NO854029L - Transduser for absolutt trykk. - Google Patents
Transduser for absolutt trykk.Info
- Publication number
- NO854029L NO854029L NO854029A NO854029A NO854029L NO 854029 L NO854029 L NO 854029L NO 854029 A NO854029 A NO 854029A NO 854029 A NO854029 A NO 854029A NO 854029 L NO854029 L NO 854029L
- Authority
- NO
- Norway
- Prior art keywords
- electrode
- transducer according
- foundation plate
- capacitor
- partition wall
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 33
- 229920001296 polysiloxane Polymers 0.000 claims description 32
- 239000011521 glass Substances 0.000 claims description 26
- 238000005192 partition Methods 0.000 claims description 22
- 239000003990 capacitor Substances 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 17
- 239000004020 conductor Substances 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims 1
- 238000001465 metallisation Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 238000007789 sealing Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005285 chemical preparation method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Semiconductor Integrated Circuits (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Secondary Cells (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI843989A FI75426C (fi) | 1984-10-11 | 1984-10-11 | Absoluttryckgivare. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NO854029L true NO854029L (no) | 1986-04-14 |
Family
ID=8519723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO854029A NO854029L (no) | 1984-10-11 | 1985-10-10 | Transduser for absolutt trykk. |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US4609966A (fr) |
| JP (1) | JPS61221631A (fr) |
| BR (1) | BR8505067A (fr) |
| DE (1) | DE3535904C2 (fr) |
| FI (1) | FI75426C (fr) |
| FR (1) | FR2571855B1 (fr) |
| GB (1) | GB2165652B (fr) |
| IT (1) | IT1186937B (fr) |
| NL (1) | NL8502795A (fr) |
| NO (1) | NO854029L (fr) |
| SE (1) | SE8504703L (fr) |
| ZA (1) | ZA857740B (fr) |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0750789B2 (ja) * | 1986-07-18 | 1995-05-31 | 日産自動車株式会社 | 半導体圧力変換装置の製造方法 |
| US4701826A (en) * | 1986-10-30 | 1987-10-20 | Ford Motor Company | High temperature pressure sensor with low parasitic capacitance |
| US4773972A (en) * | 1986-10-30 | 1988-09-27 | Ford Motor Company | Method of making silicon capacitive pressure sensor with glass layer between silicon wafers |
| SE459887B (sv) * | 1987-02-12 | 1989-08-14 | Hydrolab Ab | Tryckgivare |
| FI84401C (fi) * | 1987-05-08 | 1991-11-25 | Vaisala Oy | Kapacitiv tryckgivarkonstruktion. |
| FI872049A (fi) * | 1987-05-08 | 1988-11-09 | Vaisala Oy | Kondensatorkonstruktion foer anvaendning vid tryckgivare. |
| JPS6410139A (en) * | 1987-07-02 | 1989-01-13 | Yokogawa Electric Corp | Manufacture of vibration type transducer |
| GB8718639D0 (en) * | 1987-08-06 | 1987-09-09 | Spectrol Reliance Ltd | Capacitive pressure sensors |
| FI78784C (fi) * | 1988-01-18 | 1989-09-11 | Vaisala Oy | Tryckgivarkonstruktion och foerfarande foer framstaellning daerav. |
| DE3811047A1 (de) * | 1988-03-31 | 1989-10-12 | Draegerwerk Ag | Fuehler zur kapazitiven messung des druckes in gasen |
| SE461300B (sv) * | 1988-05-17 | 1990-01-29 | Hydrolab Ab | Tryckmaetare |
| GB2225855B (en) * | 1988-11-05 | 1993-01-20 | Rolls Royce Plc | Capacitance probe |
| US4996627A (en) * | 1989-01-30 | 1991-02-26 | Dresser Industries, Inc. | High sensitivity miniature pressure transducer |
| US5245504A (en) * | 1989-02-28 | 1993-09-14 | United Technologies Corporation | Methodology for manufacturing hinged diaphragms for semiconductor sensors |
| US4998179A (en) * | 1989-02-28 | 1991-03-05 | United Technologies Corporation | Capacitive semiconductive sensor with hinged diaphragm for planar movement |
| US5165281A (en) * | 1989-09-22 | 1992-11-24 | Bell Robert L | High pressure capacitive transducer |
