JPH04120916U - mirror drive mechanism - Google Patents

Abstract

(57) [Summary] [Purpose] To widen the driving range of the mirror and to be able to drive it in both positive and negative directions. [Structure] A fixing member 1 having a mounting hole 2, a mirror mounting table 3 facing the fixing member 1 and having a mirror 4 placed thereon, and fixing member 1 and mirror mounting table 3 attached to both ends. By providing two parallel stacked piezoelectric actuators 5 and 6 connected via elastic hinges 7, 8, 9, and 10, one piezoelectric actuator 5 can be extended and the other piezoelectric actuator 6 can be contracted. This causes the mirror 4 to tilt significantly, and by expanding and contracting both the piezoelectric actuators 5 and 6, the mirror 4 approaches and moves away from the fixing member 1 in parallel.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a mirror drive mechanism used for tracking a light beam, etc. This invention relates to a mirror drive mechanism using stacked piezoelectric actuators.

0002

[Conventional technology]

Conventionally, this type of mirror drive mechanism has a fixed structure having a mounting hole 11, as shown in FIG. a fixing member 12, and a mirror 13 placed opposite the fixing member 12. A mirror mounting base 14, a fixing member 12, and a mirror mounting base 14 are attached to both ends. a stacked piezoelectric actuator 17 connected via flexible hinges 15 and 16; , an elastic hinge 18,1 with a fixing member 12 and a mirror mounting table 14 attached to both ends. A rod-shaped support connected in parallel to the stack type piezoelectric actuator 17 via 9. member 20, and the mechanism in the longitudinal direction of the stacked piezoelectric actuator 17. It converts mechanical expansion and contraction into angular displacement of the mirror reflection surface.

0003

[Problem that the idea aims to solve]

The conventional mirror drive mechanism described above uses one stacked piezoelectric actuator. Because of this, the mirror drive range is narrow and the mirror can only be moved in the positive or negative direction. The disadvantage is that it does not drive.

0004 Therefore, the purpose of this invention is to widen the driving range of the mirror and to The object of the present invention is to provide a mirror drive mechanism that can be driven in both directions.

[0005]

[Means to solve the problem]

This invention uses the mechanical expansion and contraction of a stacked piezoelectric actuator to adjust the angle of the mirror reflection surface. In the mirror drive mechanism that converts displacement, a fixing member with a mounting hole and this fixing member are used. A mirror mounting table with a mirror placed on it, which is placed opposite the fixing member, and a mirror mounting table with a mirror placed on it, and - Two parallel stacks connected to the mounting table via elastic hinges attached to both ends. It is equipped with a square-shaped piezoelectric actuator.

[0006]

[Effect]

In the above means, either one of the stacked piezoelectric actuators is expanded or contracted. By tilting the mirror in the positive or negative direction, one stack mold pressure Extend the electric actuator and contract the other stacked piezoelectric actuator. This allows the mirror to tilt significantly, and both stacked piezoelectric actuators By expanding and contracting the data, the mirror approaches and moves away parallel to the fixing member. .

[0007]

【Example】

Next, the present invention will be explained with reference to the drawings.

[0008] FIG. 1 is a side view of a mirror drive mechanism according to an embodiment of the present invention.

[0009] The fixing member 1 has a plurality of mounting holes 2, and a hole (not shown) is inserted through the mounting holes 2. fixed in a fixed system. The mirror mounting table 3 is arranged to face the fixing member 1 in parallel, A flat mirror 4 is placed thereon. Then, between the fixing member 1 and the mirror mounting table 3, In between are two stacked piezoelectric actuators that expand and contract in the longitudinal direction depending on the applied voltage. actuators (hereinafter simply referred to as "actuators" in this section) 5 and 6 are The fixing member 1 and the mirror are mounted using elastic hinges 7, 8, 9, and 10 at both ends, respectively. It is interposed parallel to the table 3 so as to be located in the same plane.

0010 In the mirror drive mechanism with the above configuration, one of the actuators 5 is extended. When a voltage is applied to , one of the actuators 5 stretches as shown in FIG. , each elastic hinge 7, 8, 9, 10 is deformed, and as a result, the mirror mounting table 3 and the mirror The mirror 4 is tilted by a predetermined angle θ, and the exit angle of the light beam incident on the mirror 4 is changes.

[0011] Also, a voltage is applied to both actuators 5 and 6 so that they expand or contract. Then, as shown in FIG. , 6 in parallel, resulting in a change in the position of the output beam.

0012 Further, a voltage is applied to one actuator 5 so as to extend it, and the other actuator 5 is When a voltage is applied to the actuator 6 to reduce the size, as shown in FIG. The inclination of the mirror 4 is approximately twice that of the case.

[0013] Furthermore, when a voltage is applied to the other actuator 6 so as to cause it to expand, as shown in FIG. As shown, the elastic hinges 7, 8, 9, and 10 change due to the expansion of the actuator 6. 2, the mirror 4 is tilted in the opposite direction to that shown in FIG.

[0014] By adopting the above-described configuration, the actuators 5 and 6 have a redundant configuration. It is also clear that this can be achieved.

[0015]

[Effect of the idea]

As explained above, the present invention includes a fixing member having a mounting hole, and a fixing member having a mounting hole. A mirror mounting stand on which a mirror is placed, and a fixing member and a mirror mounting stand, which are arranged opposite to each other. Two parallel stack type piezoelectrics connected via elastic hinges attached to both ends. By having an actuator, either one of the stacked piezoelectric actuators can be By expanding and contracting the eta, the mirror tilts in the positive or negative direction, and Extend one stacked piezoelectric actuator, and extend the other stacked piezoelectric actuator. The mirror is tilted greatly by reducing the eta, and both stack types By expanding and contracting the piezoelectric actuator, the mirror becomes parallel to the fixing member. Because they approach and move away from each other, the mirror drive range can be widened, and the positive and negative It can be driven in either direction, and the mirror position can also be offset. Ru.

[Brief explanation of drawings]

FIG. 1 is a side view of a mirror drive mechanism according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram of the operation when one stacked piezoelectric actuator of the mirror drive mechanism of FIG. 1 is extended;

FIG. 3 is an explanatory diagram of the operation when both stacked voltage actuators of the mirror drive mechanism of FIG. 1 are expanded and contracted.

FIG. 4 is an explanatory diagram of the operation when one stacked piezoelectric actuator of the mirror drive mechanism in FIG. 1 is expanded and the other stacked piezoelectric actuator is contracted.

FIG. 5 is an explanatory diagram of the operation when extending the other stacked piezoelectric actuator of the mirror drive mechanism in FIG. 1;

FIG. 6 is a side view of a conventional mirror drive mechanism.

[Explanation of symbols]

1 Fixing member 2 Mounting hole 3 Mirror mounting stand 4 Mirror 5 Stack type piezoelectric actuator 6 Stack type piezoelectric actuator 7 Elastic hinge 8 Elastic hinge 9 Elastic hinge 10 Elastic hinge

Claims (1)

[Scope of utility model registration request] 1. A mirror drive mechanism that converts mechanical expansion and contraction of a stacked piezoelectric actuator into angular displacement of a mirror reflecting surface, comprising: a fixing member having a mounting hole; and a fixing member disposed opposite to the fixing member, on which the mirror is mounted. mirror mounting stand,
A mirror drive mechanism comprising two parallel stack-type piezoelectric actuators connected to a fixing member and a mirror mounting table via elastic hinges attached to both ends.