NO319919B1 - Anordning for optisk kobling av en faststofflaser til en optisk bolgeleder og fremgangsmate til fremstilling av anordningen - Google Patents
Anordning for optisk kobling av en faststofflaser til en optisk bolgeleder og fremgangsmate til fremstilling av anordningen Download PDFInfo
- Publication number
- NO319919B1 NO319919B1 NO19992696A NO992696A NO319919B1 NO 319919 B1 NO319919 B1 NO 319919B1 NO 19992696 A NO19992696 A NO 19992696A NO 992696 A NO992696 A NO 992696A NO 319919 B1 NO319919 B1 NO 319919B1
- Authority
- NO
- Norway
- Prior art keywords
- solid
- optical
- lens
- optical waveguide
- state laser
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 230000008878 coupling Effects 0.000 title abstract description 4
- 238000010168 coupling process Methods 0.000 title abstract description 4
- 238000005859 coupling reaction Methods 0.000 title abstract description 4
- 239000007787 solid Substances 0.000 title 1
- 238000000034 method Methods 0.000 claims description 23
- 238000001459 lithography Methods 0.000 claims description 8
- 238000013461 design Methods 0.000 claims description 6
- 239000000654 additive Substances 0.000 claims description 5
- 230000000996 additive effect Effects 0.000 claims description 5
- 238000000609 electron-beam lithography Methods 0.000 claims description 5
- 230000006978 adaptation Effects 0.000 claims description 4
- 239000004922 lacquer Substances 0.000 claims description 4
- 239000002966 varnish Substances 0.000 claims description 3
- RDYMFSUJUZBWLH-UHFFFAOYSA-N endosulfan Chemical compound C12COS(=O)OCC2C2(Cl)C(Cl)=C(Cl)C1(Cl)C2(Cl)Cl RDYMFSUJUZBWLH-UHFFFAOYSA-N 0.000 claims 4
- 230000003667 anti-reflective effect Effects 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 abstract 3
- 238000010894 electron beam technology Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 241000276498 Pollachius virens Species 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000313 electron-beam-induced deposition Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optical Integrated Circuits (AREA)
- Eyeglasses (AREA)
- Lasers (AREA)
- Laser Surgery Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19650696A DE19650696A1 (de) | 1996-12-06 | 1996-12-06 | Vorrichtung zur optischen Kopplung eines Festkörperlasers mit einem Lichtwellenleiter und Verfahren zu deren Herstellung |
| PCT/EP1997/006566 WO1998025170A1 (de) | 1996-12-06 | 1997-11-25 | Vorrichtung zur optischen kopplung eines festkörperlasers mit einem lichtwellenleiter und verfahren zu deren herstellung |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NO992696D0 NO992696D0 (no) | 1999-06-03 |
| NO992696L NO992696L (no) | 1999-07-27 |
| NO319919B1 true NO319919B1 (no) | 2005-10-03 |
Family
ID=7813865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO19992696A NO319919B1 (no) | 1996-12-06 | 1999-06-03 | Anordning for optisk kobling av en faststofflaser til en optisk bolgeleder og fremgangsmate til fremstilling av anordningen |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US6370298B2 (zh) |
| EP (1) | EP0943111B1 (zh) |
| JP (1) | JP2001504950A (zh) |
| CN (1) | CN1144073C (zh) |
| AT (1) | ATE206528T1 (zh) |
| CA (1) | CA2273930C (zh) |
| DE (2) | DE19650696A1 (zh) |
| ES (1) | ES2165633T3 (zh) |
| NO (1) | NO319919B1 (zh) |
