加えることにより伸縮させられる第
４圧電素子７とからなる。Next, the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram of a mirror deflector according to one embodiment of the present invention. The mirror deflector includes a mirror 1 for deflecting the light beam, a mirror holding the mirror 1, a first piezoelectric element 4 and a second piezoelectric element 5 connected in series, a third piezoelectric element 6 and a fourth piezoelectric element 4.
A movable part 2 having two hinges for converting an expansion / contraction difference between the piezoelectric element 7 and the serially connected piezoelectric element 7 into an angle, a fixing part 3 for fixing the entire mirror deflector, and electrodes 8 and 9
A first piezoelectric element 4 that is expanded and contracted by applying a voltage to the first, a second piezoelectric element 5 that is expanded and contracted by applying a voltage to the electrodes 10 and 11, and a second piezoelectric element 5 that is expanded and contracted by applying a voltage to the electrodes 12 and 13. It comprises three piezoelectric elements 6 and a fourth piezoelectric element 7 which is expanded and contracted by applying a voltage to the electrodes 14 and 15.
【００１３】第１圧電素子４と第２圧電素子５に電圧を
印加したときの合計の伸長量が、第３圧電素子６と第４
圧電素子７に電圧を印加したときの合計の伸長量よりも
大きい場合、伸長量の差が可動部２のヒンジ部分で角度
変化に変換され、可動部２に保持されたミラー１は＋θ
方向に偏向される。第１圧電素子４と第２圧電素子５の
合計の伸長量と第３圧電素子６と第４圧電素子７の合計
の伸長量の関係を逆転すれば、ミラー１は−θ方向に偏
向される。When the voltage is applied to the first piezoelectric element 4 and the second piezoelectric element 5, the total extension amount is equal to the third piezoelectric element 6 and the fourth piezoelectric element 4.
If the total extension amount is larger than the total extension amount when a voltage is applied to the piezoelectric element 7, the difference in extension amount is converted into an angle change at the hinge portion of the movable section 2, and the mirror 1 held by the movable section 2 is shifted by + θ.
Deflected in the direction. If the relationship between the total extension of the first piezoelectric element 4 and the second piezoelectric element 5 and the total extension of the third piezoelectric element 6 and the fourth piezoelectric element 7 is reversed, the mirror 1 is deflected in the -θ direction. .
【００１４】仮に、４個の圧電素子のうち、１個、例え
ば、第１圧電素子４が、電極８の破損により、故障した
場合、ミラー偏向器は、＋θ方向にも故障前の半分の角
度ではあるが、駆動することができる。つまり、１個の
圧電素子の故障による致命的な性能逸失は回避できるの
で、信頼度を増すことができる。If one of the four piezoelectric elements, for example, the first piezoelectric element 4 breaks down due to the damage of the electrode 8, the mirror deflector also moves in the + θ direction by half the angle before the failure. However, it can be driven. In other words, a fatal loss of performance due to a failure of one piezoelectric element can be avoided, so that reliability can be increased.
【００１５】圧電素子は、ミラー偏向器全体の形状の制
約や機械的剛性等の制約が許せば、３個以上有限個の直
列接続が可能であり、更に、信頼度を増すことができ
る。As long as the restrictions on the shape of the entire mirror deflector and the restrictions on mechanical rigidity are allowed, three or more finite piezoelectric elements can be connected in series, and the reliability can be further increased.
【００１６】また、ミラー偏向器の駆動時に、直列に接
続した圧電素子に印加する電圧の増減を互いに異なる方
向に制御することにより、圧電素子に特有なヒステリシ
スを小さくすることができる。Further, by controlling the increase and decrease of the voltage applied to the piezoelectric elements connected in series when the mirror deflector is driven, the hysteresis peculiar to the piezoelectric elements can be reduced.
【００１７】更に、従来のミラー偏向器に使用している
圧電素子を伸縮方向に分割することにより、圧電素子１
個当りの電極の面積と体積が減少することになり、圧電
素子の等価容量及び電極間容量が減少するので、より高
速なミラー偏向器の駆動が実現できる。Furthermore, by dividing the piezoelectric element used in the conventional mirror deflector in the direction of expansion and contraction,
Since the area and the volume of the electrode per unit are reduced, the equivalent capacitance of the piezoelectric element and the inter-electrode capacitance are reduced, so that the mirror deflector can be driven at higher speed.
