US20020009259A1 - Device for optical coupling of a solid-state laser with an optical wave guide and a process for their production - Google Patents
Device for optical coupling of a solid-state laser with an optical wave guide and a process for their production Download PDFInfo
- Publication number
- US20020009259A1 US20020009259A1 US09/319,510 US31951099A US2002009259A1 US 20020009259 A1 US20020009259 A1 US 20020009259A1 US 31951099 A US31951099 A US 31951099A US 2002009259 A1 US2002009259 A1 US 2002009259A1
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- United States
- Prior art keywords
- lens
- recited
- solid
- state laser
- lenses
- Prior art date
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- Granted
Links
- 230000008878 coupling Effects 0.000 title claims abstract description 10
- 238000010168 coupling process Methods 0.000 title claims abstract description 10
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 230000003287 optical effect Effects 0.000 title claims abstract description 7
- 238000000034 method Methods 0.000 title claims description 16
- 230000008569 process Effects 0.000 title description 2
- 239000013307 optical fiber Substances 0.000 claims abstract description 16
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 238000000609 electron-beam lithography Methods 0.000 claims description 4
- 238000001459 lithography Methods 0.000 claims description 4
- 239000000654 additive Substances 0.000 claims 2
- 230000000996 additive effect Effects 0.000 claims 2
- 239000000835 fiber Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 210000000887 face Anatomy 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
Definitions
- the invention relates to a device for the optical coupling of a solid-state laser to an optical fiber, an anamorphic lens system being arranged between the output face of the solid-state laser and the input face of the optical fiber and converting differing apertures in the main sections of the solid-state laser into essentially identical apertures at the input face of the optical fiber, and to a method for its manufacture.
- the object of the present invention is to propose a device for coupling a solid-state laser to an optical fiber, which permits substantially no-loss coupling and an adaptation of the wave fields in the direction of both main sections, and which can be manufactured with the necessary accuracy.
- the lens system is composed of one anamorphic lens mounted on the output face and a further lens mounted on the input face.
- the device of the present invention has the advantage that in each case, the lenses can be applied on the output face and input face, respectively, with very high accuracy. An adjustment is then only necessary between the laser axis and the axis of the optical fiber. Both the anamorphic lens and the further lens can be advantageously manufactured using well-known processes.
- an anamorphic lens on the input face is not ruled out in the device of the present invention, however, the further lens is preferably spherical.
- the invention permits two designs, namely that the anamorphic lens mounted on the output face of the laser is an aspherical lens, which can be a Fresnel lens, or is formed of two crossed, cylindrical partial lenses, at least one of the component lenses being designed as a Fresnel lens.
- the device of the present invention makes it possible for the output pupils of the laser to form a virtual circular source image. Because of this, it is possible to select a small distance between the lenses or between the output and input faces, accompanied by relatively great focal lengths of the lenses. The great focal lengths of the lenses, in turn, are more favorable for production using microtechnique methods.
- the dry-resist technique makes available a method in which, using vapor deposition in high vacuum, the laser or the fiber end is covered with a defined layer thickness of a polymer which is sensitive to electrons.
- FIG. 1 shows an exemplary embodiment in the y-z section
- FIG. 2 shows the exemplary embodiment in the x-z section in an appropriately modified scale
- FIG. 3 shows another exemplary embodiment in the x-z section.
- an anamorphic plano-convex lens 2 Located in a plane 1 is an anamorphic plano-convex lens 2 with focal points F y and ⁇ F y .
- the source image is located at 4 , a virtual magnified imagery of the source image resulting at 5 .
- the optical fiber is composed of an optically active core 6 and a cladding 7 .
- a spherical lens 9 which creates in core 6 a real image of virtual imagery 5 .
- FIG. 2 shows the same exemplary embodiment in the x-z section.
- a lens having a long focal length in the x-z section or a Fresnel lens (in the case of the exemplary embodiment according to FIG. 3), by which the light of small aperture a 0 is focused onto lens 9 .
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Laser Surgery Devices (AREA)
- Eyeglasses (AREA)
- Lasers (AREA)
Abstract
In a device for the optical coupling of a solid-state laser to an optical fiber, an anamorphic lens system being arranged between the output face of the solid-state laser and the input face of the optical fiber and converting differing apertures in the main sections of the solid-state laser into essentially identical apertures at the input face of the optical fiber, the lens system is composed of one anamorphic lens applied on the output face and a further lens applied on the input face. The invention also includes a method for producing the device.
