JPH07270691A - Mirror deflector - Google Patents
Mirror deflectorInfo
- Publication number
- JPH07270691A JPH07270691A JP5795094A JP5795094A JPH07270691A JP H07270691 A JPH07270691 A JP H07270691A JP 5795094 A JP5795094 A JP 5795094A JP 5795094 A JP5795094 A JP 5795094A JP H07270691 A JPH07270691 A JP H07270691A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- mirror
- electrodes
- mirror deflector
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はミラー偏向器に関し、特
に、圧電素子を駆動源とする信頼度の高い高速のミラー
偏向器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mirror deflector, and more particularly to a highly reliable and high speed mirror deflector using a piezoelectric element as a driving source.
【０００２】[0002]
【従来の技術】従来のミラー偏向器は、図３に示すよう
に、光ビームを偏向するためのミラー１と、ミラー１を
保持し、第１圧電素子１６と第２圧電素子１７の伸縮差
を角度に変換するための２系統のヒンジを有する可動部
２と、ミラー偏向器全体を固定するための固定部３と、
電極１８，１９に電圧を加えることにより伸縮させられ
る第１圧電素子１６と、電極２０，２１に電圧を加える
ことにより伸縮させられる第２圧電素子１７とからな
る。2. Description of the Related Art A conventional mirror deflector, as shown in FIG. 3, holds a mirror 1 for deflecting a light beam, a mirror 1, and an expansion / contraction difference between a first piezoelectric element 16 and a second piezoelectric element 17. A movable part 2 having two systems of hinges for converting the angle into an angle, and a fixed part 3 for fixing the entire mirror deflector,
The first piezoelectric element 16 is expanded and contracted by applying a voltage to the electrodes 18 and 19, and the second piezoelectric element 17 is expanded and contracted by applying a voltage to the electrodes 20 and 21.
【０００３】電極１８，１９に電圧を印加すると、第１
圧電素子１６は長さ方向に伸縮し、電極２０，２１に電
圧を印加すると、第２圧電素子１７も長さ方向に伸縮
し、その伸縮量は印加電圧にほぼ比例する。第１圧電素
子１６への印加電圧を第２圧電素子１７への印加電圧よ
りも大きくすると、第１圧電素子１６の伸長量が第２圧
電素子１７の伸長量より大きくなり、伸長量の差が可動
部２のヒンジ部分で角度変化に変換され、可動部２に保
持されたミラー１は＋θ方向に偏向される。第１圧電素
子１６と第２圧電素子１７に印加する電圧の大小関係を
逆転すれば、ミラー１は−θ方向に偏向される。このよ
うに、ミラー１は第１圧電素子１６と第２圧電素子１７
に印加する電圧を制御することにより、±θ方向に偏向
することができる。When a voltage is applied to the electrodes 18 and 19, the first
The piezoelectric element 16 expands and contracts in the length direction, and when a voltage is applied to the electrodes 20 and 21, the second piezoelectric element 17 also expands and contracts in the length direction, and the amount of expansion and contraction is substantially proportional to the applied voltage. When the voltage applied to the first piezoelectric element 16 is made higher than the voltage applied to the second piezoelectric element 17, the expansion amount of the first piezoelectric element 16 becomes larger than the expansion amount of the second piezoelectric element 17, and the difference in the expansion amount is The hinge portion of the movable portion 2 is converted into an angle change, and the mirror 1 held by the movable portion 2 is deflected in the + θ direction. By reversing the magnitude relationship between the voltages applied to the first piezoelectric element 16 and the second piezoelectric element 17, the mirror 1 is deflected in the -θ direction. As described above, the mirror 1 includes the first piezoelectric element 16 and the second piezoelectric element 17
By controlling the voltage applied to, it is possible to deflect in the ± θ directions.