【００１８】図２は本発明の他の実施例のミラー偏向器
の構成図である。図１に記載されたものと同一のものに
は、同一の記号を使用した。図２に記載されたもので、
図１に記載されたものと異なるものは、第１圧電素子４
と第２圧電素子５との直列接続の代わりに第１圧電素子
１６を設け、第３圧電素子６と第４圧電素子７との直列
接続の代わりに第２圧電素子１７を設けたものである。FIG. 2 is a block diagram of a mirror deflector according to another embodiment of the present invention. The same symbols are used for those identical to those described in FIG. As shown in FIG. 2,
What is different from the one described in FIG.
A first piezoelectric element 16 is provided in place of the series connection of the second piezoelectric element 5 and the second piezoelectric element 5, and a second piezoelectric element 17 is provided in place of the series connection of the third piezoelectric element 6 and the fourth piezoelectric element 7. .
【００１９】電極８，９と電極１０，１１に電圧を印加
したときの第１圧電素子１６の伸長量が、電極１２，１
３と電極１４，１５に電圧を印加したときの第２圧電素
子１７の伸長量よりも大きい場合、伸長量の差が可動部
２のヒンジ部分で角度変化に変換され、可動部２に保持
されたミラー１は＋θ方向に偏向される。第１圧電素子
１６の伸長量と第２圧電素子１７の伸長量の関係を逆転
すれば、ミラー１は−θ方向に偏向される。The amount of extension of the first piezoelectric element 16 when a voltage is applied to the electrodes 8, 9 and the electrodes 10, 11
If the extension amount of the second piezoelectric element 17 when a voltage is applied to the electrode 3 and the electrodes 14 and 15 is larger than the extension amount, the difference in the extension amount is converted into an angle change at the hinge portion of the movable portion 2 and held by the movable portion 2. Mirror 1 is deflected in the + θ direction. If the relationship between the extension amount of the first piezoelectric element 16 and the extension amount of the second piezoelectric element 17 is reversed, the mirror 1 is deflected in the -θ direction.
【００２０】仮に、第１圧電素子１６の電極８が破損し
ても、電極１０，１１により第１圧電素子を駆動するこ
とができるので、信頼度を増すことができる。Even if the electrode 8 of the first piezoelectric element 16 is broken, the first piezoelectric element can be driven by the electrodes 10 and 11, so that the reliability can be increased.
【００２１】また、従来のミラー偏向器に使用している
電極を伸縮方向に分割することにより、電極の面積を減
らしたので、電極間容量が減少し、より高速なミラー偏
向器の駆動が実現できる。Further, since the electrodes used in the conventional mirror deflector are divided in the direction of expansion and contraction to reduce the area of the electrodes, the capacitance between the electrodes is reduced and the mirror deflector can be driven at a higher speed. it can.
【００２２】[0022]
【発明の効果】本発明は、以上説明したように構成され
ているので、圧電素子の信頼度を高め、高速に駆動でき
るという効果を有する。According to the present invention, as described above, the reliability of the piezoelectric element can be improved and the piezoelectric element can be driven at a high speed.
【図１】本発明の一実施例のミラー偏向器の構成図であ
る。FIG. 1 is a configuration diagram of a mirror deflector according to one embodiment of the present invention.
【図２】本発明の他の実施例のミラー偏向器の構成図で
ある。FIG. 2 is a configuration diagram of a mirror deflector according to another embodiment of the present invention.
【図３】従来のミラー偏向器の構成図である。FIG. 3 is a configuration diagram of a conventional mirror deflector.
１ ミラー ２ 可動部 ３ 固定部 ４，１６ 第１圧電素子 ５，１７ 第２圧電素子 ６ 第３圧電素子 ７ 第４圧電素子 ８，９，１０，１１，１２，１３，１４，１５ 電極 DESCRIPTION OF SYMBOLS 1 Mirror 2 Movable part 3 Fixed part 4,16 1st piezoelectric element 5,17 2nd piezoelectric element 6 3rd piezoelectric element 7 4th piezoelectric element 8,9,10,11,12,13,14,15 Electrode
Claims (4)
一端とそれぞれ接続され、前記第１および第２の伸縮手
段における伸縮差を角度に変換するための第１および第
２のヒンジを有する可動部と、前記第１および第２の伸縮手段の他端を固定する 固定部
と、 を有するミラー偏光器において、前記第１の伸縮手段は、伸縮方向に対してそれぞれ垂直
な方向に電界がかかるよう、両側面に対向して電極が設
けられ、伸縮方向に対して直列に接続された複数の圧電
素子により伸縮動作し、 前記第２の伸縮手段は、伸縮方向に対してそれぞれ垂直
な方向に電界がかかるよう、両側面に対向して電極が設
けられ、伸縮方向に対して直列に接続された第複数の圧
電素子により伸縮動作し、 前記第１の伸縮手段における複数の圧電素子のうちの少
なくとも１つにおける伸縮動作と、前記第２の伸縮手段
における複数の圧電素子のうちの少なくとも１つにおけ
る伸縮動作によって偏向動作が可能である 、 ことを特徴とするミラー偏向器。1. A mirror for deflecting a light beam, first and second expanding and contracting means for expanding and contracting in a predetermined direction, and holding the mirror, the first and second expanding and contracting means
The first and second telescopic hands respectively connected to one end;
First and second steps for converting the difference in expansion and contraction at the step into an angle
A movable part having two hinges, and a fixed part for fixing the other ends of the first and second expansion and contraction means , wherein the first expansion and contraction means are respectively perpendicular to the expansion and contraction directions.