| WO (1) | WO1998025170A1 (zh) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002091048A1 (fr) * | 2001-04-20 | 2002-11-14 | Huawei Technologies Co., Ltd. | Dispositif de connexion d'une source lumineuse de pompage d'un amplificateur a fibre a plusieurs etages a dopage er |
| US20060056762A1 (en) * | 2003-07-02 | 2006-03-16 | Honeywell International Inc. | Lens optical coupler |
| US7324723B2 (en) * | 2003-10-06 | 2008-01-29 | Mitsui Chemicals, Inc. | Optical waveguide having specular surface formed by laser beam machining |
| JP4488287B2 (ja) * | 2003-11-21 | 2010-06-23 | フジノン株式会社 | ビーム集光用レンズ |
| US7520062B2 (en) * | 2005-12-06 | 2009-04-21 | Robert Bosch Tool Corporation | Light-plane projecting apparatus and lens |
| GB201011058D0 (en) | 2010-07-01 | 2010-08-18 | Oclaro Technology Plc | Fibre optical coupling |
| JP2012168240A (ja) * | 2011-02-10 | 2012-09-06 | Sumitomo Electric Device Innovations Inc | 光モジュール |
| TW201516533A (zh) * | 2013-10-21 | 2015-05-01 | Hon Hai Prec Ind Co Ltd | 背光模組 |
| US20210157035A1 (en) * | 2018-07-24 | 2021-05-27 | Nikon Corporation | Ocular optical system and head mounted display |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616889A (ja) | 1984-06-21 | 1986-01-13 | Matsushita Electric Ind Co Ltd | 半導体発光素子およびその製造方法 |
| NL8600844A (nl) | 1986-04-02 | 1987-11-02 | Tno | Optisch vezel-strookgeleidersamenstel met lichtkoppeling tussen een vezel en een op een substraat aangebrachte planaire strookgeleider. |
| JPS63100790A (ja) | 1986-10-17 | 1988-05-02 | Nec Corp | 半導体レ−ザモジユ−ル |
| GB2220501A (en) | 1988-07-06 | 1990-01-10 | Plessey Co Plc | Coupling waveguides using transverse cylindrical lenses |
| DE3919484A1 (de) | 1989-04-15 | 1990-10-18 | Rodenstock Optik G | Optisches system zur aenderung der form des strahlquerschnittes von lichtbuendeln |
| US5081639A (en) * | 1990-10-01 | 1992-01-14 | The United States Of America As Represented By The United States Department Of Energy | Laser diode assembly including a cylindrical lens |
| CH682698A5 (de) | 1990-11-01 | 1993-10-29 | Fisba Optik Ag Bystronic Laser | Verfahren, bei dem mehrere, in einer oder mehreren Reihen angeordnete Strahlungsquellen abgebildet werden und Vorrichtung hierzu. |
| US5181224A (en) | 1991-05-10 | 1993-01-19 | University Of California | Microoptic lenses |
| US5140608A (en) | 1991-05-29 | 1992-08-18 | Optrotech Ltd, Israel Company | Optical system for focusing a light beam on to an image plane |
| US5455879A (en) * | 1994-06-22 | 1995-10-03 | Corning Incorporated | Anamorphic microlens for coupling optical fibers to elliptical light beams |
| EP0706070A3 (de) | 1994-10-04 | 1997-04-02 | Siemens Ag | Verfahren zum Trockenätzen eines Halbleitersubstrats |
| US5790576A (en) * | 1996-06-26 | 1998-08-04 | Sdl, Inc. | High brightness laser diode source |
| US5946140A (en) * | 1998-03-06 | 1999-08-31 | Lucent Technologies Inc. | Fiber lens for use with a confocal lens system |
| US6026206A (en) * | 1998-03-06 | 2000-02-15 | Lucent Technologies, Inc. | Optical coupler using anamorphic microlens |
-
1996
- 1996-12-06 DE DE19650696A patent/DE19650696A1/de not_active Withdrawn
-
1997
- 1997-11-25 EP EP97951967A patent/EP0943111B1/de not_active Expired - Lifetime
- 1997-11-25 CA CA002273930A patent/CA2273930C/en not_active Expired - Lifetime
- 1997-11-25 WO PCT/EP1997/006566 patent/WO1998025170A1/de active IP Right Grant
- 1997-11-25 JP JP52514398A patent/JP2001504950A/ja not_active Ceased