【０００４】[0004]
【発明が解決しようとする課題】この従来のミラー偏向
器は第１圧電素子及び第２圧電素子が駆動源であり、第
１圧電素子及び第２圧電素子に設けた電極の破損によ
り、一方が故障した場合、ミラーの偏向角は＋θ方向か
又は−θ方向のいずれかしか駆動できず、そのため、故
障時には光ビームをトラッキングするような、±θ方向
に駆動する用途には使用できなくなるという問題があっ
た。In this conventional mirror deflector, the first piezoelectric element and the second piezoelectric element are drive sources, and one of them is damaged by the damage of the electrodes provided on the first piezoelectric element and the second piezoelectric element. In the event of a failure, the deflection angle of the mirror can be driven only in the + θ direction or in the −θ direction, so that it cannot be used in applications that drive in the ± θ direction, such as tracking the light beam at the time of failure. was there.
【０００５】本発明の目的は、圧電素子の信頼度を高
め、高速に駆動できるようにしたものである。An object of the present invention is to improve the reliability of a piezoelectric element and enable it to be driven at high speed.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明は、光ビームを偏向するためのミラーと、ミ
ラーを保持し２系統の圧電素子の伸縮差を角度に変換す
るための２系統のヒンジを有する可動部と、ミラー偏向
器全体を固定するための固定部と、可動部と固定部との
間隔を伸縮できるように両者を接続する２系統の圧電素
子とを有するミラー偏向器において、前記２系統の圧電
素子は、各々の系統において、伸縮方向に複数個の独立
な伸縮機能を有するようにしたものである。In order to achieve the above object, the present invention provides a mirror for deflecting a light beam, and a mirror holding the mirror for converting the expansion / contraction difference of two systems of piezoelectric elements into an angle. Mirror deflection having a movable part having two systems of hinges, a fixed part for fixing the entire mirror deflector, and two systems of piezoelectric elements connecting the movable part and the fixed part so that the gap between them can be expanded and contracted In the container, the two-system piezoelectric element has a plurality of independent expansion / contraction functions in the expansion / contraction direction in each system.
【０００７】そして、本発明は、一方の系統の圧電素子
を、両側面に対向して設けられた電極を有する第１圧電
素子と、両側面に対向して設けられた電極を有する第２
圧電素子との直列接続から構成し、他方の系統の圧電素
子を、両側面に対向して設けられた電極を有する第３圧
電素子と、両側面に対向して設けられた電極を有する第
４圧電素子との直列接続から構成したものである。According to the present invention, a piezoelectric element of one system is provided with a first piezoelectric element having electrodes provided on opposite sides thereof and a second piezoelectric element having electrodes provided on opposite sides thereof.
A third piezoelectric element having a piezoelectric element of the other system, which is configured by serial connection with a piezoelectric element, and a third piezoelectric element having electrodes provided on opposite side surfaces thereof, and a fourth piezoelectric element having electrodes provided on opposite side surfaces thereof. It is configured by serial connection with a piezoelectric element.
【０００８】また、本発明は、第１圧電素子と第２圧電
素子に印加する電圧の増減を互いに異なる方向に制御
し、第３圧電素子と第４圧電素子に印加する電圧の増減
を互いに異なる方向に制御するようにしたものである。Further, according to the present invention, the increase and decrease of the voltage applied to the first piezoelectric element and the second piezoelectric element are controlled in different directions, and the increase and decrease of the voltage applied to the third piezoelectric element and the fourth piezoelectric element are different from each other. It is designed to be controlled in the direction.
【０００９】更に、本発明は、各々の系統の圧電素子の
両側面に対向して電極を設け、電極を２つに分割して構
成したものである。Further, according to the present invention, electrodes are provided so as to face both side surfaces of the piezoelectric element of each system, and the electrodes are divided into two.