Description
- The invention relates to a device for the optical coupling of a solid-state laser to an optical fiber, an anamorphic lens system being arranged between the output face of the solid-state laser and the input face of the optical fiber and converting differing apertures in the main sections of the solid-state laser into essentially identical apertures at the input face of the optical fiber, and to a method for its manufacture.
- For efficient coupling of laser light into optical fibers, particularly into single-mode optical fibers, it is necessary to achieve minimum-loss coupling of the optical fiber to the laser. This can be effected by lenses applied to the fiber end. In the case of solid-state lasers, it is also desirable to minimize to the greatest extent possible the loss of light caused by coupling the laser to the fiber. For this purpose, it has become known, for instance, from R. Zengerle, H. J. Brückner, H. W. P. Koops, H.-J. Olzhausen, G. Zesch, A. Kohl and A. Menschig in “ Fabrication of Optical Beamwidth Transformers for Guided Waves on InP Using Wedge-Shaped Tapers”, J. Vac. Sci. Technol. B9(6), (1991) 3459, to use lithography to define and integrate a made-to-order coupling taper on the laser directly in the laser material. Such tapers, however, are only able to adapt the wave field to the phase in one section. Owing to the epitactic growth and the plane lithography used for the structuring, no adaptation is possible in the other section lying normal to the waveguide.
- In addition, a device as set forth by the species defined in the Main Claim is known from U. Griebner, R. Grunwald, H. Schönnagel, OSA Proceedings on Advanced Solid-State Lasers, 1995, Vol. 24, 253, which, however, requires considerable expenditure for adjustments. Devices having in each case several lenses to be adjusted and fixed in position are also known from U.S. Pat. No. 5,140,608,
GB 2 220 501 A, DE 39 19 484 A, EP 0 484 276 A, NL 8600844 A and EP 0 706 070 A. - The object of the present invention is to propose a device for coupling a solid-state laser to an optical fiber, which permits substantially no-loss coupling and an adaptation of the wave fields in the direction of both main sections, and which can be manufactured with the necessary accuracy.
- This objective is achieved according to the invention, in that the lens system is composed of one anamorphic lens mounted on the output face and a further lens mounted on the input face.
- The device of the present invention has the advantage that in each case, the lenses can be applied on the output face and input face, respectively, with very high accuracy. An adjustment is then only necessary between the laser axis and the axis of the optical fiber. Both the anamorphic lens and the further lens can be advantageously manufactured using well-known processes.
- It may be that an anamorphic lens on the input face is not ruled out in the device of the present invention, however, the further lens is preferably spherical. Moreover, the invention permits two designs, namely that the anamorphic lens mounted on the output face of the laser is an aspherical lens, which can be a Fresnel lens, or is formed of two crossed, cylindrical partial lenses, at least one of the component lenses being designed as a Fresnel lens.
- The advantageous specific embodiment of the device according to the invention can further be designed in such a way that a spacer layer, corresponding to the magnification necessary in the direction of the larger aperture, is provided between the anamorphic lens and the output face.
- Besides a real imaging of the output pupil of the laser, the device of the present invention makes it possible for the output pupils of the laser to form a virtual circular source image. Because of this, it is possible to select a small distance between the lenses or between the output and input faces, accompanied by relatively great focal lengths of the lenses. The great focal lengths of the lenses, in turn, are more favorable for production using microtechnique methods.
- Various well-known methods are suitable in principle, such as the definition of the cylinder lenses on the input face of the optical fiber with the aid of high-resolution electron-beam lithography and subsequent fabrication by reactive dry etching. Such a method is described, for instance, in “ High Resolution Electron Beam Lithography for Fabricating Visible Semiconductor Lasers with Curved Mirrors and Integrated Holograms” by P. Unger, V. Boegli, P. Buchmann and R. Germann, Microelectronic Eng. 23, (1994) 461 and in “Fabrication of curved mirrors for visible semiconductor lasers using electron-beam lithography and chemical assisted ion-beam etching” by P. Unger, V. Boegli, P. Buchmann and R. Germann, J. Vac. Sci. Technol., B. 11(6) (1993) 2514-2518. Machining from resist lenses applied on the input or output face is also possible.
- Particularly advantageous methods for producing the device of the present invention are specified in further subclaims. These methods represent substantial improvements, especially if they are supported by computer programming. It is also possible to produce the individual elements using different methods.