- 1997-11-25 ES ES97951967T patent/ES2165633T3/es not_active Expired - Lifetime
- 1997-11-25 US US09/319,510 patent/US6370298B2/en not_active Expired - Lifetime
- 1997-11-25 DE DE59704815T patent/DE59704815D1/de not_active Expired - Lifetime
- 1997-11-25 AT AT97951967T patent/ATE206528T1/de active
- 1997-11-25 CN CNB971803935A patent/CN1144073C/zh not_active Expired - Lifetime
-
1999
- 1999-06-03 NO NO19992696A patent/NO319919B1/no not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1240031A (zh) | 1999-12-29 |
| ES2165633T3 (es) | 2002-03-16 |
| CA2273930C (en) | 2007-01-16 |
| US20020009259A1 (en) | 2002-01-24 |
| EP0943111A1 (de) | 1999-09-22 |
| JP2001504950A (ja) | 2001-04-10 |
| NO992696D0 (no) | 1999-06-03 |
| NO992696L (no) | 1999-07-27 |
| CN1144073C (zh) | 2004-03-31 |
| DE19650696A1 (de) | 1998-06-10 |
| EP0943111B1 (de) | 2001-10-04 |
| US6370298B2 (en) | 2002-04-09 |
| DE59704815D1 (de) | 2001-11-08 |
| WO1998025170A1 (de) | 1998-06-11 |
| CA2273930A1 (en) | 1998-06-11 |
| ATE206528T1 (de) | 2001-10-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2433873C (en) | Optical signal processing circuit and method for producing same | |
| US6589716B2 (en) | Microoptical system and fabrication method therefor | |
| EP3535615A1 (de) | Verfahren zur herstellung eines optischen systems und optisches system | |
| KR20000016498A (ko) | 생산환경을 위한 홀로그래픽 패터닝방법 및 공구 | |
| NO319919B1 (no) | Anordning for optisk kobling av en faststofflaser til en optisk bolgeleder og fremgangsmate til fremstilling av anordningen | |
| US5077622A (en) | Apparatus for precision focussing and positioning of a beam waist on a target | |
| CN1860391A (zh) | 可变光衰减器 | |
| US5894538A (en) | Method of forming integrated optical circuit planar waveguide turning mirrors | |
| CN110709756A (zh) | 用于产生周期性光图案的光学部件 | |
| CN114442439B (zh) | 一种用于光刻机的集成紫外全介质超透镜组 | |
| US6975409B2 (en) | Illumination device; and coordinate measuring instrument having an illumination device | |
| US6291139B1 (en) | Process for fabricating three-dimensional polymer layer structures | |
| Snyder et al. | Broadband, polarization-insensitive lensed edge couplers for silicon photonics | |
| JPH07106229A (ja) | 光リソグラフィ方法及び装置 | |
| Kinoshita | History of extreme ultraviolet lithography | |
| US6614959B1 (en) | Methods of writing apodized fiber gratings and associated apparatuses | |
| Yang et al. | Design and fabrication of microlens and spatial filter array by self-alignment for maskless lithography systems | |
| DE102017221952B3 (de) | Mikro-optomechanisches System und Verfahren zu seiner Herstellung | |
| Goering et al. | Miniaturized optical switches based on piezoelectrically driven microprism arrays | |
| DE102018218488A1 (de) | Messanordnung zur interferometrischen Absolutmessung des Abstandes zwischen zwei Komponenten in einem optischen System für die Mikrolithographie | |
| Van Soest et al. | Laser interference lithography with highly accurate interferometric alignment | |
| CA2317308C (en) | An optical waveguide element, a three-dimensional optical waveguide circuit and an optical system | |
| CN212781323U (zh) | 一种切趾光纤光栅 | |
| Lee | Design and fabrication of on-chip high power optical phased arrayed waveguides | |
| Liu et al. | Design of a Beam-coupling System for a Chip-integrated Spectrometer with a Discrete Linear Waveguide |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK1K | Patent expired |