【００１０】[0010]
【作用】本発明は、一方の系統の圧電素子を、両側面に
対向して設けられた電極を有する第１圧電素子と、両側
面に対向して設けられた電極を有する第２圧電素子との
直列接続から構成し、他方の系統の圧電素子を、両側面
に対向して設けられた電極を有する第３圧電素子と、両
側面に対向して設けられた電極を有する第４圧電素子と
の直列接続から構成して、各電極に電圧を印加し、各系
統の圧電素子を動作させているので、第１圧電素子の電
極が破損しても、第２圧電素子が動作しているので、ミ
ラー偏向器としての動作をしなくなることはない。According to the present invention, a piezoelectric element of one system includes a first piezoelectric element having electrodes provided on both side surfaces thereof and a second piezoelectric element having electrodes provided on both side surfaces thereof. A third piezoelectric element having electrodes arranged opposite to each other on both sides, and a fourth piezoelectric element having electrodes arranged opposite to each other on the other side. Since the voltage is applied to each electrode to operate the piezoelectric element of each system, the second piezoelectric element operates even if the electrode of the first piezoelectric element is damaged. The mirror deflector does not stop operating.
【００１１】また、本発明は、各々の系統の圧電素子の
両側面に対向して電極を設け、電極を２つに分割して構
成し、各電極に電圧を印加し、各系統の圧電素子を動作
させているので、１つの電極が破損しても、その系統の
圧電素子は動作しているので、ミラー偏向器としての動
作をしなくなることはない。Further, according to the present invention, electrodes are provided so as to face each side surface of the piezoelectric element of each system, the electrodes are divided into two, and a voltage is applied to each electrode. Even if one electrode is damaged, the piezoelectric element of that system is operating, and therefore, the operation as the mirror deflector does not stop.
【００１２】[0012]
【実施例】次に、本発明について図面を参照して説明す
る。図１は本発明の一実施例のミラー偏向器の構成図で
ある。ミラー偏向器は、光ビームを偏向するためのミラ
ー１と、ミラー１を保持し、第１圧電素子４と第２圧電
素子５とを直列接続したものと、第３圧電素子６と第４
圧電素子７とを直列接続したものとの伸縮差を角度に変
換するための２系統のヒンジを有する可動部２と、ミラ
ー偏向器全体を固定するための固定部３と、電極８，９
に電圧を加えることにより伸縮させられる第１圧電素子
４と、電極１０，１１に電圧を加えることにより伸縮さ
せられる第２圧電素子５と、電極１２，１３に電圧を加
えることにより伸縮させられる第３圧電素子６と、電極
１４，１５に電圧を加えることにより伸縮させられる第
４圧電素子７とからなる。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram of a mirror deflector according to an embodiment of the present invention. The mirror deflector includes a mirror 1 for deflecting a light beam, a mirror holding the mirror 1, a first piezoelectric element 4 and a second piezoelectric element 5 connected in series, a third piezoelectric element 6 and a fourth piezoelectric element 6.
A movable part 2 having two systems of hinges for converting the expansion / contraction difference from the piezoelectric element 7 connected in series to an angle, a fixed part 3 for fixing the entire mirror deflector, and electrodes 8, 9
The first piezoelectric element 4 which is expanded and contracted by applying a voltage to the electrodes, the second piezoelectric element 5 which is expanded and contracted by applying a voltage to the electrodes 10 and 11, and the second piezoelectric element 5 which is expanded and contracted by applying a voltage to the electrodes 12 and 13. It is composed of three piezoelectric elements 6 and a fourth piezoelectric element 7 which is expanded and contracted by applying a voltage to the electrodes 14 and 15.
【００１３】第１圧電素子４と第２圧電素子５に電圧を
印加したときの合計の伸長量が、第３圧電素子６と第４
圧電素子７に電圧を印加したときの合計の伸長量よりも
大きい場合、伸長量の差が可動部２のヒンジ部分で角度
変化に変換され、可動部２に保持されたミラー１は＋θ
方向に偏向される。第１圧電素子４と第２圧電素子５の
合計の伸長量と第３圧電素子６と第４圧電素子７の合計
の伸長量の関係を逆転すれば、ミラー１は−θ方向に偏
向される。When a voltage is applied to the first piezoelectric element 4 and the second piezoelectric element 5, the total expansion amount is the third piezoelectric element 6 and the fourth piezoelectric element 5.