Electrodes are installed on both sides so that an electric field is applied in various directions.
Multiple piezoelectric elements connected in series
And expansion and contraction by the element, the second expansion means, respectively stretch direction perpendicular
Electrodes are installed on both sides so that an electric field is applied in various directions.
And a plurality of pressures connected in series with respect to the direction of expansion and contraction.
The first expansion / contraction means performs an expansion / contraction operation by an electric element, and
At least one telescopic operation and the second telescopic means
At least one of the plurality of piezoelectric elements in
A mirror deflector capable of performing a deflecting operation by a telescopic operation .
一端とそれぞれ接続され、前記第１および第２の伸縮手
段における伸縮差を角度に変換するための第１および第
２のヒンジを有する可動部と、 前記第１および第２の伸縮手段の他端を固定する固定部
と、 を有するミラー偏光器において、 前記第１の伸縮手段は、伸縮方向に対してそれぞれ垂直
な方向に電界がかかるよう、両側面に対向して電極が設
けられ、伸縮方向に対して直列に接続された第 １および
第２の圧電素子により伸縮動作し、 前記第２の伸縮手段は、伸縮方向に対してそれぞれ垂直
な方向に電界がかかるよう、両側面に対向して電極が設
けられ、伸縮方向に対して直列に接続された第３および
第４の圧電素子により伸縮動作し、 前記第１または第２の圧電素子の何れか一方における伸
縮動作と、前記第３または第４の圧電素子の何れか一方
における伸縮動作とによって偏向動作が可能である、 ことを特徴とするミラー偏向器。 2. A mirror for deflecting a light beam, first and second expansion and contraction means for expanding and contracting in a predetermined direction, and holding the mirror, the first and second expansion and contraction means being provided.
The first and second telescopic hands respectively connected to one end;
First and second steps for converting the difference in expansion and contraction at the step into an angle
A movable portion having two hinges, and a fixing portion for fixing the other ends of the first and second expansion / contraction means.
When, in the mirror polarizer having said first elastic means, respectively stretch direction perpendicular
Electrodes are installed on both sides so that an electric field is applied in various directions.
And the first and the
The second piezoelectric element expands and contracts by the second piezoelectric element, and the second expansion and contraction means are respectively perpendicular to the expansion and contraction directions.
Electrodes are installed on both sides so that an electric field is applied in various directions.
And a third and a serially connected
The fourth piezoelectric element expands and contracts, and the expansion of one of the first and second piezoelectric elements is performed.
Compression operation, and either one of the third and fourth piezoelectric elements
The mirror deflector is capable of performing a deflecting operation by the expansion and contraction operation in the above .
る電圧の増減を互いに異なる方向に制御し、 第３の圧電素子と第４の圧電素子に印加する電圧の増減
を互いに異なる方向に制御する、 ことを特徴とする請求項２に記載のミラー偏向器。3. The method according to claim 1, wherein the voltage applied to the first piezoelectric element and the voltage applied to the second piezoelectric element are controlled in different directions, and the voltage applied to the third piezoelectric element and the voltage applied to the fourth piezoelectric element are different from each other. The mirror deflector according to claim 2, wherein the mirror deflector is controlled in a direction.
一端とそれぞれ接続され、前記第１および第２の伸縮手
段における伸縮差を角度に変換するための第１および第
２のヒンジを有する可動部と、 前記第１および第２の伸縮手段の他端を固定する固定部
と、 を備えたミラー偏光器において、 前記第１の伸縮手段は、伸縮方向に対してそれぞれ垂直
な方向に電界がかかるよう、両側面に２つに分割された
第１および第２の対向電極が設けられた第１の圧電素子
により伸縮動作し、 前記第２の伸縮手段は、伸縮方向に対してそれぞれ垂直
な方向に電界がかかるよう、両側面に２つに分割された
第３および第４の対向電極が設けられた第２の圧電素子
により伸縮動作し、 前記第１または第２の対向電極に発生した電界による前
記第１の圧電素子の伸 縮動作と、前記第３または第４の
対向電極に発生した電界による前記第２の圧電素子の何
れか一方における伸縮動作とによって偏向動作が可能で
ある、 ことを特徴とするミラー偏向器。 4. A mirror for deflecting a light beam, first and second expansion and contraction means for expanding and contracting in a predetermined direction, and holding the mirror, wherein the first and second expansion and contraction means are provided.