| CA2058916C (fr) * | 1991-01-28 | 2000-03-21 | Dean Joseph Maurer | Transducteur a pression piezoresistant muni d'un sceau elastomerique conducteur |
| US5184107A (en) * | 1991-01-28 | 1993-02-02 | Honeywell, Inc. | Piezoresistive pressure transducer with a conductive elastomeric seal |
| US5323656A (en) * | 1992-05-12 | 1994-06-28 | The Foxboro Company | Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same |
| US5189591A (en) * | 1992-06-12 | 1993-02-23 | Allied-Signal Inc. | Aluminosilicate glass pressure transducer |
| US5317919A (en) * | 1992-06-16 | 1994-06-07 | Teledyne Industries, Inc. | A precision capacitor sensor |
| US5351550A (en) * | 1992-10-16 | 1994-10-04 | Honeywell Inc. | Pressure sensor adapted for use with a component carrier |
| US5545594A (en) * | 1993-10-26 | 1996-08-13 | Yazaki Meter Co., Ltd. | Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented |
| US5479827A (en) * | 1994-10-07 | 1996-01-02 | Yamatake-Honeywell Co., Ltd. | Capacitive pressure sensor isolating electrodes from external environment |
| US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
| US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
| US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
| DE19541616C2 (de) * | 1995-11-08 | 1997-11-06 | Klaus Dr Ing Erler | Mikromechanisches Bauelement und Verfahren zu seiner Herstellung |
| US5954850A (en) * | 1996-11-22 | 1999-09-21 | Bernot; Anthony J. | Method for making glass pressure capacitance transducers in batch |
| US6324914B1 (en) | 1997-03-20 | 2001-12-04 | Alliedsignal, Inc. | Pressure sensor support base with cavity |
| US6058780A (en) * | 1997-03-20 | 2000-05-09 | Alliedsignal Inc. | Capacitive pressure sensor housing having a ceramic base |
| US6387318B1 (en) | 1997-12-05 | 2002-05-14 | Alliedsignal, Inc. | Glass-ceramic pressure sensor support base and its fabrication |
| JP3339563B2 (ja) * | 1998-06-09 | 2002-10-28 | 株式会社山武 | 静電容量式センサ |
| US20020003274A1 (en) * | 1998-08-27 | 2002-01-10 | Janusz Bryzek | Piezoresistive sensor with epi-pocket isolation |
| US6006607A (en) * | 1998-08-31 | 1999-12-28 | Maxim Integrated Products, Inc. | Piezoresistive pressure sensor with sculpted diaphragm |
| US6089106A (en) * | 1998-09-04 | 2000-07-18 | Breed Automotive Technology, Inc. | Force sensor assembly |
| US6351996B1 (en) | 1998-11-12 | 2002-03-05 | Maxim Integrated Products, Inc. | Hermetic packaging for semiconductor pressure sensors |
| US6346742B1 (en) | 1998-11-12 | 2002-02-12 | Maxim Integrated Products, Inc. | Chip-scale packaged pressure sensor |
| US6229190B1 (en) | 1998-12-18 | 2001-05-08 | Maxim Integrated Products, Inc. | Compensated semiconductor pressure sensor |
| EP1244900B1 (fr) | 2000-01-06 | 2005-01-05 | Rosemount Inc. | Croissance du grain dans une interconnexion electrique pour microsystemes electromecaniques (mems) |
| US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
| US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
| US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
| US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
| JP4480939B2 (ja) † | 2001-03-14 | 2010-06-16 | フラウンホファー ゲセルシャフトツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー．ファオ． | ガラス系材料からなるフラット基板を構造化する方法 |
| EP1359402B1 (fr) * | 2002-05-01 | 2014-10-01 | Infineon Technologies AG | Capteur de pression |
| US6848316B2 (en) | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
| US7030651B2 (en) * | 2003-12-04 | 2006-04-18 | Viciciv Technology | Programmable structured arrays |
| JP2006047279A (ja) * | 2004-07-02 | 2006-02-16 | Alps Electric Co Ltd | ガラス基板及びそれを用いた静電容量型圧力センサ |
| JP2006170893A (ja) * | 2004-12-17 | 2006-06-29 | Alps Electric Co Ltd | 静電容量型圧力センサ |
| CN100429033C (zh) * | 2005-07-19 | 2008-10-29 | 中国石油天然气股份有限公司 | 单盘浮顶油罐单盘变形的修复方法 |
| US7345867B2 (en) * | 2005-11-18 | 2008-03-18 | Alps Electric Co., Ltd | Capacitive pressure sensor and method of manufacturing the same |