When it is larger than the total extension amount when a voltage is applied to the piezoelectric element 7, the difference in the extension amount is converted into an angle change at the hinge portion of the movable portion 2, and the mirror 1 held by the movable portion 2 is + θ.
Deflected in the direction. If the relationship between the total expansion amount of the first piezoelectric element 4 and the second piezoelectric element 5 and the total expansion amount of the third piezoelectric element 6 and the fourth piezoelectric element 7 is reversed, the mirror 1 is deflected in the -θ direction. .
【００１４】仮に、４個の圧電素子のうち、１個、例え
ば、第１圧電素子４が、電極８の破損により、故障した
場合、ミラー偏向器は、＋θ方向にも故障前の半分の角
度ではあるが、駆動することができる。つまり、１個の
圧電素子の故障による致命的な性能逸失は回避できるの
で、信頼度を増すことができる。If one of the four piezoelectric elements, for example, the first piezoelectric element 4 fails due to breakage of the electrode 8, the mirror deflector has a half angle in the + θ direction before the failure. However, it can be driven. That is, the fatal loss of performance due to the failure of one piezoelectric element can be avoided, so that the reliability can be increased.
【００１５】圧電素子は、ミラー偏向器全体の形状の制
約や機械的剛性等の制約が許せば、３個以上有限個の直
列接続が可能であり、更に、信頼度を増すことができ
る。Piezoelectric elements can be connected in series by a finite number of three or more, if the restrictions of the shape of the entire mirror deflector and the restrictions of mechanical rigidity and the like are allowed, and the reliability can be further increased.
【００１６】また、ミラー偏向器の駆動時に、直列に接
続した圧電素子に印加する電圧の増減を互いに異なる方
向に制御することにより、圧電素子に特有なヒステリシ
スを小さくすることができる。Further, when the mirror deflector is driven, the increase / decrease of the voltage applied to the piezoelectric elements connected in series is controlled in mutually different directions, whereby the hysteresis peculiar to the piezoelectric elements can be reduced.
【００１７】更に、従来のミラー偏向器に使用している
圧電素子を伸縮方向に分割することにより、圧電素子１
個当りの電極の面積と体積が減少することになり、圧電
素子の等価容量及び電極間容量が減少するので、より高
速なミラー偏向器の駆動が実現できる。Further, by dividing the piezoelectric element used in the conventional mirror deflector in the expansion / contraction direction, the piezoelectric element 1
Since the area and volume of each electrode are reduced, the equivalent capacitance of the piezoelectric element and the inter-electrode capacitance are reduced, so that the mirror deflector can be driven at a higher speed.
【００１８】図２は本発明の他の実施例のミラー偏向器
の構成図である。図１に記載されたものと同一のものに
は、同一の記号を使用した。図２に記載されたもので、
図１に記載されたものと異なるものは、第１圧電素子４
と第２圧電素子５との直列接続の代わりに第１圧電素子
１６を設け、第３圧電素子６と第４圧電素子７との直列
接続の代わりに第２圧電素子１７を設けたものである。FIG. 2 is a block diagram of a mirror deflector according to another embodiment of the present invention. The same symbols are used for the same components as those described in FIG. As shown in Figure 2,
What is different from that shown in FIG. 1 is that the first piezoelectric element 4
And the second piezoelectric element 5 are connected in series instead of the first piezoelectric element 16, and the third piezoelectric element 6 and the fourth piezoelectric element 7 are connected in series instead of the second piezoelectric element 17. .