- The dry-resist technique, described, for example, in the German Patent 195 31 859.5 Al, makes available a method in which, using vapor deposition in high vacuum, the laser or the fiber end is covered with a defined layer thickness of a polymer which is sensitive to electrons. This polymer is cross-linked by the electron beam during the exposure to form a polymer which is rich in silicon oxide and whose refractive index is well-matched to that of the fiber material (n=1.48), see H. W. P. Koops, S. Babin, M. Weber, G. Dahm, A. Holopkin, M. Lyakhov, “Evaluation of Dry Resist Viny-T8 and Its Application to Optical Microlenses”, Microelectronic Engineering 30 (1996), 539. A mirror composed of silicon oxide is applied by vapor deposition to the laser end, the refractive index of the lens material likewise being well-matched to that of the mirror. Thus, the insertion loss of these lenses manufactured from dry resist can theoretically be disregarded. constructing the lenses which is superior, for example, to laser ablation. These procedures can be easily automated for productive use.
- Exemplary embodiments of the invention are shown schematically in the Drawing with the aid of several Figures, and are explained more precisely in the following description.
- FIG. 1 shows an exemplary embodiment in the y-z section;
- FIG. 2 shows the exemplary embodiment in the x-z section in an appropriately modified scale; and
- FIG. 3 shows another exemplary embodiment in the x-z section.
- Located in a plane 1 is an anamorphic plano-
convex lens 2 with focal points Fy and −Fy. The light output face of a solid-state laser, which is otherwise now shown, lies in plane 3. The source image is located at 4, a virtual magnified imagery of the source image resulting at 5. - Since in the y-z section (FIG. 1), the light emerging from output face 3 is virtually unfocussed, a large aperture is necessary to collect as large a portion of the total luminous flux as possible which, in the exemplary embodiment shown, is achieved by arranging a lens which is not too large as close as possible to output face 3—namely, as close as possible for a virtual imagery.
- The optical fiber, only partially indicated, is composed of an optically
active core 6 and acladding 7. Applied onlight input face 8 is aspherical lens 9 which creates in core 6 a real image of virtual imagery 5. - For the sake of clarity, the schematic representation is not true to scale. The following dimensions are given as examples:
- The focal length of the lens, and simultaneously the approximate thickness of a spacer layer between
lens 2 and plane 3, is f=1.43 μm, with a refractive index ofanamorphic lens 2 of n=2.75 and a radius of R=3.9 μm. The width of the output face is d0=0.3 μm, while the diameter ofcore 6 is d1=10 μm. The apertures are a0=45° and a1=10°, the magnification is V=14=B/g=20/f. - FIG. 2 shows the same exemplary embodiment in the x-z section. Mounted here on the output face of the laser is a lens having a long focal length in the x-z section or a Fresnel lens (in the case of the exemplary embodiment according to FIG. 3), by which the light of small aperture a 0 is focused onto
lens 9.
Claims (10)
1. A device for the optical coupling of a solid-state laser to an optical fiber, an anamorphic lens system being arranged between the output face of the solid-state laser and the input face of the optical fiber and converting differing apertures in the main sections of the solid-state laser into essentially identical apertures at the input face of the optical fiber, characterized in that the lens system is composed of one anamorphic lens (2) mounted on the output face (3) and a further lens (9) mounted on the input face (8).
2. The device as recited in claim 1 , characterized in that the further lens (9) is spherical.
3. The device as recited in one of claims 1 or 2, characterized in that the anamorphic lens is an aspherical lens (2).
4. The device as recited in claim 3 , characterized in that the anamorphic lens is designed as a Fresnel lens (21).
5. The device as recited in one of claims 1 or 2, characterized in that the anamorphic lens is formed from two crossed, cylindrical partial lenses, and that at least one of the component lenses is designed as a Fresnel lens.
6. The device as recited in one of claims 1 through 5, characterized in that provision is made between the anamorphic lens (2) and the output face (3) for a spacer layer corresponding to the magnification necessary in the direction of the larger aperture.
7. A method for producing the device as recited in one of the preceding claims, characterized in that at least the lenses are produced with the aid of a dry-resist technique.
8. The method as recited in claim 7 , characterized in that, in addition, spacer layers and antireflection layers are produced with the aid of the dry-resist technique.
9. A method for producing the device as recited in one of the preceding claims, characterized in that at least the lenses are produced with the aid of additive lithography, in particular, electron-beam lithography.