The first and second telescopic hands respectively connected to one end;
First and second steps for converting the difference in expansion and contraction at the step into an angle
A movable portion having two hinges, and a fixing portion for fixing the other ends of the first and second expansion / contraction means.
When, in the mirror polarizer having a first expansion means, respectively stretch direction perpendicular
Divided into two parts on both sides to apply an electric field in various directions
First piezoelectric element provided with first and second opposed electrodes
Stretch operated by said second elastic means, respectively stretch direction perpendicular
Divided into two parts on both sides to apply an electric field in various directions
Second piezoelectric element provided with third and fourth counter electrodes
Expands and contracts due to the electric field generated at the first or second counter electrode.
And Shin contraction operation of the serial first piezoelectric element, the third or fourth
What is caused by the electric field generated in the counter electrode of the second piezoelectric element
Deflection operation is possible by expansion and contraction operation on either side.
There, the mirror deflector, characterized in that.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6057950A JP2746105B2 (en) | 1994-03-29 | 1994-03-29 | Mirror deflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6057950A JP2746105B2 (en) | 1994-03-29 | 1994-03-29 | Mirror deflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07270691A JPH07270691A (en) | 1995-10-20 |
| JP2746105B2 true JP2746105B2 (en) | 1998-04-28 |
Family
ID=13070321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6057950A Expired - Lifetime JP2746105B2 (en) | 1994-03-29 | 1994-03-29 | Mirror deflector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2746105B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5675412A (en) * | 1995-11-24 | 1997-10-07 | On-Line Technologies, Inc. | System including unified beamsplitter and parallel reflecting element, and retroreflecting component |
| KR20020028689A (en) * | 2000-10-11 | 2002-04-17 | 구자홍 | micro-mirror |
| KR101024997B1 (en) * | 2009-01-16 | 2011-03-25 | 한국전기연구원 | an angle control device using Piezoelectric actuator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04120916U (en) * | 1991-04-16 | 1992-10-29 | 日本電気株式会社 | mirror drive mechanism |
| JPH05333274A (en) * | 1992-05-29 | 1993-12-17 | Hitachi Ltd | Shape variable mirror and method for assembling this shape variable mirror as well as compensation optical device, array laser oscillator and laser isotope separator constituted by using this shape variable mirror |
-
1994
- 1994-03-29 JP JP6057950A patent/JP2746105B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07270691A (en) | 1995-10-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4703215A (en) | Stacked piezoelectric ceramics displacement magnifying device | |
| JP4146127B2 (en) | Piezoelectric actuator and electronic device including the same | |
| US6329737B1 (en) | Rotary electrostatic microactuator | |
| US6384510B1 (en) | Electrostatic microactuator with offset and/or inclined comb drive fingers | |
| US5760528A (en) | Vibration actuator | |
| US20110248601A1 (en) | Cascaded micromechanical actuator structure | |
| JP2746105B2 (en) | Mirror deflector | |
| JP6154636B2 (en) | Mirror device | |
| US20210380401A1 (en) | Micromechanical structure, micromechanical system and method of providing a micromechanical structure | |
| JPH05304323A (en) | Displacement enlargement mechanism | |
| US20160139340A1 (en) | Mems fiber optical switch | |
| US11635613B2 (en) | Optical device | |
| US7081982B2 (en) | Movable mirror device and dispersion compensator | |
| KR20110094284A (en) | Method for operating an electrostatic drive and electrostatic drives | |
| Wang et al. | Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system | |
| JP2003262803A (en) | Movable structure, and deflecting mirror element, optical switch element, and shape variable mirror each using the same | |
| WO2003073597A1 (en) | Electrostatic micro actuator | |
| CN109211216B (en) | Micro-electromechanical gyroscope with overload protection mechanism | |
| KR100513715B1 (en) | Micro switching device | |
| US8791620B2 (en) | Micromechanical actuator having multiple joints | |
| JP2629651B2 (en) | Mirror deflector | |
| JP2017167558A (en) | MEMS fiber optical switch | |
| SU1158962A1 (en) | Beam deflecting device | |
| WO2000062410A1 (en) | Electrostatic microactuator with offset and/or inclined comb drive fingers | |
| JPH0431818A (en) | Displacing device |