【００１９】電極８，９と電極１０，１１に電圧を印加
したときの第１圧電素子１６の伸長量が、電極１２，１
３と電極１４，１５に電圧を印加したときの第２圧電素
子１７の伸長量よりも大きい場合、伸長量の差が可動部
２のヒンジ部分で角度変化に変換され、可動部２に保持
されたミラー１は＋θ方向に偏向される。第１圧電素子
１６の伸長量と第２圧電素子１７の伸長量の関係を逆転
すれば、ミラー１は−θ方向に偏向される。The amount of expansion of the first piezoelectric element 16 when voltage is applied to the electrodes 8 and 9 and the electrodes 10 and 11 is
3 is larger than the amount of expansion of the second piezoelectric element 17 when a voltage is applied to the electrodes 14 and 15, the difference in the amount of expansion is converted into an angle change at the hinge portion of the movable portion 2 and held by the movable portion 2. The mirror 1 is deflected in the + θ direction. If the relationship between the expansion amount of the first piezoelectric element 16 and the expansion amount of the second piezoelectric element 17 is reversed, the mirror 1 is deflected in the -θ direction.
【００２０】仮に、第１圧電素子１６の電極８が破損し
ても、電極１０，１１により第１圧電素子を駆動するこ
とができるので、信頼度を増すことができる。Even if the electrode 8 of the first piezoelectric element 16 is damaged, the first piezoelectric element can be driven by the electrodes 10 and 11, so that the reliability can be increased.
【００２１】また、従来のミラー偏向器に使用している
電極を伸縮方向に分割することにより、電極の面積を減
らしたので、電極間容量が減少し、より高速なミラー偏
向器の駆動が実現できる。Further, since the electrodes used in the conventional mirror deflector are divided in the expansion / contraction direction to reduce the area of the electrodes, the interelectrode capacitance is reduced, and the mirror deflector can be driven at a higher speed. it can.
【００２２】[0022]
【発明の効果】本発明は、以上説明したように構成され
ているので、圧電素子の信頼度を高め、高速に駆動でき
るという効果を有する。Since the present invention is configured as described above, it has the effect of increasing the reliability of the piezoelectric element and enabling high-speed driving.
【図１】本発明の一実施例のミラー偏向器の構成図であ
る。FIG. 1 is a configuration diagram of a mirror deflector according to an embodiment of the present invention.
【図２】本発明の他の実施例のミラー偏向器の構成図で
ある。FIG. 2 is a configuration diagram of a mirror deflector according to another embodiment of the present invention.
【図３】従来のミラー偏向器の構成図である。FIG. 3 is a configuration diagram of a conventional mirror deflector.
１ ミラー ２ 可動部 ３ 固定部 ４，１６ 第１圧電素子 ５，１７ 第２圧電素子 ６ 第３圧電素子 ７ 第４圧電素子 ８，９，１０，１１，１２，１３，１４，１５ 電極 DESCRIPTION OF SYMBOLS 1 mirror 2 movable part 3 fixed part 4,16 1st piezoelectric element 5,17 2nd piezoelectric element 6 3rd piezoelectric element 7 4th piezoelectric element 8,9,10,11,12,13,14,15 electrode
Claims (5)
ーを保持し２系統の圧電素子の伸縮差を角度に変換する
ための２系統のヒンジを有する可動部と、ミラー偏向器
全体を固定するための固定部と、可動部と固定部との間
隔を伸縮できるように両者を接続する２系統の圧電素子
とを有するミラー偏向器において、前記２系統の圧電素
子は、各々の系統において、伸縮方向に複数個の独立な
伸縮機能を有することを特徴とするミラー偏向器。1. A mirror for deflecting a light beam, a movable part having a mirror for holding a mirror and having two systems of hinges for converting the expansion / contraction difference of two systems of piezoelectric elements into an angle, and a mirror deflector as a whole. In the mirror deflector having a fixed part for connecting the movable part and the fixed part so that the distance between the movable part and the fixed part can be expanded and contracted, the two systems of piezoelectric elements are: A mirror deflector having a plurality of independent expansion / contraction functions in the expansion / contraction direction.