| JP2007163456A (ja) * | 2005-11-18 | 2007-06-28 | Alps Electric Co Ltd | 静電容量型圧力センサ |
| US8358047B2 (en) * | 2008-09-29 | 2013-01-22 | Xerox Corporation | Buried traces for sealed electrostatic membrane actuators or sensors |
| CN105092111A (zh) * | 2014-05-09 | 2015-11-25 | 无锡华润上华半导体有限公司 | 电容式压力传感器和其制作方法 |
| CN106092332B (zh) * | 2016-07-18 | 2018-12-18 | 上海集成电路研发中心有限公司 | 自监控真空泄露的器件、制备方法、系统及自监控方法 |
| JP2021105519A (ja) * | 2018-03-09 | 2021-07-26 | 株式会社村田製作所 | 圧力センサ |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1138401A (en) * | 1965-05-06 | 1969-01-01 | Mallory & Co Inc P R | Bonding |
| US4386453A (en) * | 1979-09-04 | 1983-06-07 | Ford Motor Company | Method for manufacturing variable capacitance pressure transducers |
| US4261086A (en) * | 1979-09-04 | 1981-04-14 | Ford Motor Company | Method for manufacturing variable capacitance pressure transducers |
| DE2938205A1 (de) * | 1979-09-21 | 1981-04-09 | Robert Bosch Gmbh, 7000 Stuttgart | Kapazitiver druckgeber und auswerteeinrichtung hierfuer |
| JPS5855732A (ja) * | 1981-09-30 | 1983-04-02 | Hitachi Ltd | 静電容量型圧力センサ |
| US4405970A (en) * | 1981-10-13 | 1983-09-20 | United Technologies Corporation | Silicon-glass-silicon capacitive pressure transducer |
| US4384899A (en) * | 1981-11-09 | 1983-05-24 | Motorola Inc. | Bonding method adaptable for manufacturing capacitive pressure sensing elements |
| DE3310643C2 (de) * | 1983-03-24 | 1986-04-10 | Karlheinz Dr. 7801 Schallstadt Ziegler | Drucksensor |
| US4467394A (en) * | 1983-08-29 | 1984-08-21 | United Technologies Corporation | Three plate silicon-glass-silicon capacitive pressure transducer |
| JPS60138977A (ja) * | 1983-12-27 | 1985-07-23 | Fuji Electric Co Ltd | 半導体形静電容量式圧力センサ |
| FI74350C (fi) * | 1984-02-21 | 1988-01-11 | Vaisala Oy | Kapacitiv absoluttryckgivare. |
| FI69211C (fi) * | 1984-02-21 | 1985-12-10 | Vaisala Oy | Kapacitiv styckgivare |
| FI71015C (fi) * | 1984-02-21 | 1986-10-27 | Vaisala Oy | Temperaturoberoende kapacitiv tryckgivare |
| US4530029A (en) * | 1984-03-12 | 1985-07-16 | United Technologies Corporation | Capacitive pressure sensor with low parasitic capacitance |
-
1984
- 1984-10-11 FI FI843989A patent/FI75426C/fi not_active IP Right Cessation
-
1985
- 1985-10-01 GB GB8524186A patent/GB2165652B/en not_active Expired
- 1985-10-04 US US06/784,198 patent/US4609966A/en not_active Expired - Lifetime
- 1985-10-08 ZA ZA857740A patent/ZA857740B/xx unknown
- 1985-10-08 DE DE3535904A patent/DE3535904C2/de not_active Expired - Lifetime
- 1985-10-09 FR FR858514950A patent/FR2571855B1/fr not_active Expired - Lifetime
- 1985-10-09 IT IT12578/85A patent/IT1186937B/it active
- 1985-10-10 SE SE8504703A patent/SE8504703L/ not_active Application Discontinuation
- 1985-10-10 NO NO854029A patent/NO854029L/no unknown
- 1985-10-11 JP JP60224995A patent/JPS61221631A/ja active Granted
- 1985-10-11 NL NL8502795A patent/NL8502795A/nl not_active Application Discontinuation
- 1985-10-11 BR BR8505067A patent/BR8505067A/pt unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2571855A1 (fr) | 1986-04-18 |
| DE3535904A1 (de) | 1986-04-17 |
| JPS61221631A (ja) | 1986-10-02 |
| GB2165652B (en) | 1989-04-05 |
| GB8524186D0 (en) | 1985-11-06 |
| JPH0533732B2 (fr) | 1993-05-20 |
| BR8505067A (pt) | 1986-07-29 |
| NL8502795A (nl) | 1986-05-01 |
| SE8504703L (sv) | 1986-04-12 |
| FI843989A0 (fi) | 1984-10-11 |
| US4609966A (en) | 1986-09-02 |
| DE3535904C2 (de) | 1996-05-02 |
| FI843989L (fi) | 1986-04-12 |
| FR2571855B1 (fr) | 1990-11-30 |
| IT1186937B (it) | 1987-12-16 |
| SE8504703D0 (sv) | 1985-10-10 |
| FI75426B (fi) | 1988-02-29 |
| GB2165652A (en) | 1986-04-16 |
| ZA857740B (en) | 1986-06-25 |
| FI75426C (fi) | 1988-06-09 |
| IT8512578A0 (it) | 1985-10-09 |
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