ES2081693T3 - Captador acelerometrico capacitivo y acelerometro no condicionado que comprende su aplicacion. - Google Patents

Captador acelerometrico capacitivo y acelerometro no condicionado que comprende su aplicacion.

Info

Publication number
ES2081693T3
ES2081693T3 ES93400582T ES93400582T ES2081693T3 ES 2081693 T3 ES2081693 T3 ES 2081693T3 ES 93400582 T ES93400582 T ES 93400582T ES 93400582 T ES93400582 T ES 93400582T ES 2081693 T3 ES2081693 T3 ES 2081693T3
Authority
ES
Spain
Prior art keywords
unconditioned
understands
accelerometer
capacitive
application
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93400582T
Other languages
English (en)
Inventor
Michel Levy
Alfred Permuy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Application granted granted Critical
Publication of ES2081693T3 publication Critical patent/ES2081693T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)

Abstract

EL CAPTADOR MINIATURIZABLE, COMPRENDE UN SUBSTRATO AISLANTE (10) QUE LLEVA UN PRIMER ELECTRODO DE MEDIDA (24) Y COMPRENDE UN BRAZO FLEXIBLE DE MEDIDA (18) EN MATERIAL CONDUCTOR O SEMICONDUCTOR DONDE UNA PRIMERA PARTE TERMINAL ES SOLIDARIZADA DEL SUBSTRATO (10) Y DONDE LA OTRA PARTE TERMINAL CONSTITUYE UN SEGUNDO ELECTRODO QUE HACE FRENTE A LA PRIMERA. LA PRIMERA PARTE TERMINAL ESTA FIJADA AL SUBSTRATO POR EL INTERMEDIARIO DE UN VIGA (16) DONDE HAY UN MODULO DE FLEXION AL MENOS DIEZ VECES SUPERIOR AL DEL BRAZO DE MEDIDA, Y DE UN PIE (14) FIJADO RIGIDAMENTE AL SUBSTRATO (10) Y SITUADO ENTRE LAS DOS EXTREMIDADES DEL BRAZO DE MEDIDA, LAS LIGADURAS DE LA VIGA (16) CON EL BRAZO DE MEDIDA (18) Y CON EL PIE (14) SIENDO ASIMILABLES A UN EMPOTRAMIENTO
ES93400582T 1992-03-09 1993-03-05 Captador acelerometrico capacitivo y acelerometro no condicionado que comprende su aplicacion. Expired - Lifetime ES2081693T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9202782A FR2688315B1 (fr) 1992-03-09 1992-03-09 Capteur accelerometrique capacitif et accelerometre non asservi en comportant application.

Publications (1)

Publication Number Publication Date
ES2081693T3 true ES2081693T3 (es) 1996-03-16

Family

ID=9427492

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93400582T Expired - Lifetime ES2081693T3 (es) 1992-03-09 1993-03-05 Captador acelerometrico capacitivo y acelerometro no condicionado que comprende su aplicacion.

Country Status (6)

Country Link
US (1) US5375469A (es)
EP (1) EP0560661B1 (es)
DE (1) DE69301044T2 (es)
ES (1) ES2081693T3 (es)
FR (1) FR2688315B1 (es)
NO (1) NO930849L (es)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4324692A1 (de) * 1993-07-23 1995-01-26 Bosch Gmbh Robert Piezoelektrischer Kraftsensor
US5814727A (en) * 1993-11-08 1998-09-29 Motorola, Inc. Semiconductor accelerometer having reduced sensor plate flexure
US5594170A (en) * 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
EP0752159B1 (en) * 1994-11-23 2000-01-05 Koninklijke Philips Electronics N.V. Semiconductor device provided with a microcomponent having a fixed and a movable electrode
EP1847850B1 (en) * 1999-03-17 2013-04-24 ION Geophysical Corporation Hydrophone assembly
US6776043B1 (en) * 2003-02-07 2004-08-17 The Boeing Company Variable capacitance bridge accelerometer
JP4437699B2 (ja) * 2004-05-14 2010-03-24 富士通マイクロエレクトロニクス株式会社 センサ
US7131315B2 (en) 2004-09-28 2006-11-07 Honeywell International Inc. Methods and apparatus for reducing vibration rectification errors in closed-loop accelerometers
KR100899812B1 (ko) * 2006-12-05 2009-05-27 한국전자통신연구원 정전 용량형 가속도계
US8939029B2 (en) * 2008-09-05 2015-01-27 Analog Devices, Inc. MEMS sensor with movable Z-axis sensing element

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3012192A (en) * 1961-12-05 Electric system
DE1466708A1 (de) * 1964-08-04 1969-01-30 Hellige & Co Gmbh F Traegerfrequenzmessbrueckenverstaerker mit selbsttaetigem Brueckenabgleich
SU534694A1 (ru) * 1975-04-14 1976-11-05 Московское Ордена Ленина И Ордена Трудового Красного Знамени Высшее Техническое Училище Им.Н.Э.Баумана Акселерометр
US4356730A (en) * 1981-01-08 1982-11-02 International Business Machines Corporation Electrostatically deformographic switches
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
CH648929A5 (fr) * 1982-07-07 1985-04-15 Tesa Sa Dispositif de mesure capacitif de deplacement.
FR2558263B1 (fr) * 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
IL80550A0 (en) * 1986-11-07 1987-02-27 Israel Aircraft Ind Ltd Resonant element force transducer for acceleration sensing
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer

Also Published As

Publication number Publication date
FR2688315A1 (fr) 1993-09-10
US5375469A (en) 1994-12-27
DE69301044T2 (de) 1996-08-22
EP0560661B1 (fr) 1995-12-20
DE69301044D1 (de) 1996-02-01
FR2688315B1 (fr) 1994-05-27
NO930849D0 (no) 1993-03-08
EP0560661A1 (fr) 1993-09-15
NO930849L (no) 1993-09-10

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