て設けられた電極を有する第１圧電素子と、両側面に対
向して設けられた電極を有する第２圧電素子との直列接
続からなり、他方の系統の圧電素子が、両側面に対向し
て設けられた電極を有する第３圧電素子と、両側面に対
向して設けられた電極を有する第４圧電素子との直列接
続からなる請求項１記載のミラー偏向器。2. A series of piezoelectric elements of one system, in which a first piezoelectric element having electrodes provided on both side surfaces thereof and a second piezoelectric element having electrodes provided on both side surfaces thereof are connected in series. Connection, the piezoelectric element of the other system is connected in series with a third piezoelectric element having electrodes provided on opposite side surfaces thereof and a fourth piezoelectric element having electrodes provided on opposite side surfaces thereof. The mirror deflector according to claim 1, comprising:
圧の増減を互いに異なる方向に制御し、第３圧電素子と
第４圧電素子に印加する電圧の増減を互いに異なる方向
に制御するようにした請求項２記載のミラー偏向器。3. The increase / decrease of the voltage applied to the first piezoelectric element and the second piezoelectric element is controlled in different directions, and the increase / decrease of the voltage applied to the third piezoelectric element and the fourth piezoelectric element are controlled in different directions. 3. The mirror deflector according to claim 2, wherein.
有限個直列接続した請求項１記載のミラー偏向器。4. The mirror deflector according to claim 1, wherein a finite number of piezoelectric elements, three or more, are connected in series in each system.
て設けられた電極を有し、前記電極が２つに分割されて
なる請求項１記載のミラー偏向器。5. The mirror deflector according to claim 1, wherein each system of piezoelectric elements has electrodes provided on both side surfaces thereof so as to face each other, and the electrodes are divided into two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6057950A JP2746105B2 (en) | 1994-03-29 | 1994-03-29 | Mirror deflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6057950A JP2746105B2 (en) | 1994-03-29 | 1994-03-29 | Mirror deflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07270691A true JPH07270691A (en) | 1995-10-20 |
| JP2746105B2 JP2746105B2 (en) | 1998-04-28 |
Family
ID=13070321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6057950A Expired - Lifetime JP2746105B2 (en) | 1994-03-29 | 1994-03-29 | Mirror deflector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2746105B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0862725A1 (en) * | 1995-11-24 | 1998-09-09 | On-Line Technologies, Inc. | Rugged moving-mirror interferometer |
| KR20020028689A (en) * | 2000-10-11 | 2002-04-17 | 구자홍 | micro-mirror |
| KR101024997B1 (en) * | 2009-01-16 | 2011-03-25 | 한국전기연구원 | an angle control device using Piezoelectric actuator |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04120916U (en) * | 1991-04-16 | 1992-10-29 | 日本電気株式会社 | mirror drive mechanism |
| JPH05333274A (en) * | 1992-05-29 | 1993-12-17 | Hitachi Ltd | Shape variable mirror and method for assembling this shape variable mirror as well as compensation optical device, array laser oscillator and laser isotope separator constituted by using this shape variable mirror |
-
1994
- 1994-03-29 JP JP6057950A patent/JP2746105B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04120916U (en) * | 1991-04-16 | 1992-10-29 | 日本電気株式会社 | mirror drive mechanism |
| JPH05333274A (en) * | 1992-05-29 | 1993-12-17 | Hitachi Ltd | Shape variable mirror and method for assembling this shape variable mirror as well as compensation optical device, array laser oscillator and laser isotope separator constituted by using this shape variable mirror |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0862725A1 (en) * | 1995-11-24 | 1998-09-09 | On-Line Technologies, Inc. | Rugged moving-mirror interferometer |
| EP0862725A4 (en) * | 1995-11-24 | 2002-03-06 | On Line Techn Inc | Rugged moving-mirror interferometer |
| KR20020028689A (en) * | 2000-10-11 | 2002-04-17 | 구자홍 | micro-mirror |
| KR101024997B1 (en) * | 2009-01-16 | 2011-03-25 | 한국전기연구원 | an angle control device using Piezoelectric actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2746105B2 (en) | 1998-04-28 |
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