10. The method as recited in claim 9 , characterized in that, in addition, spacer layers and antireflection layers are produced with the aid of the additive lithography.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19650696 | 1996-12-06 | ||
| DE19650696.4 | 1996-12-06 | ||
| DE19650696A DE19650696A1 (en) | 1996-12-06 | 1996-12-06 | Device for optically coupling a solid-state laser with an optical waveguide and method for its production |
| PCT/EP1997/006566 WO1998025170A1 (en) | 1996-12-06 | 1997-11-25 | Device for optical coupling of a solid-state laser with an optical wave guide and a process for their production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20020009259A1 true US20020009259A1 (en) | 2002-01-24 |
| US6370298B2 US6370298B2 (en) | 2002-04-09 |
Family
ID=7813865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US09/319,510 Expired - Lifetime US6370298B2 (en) | 1996-12-06 | 1997-11-25 | Device for optical coupling of a solid-state laser with an optical wave guide and a process for their production |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US6370298B2 (en) |
| EP (1) | EP0943111B1 (en) |
| JP (1) | JP2001504950A (en) |
| CN (1) | CN1144073C (en) |
| AT (1) | ATE206528T1 (en) |
| CA (1) | CA2273930C (en) |
| DE (2) | DE19650696A1 (en) |
| ES (1) | ES2165633T3 (en) |
| NO (1) | NO319919B1 (en) |
| WO (1) | WO1998025170A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060056762A1 (en) * | 2003-07-02 | 2006-03-16 | Honeywell International Inc. | Lens optical coupler |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002091048A1 (en) * | 2001-04-20 | 2002-11-14 | Huawei Technologies Co., Ltd. | Pumping light source connecting device of er-doped cascade fiber amplifier |
| US7324723B2 (en) * | 2003-10-06 | 2008-01-29 | Mitsui Chemicals, Inc. | Optical waveguide having specular surface formed by laser beam machining |
| JP4488287B2 (en) * | 2003-11-21 | 2010-06-23 | フジノン株式会社 | Beam focusing lens |
| US7520062B2 (en) * | 2005-12-06 | 2009-04-21 | Robert Bosch Tool Corporation | Light-plane projecting apparatus and lens |
| GB201011058D0 (en) | 2010-07-01 | 2010-08-18 | Oclaro Technology Plc | Fibre optical coupling |
| JP2012168240A (en) * | 2011-02-10 | 2012-09-06 | Sumitomo Electric Device Innovations Inc | Optical module |
| TW201516533A (en) * | 2013-10-21 | 2015-05-01 | Hon Hai Prec Ind Co Ltd | Backlight module |
| WO2020021916A1 (en) * | 2018-07-24 | 2020-01-30 | 株式会社ニコン | Ocular optical system and head mounted display |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616889A (en) | 1984-06-21 | 1986-01-13 | Matsushita Electric Ind Co Ltd | Semiconductor light-emitting element and manufacture thereof |
| NL8600844A (en) | 1986-04-02 | 1987-11-02 | Tno | Coupling junction between optical fibre and strip conductor - connects tapered fibre end via cylindrical micro-lens |
| JPS63100790A (en) | 1986-10-17 | 1988-05-02 | Nec Corp | Semiconductor laser module |
| GB2220501A (en) | 1988-07-06 | 1990-01-10 | Plessey Co Plc | Coupling waveguides using transverse cylindrical lenses |
| DE3919484A1 (en) | 1989-04-15 | 1990-10-18 | Rodenstock Optik G | Optical system for altering form of laser beam cross section - has follow-on lenses with offset axial angles and max. focus of 300 mm |
| US5081639A (en) * | 1990-10-01 | 1992-01-14 | The United States Of America As Represented By The United States Department Of Energy | Laser diode assembly including a cylindrical lens |
| CH682698A5 (en) | 1990-11-01 | 1993-10-29 | Fisba Optik Ag Bystronic Laser | Method in which several, arranged in one or more rows of radiation sources are imaged and apparatus therefor. |
| US5181224A (en) * | 1991-05-10 | 1993-01-19 | University Of California | Microoptic lenses |
| US5140608A (en) | 1991-05-29 | 1992-08-18 | Optrotech Ltd, Israel Company | Optical system for focusing a light beam on to an image plane |
| US5455879A (en) * | 1994-06-22 | 1995-10-03 | Corning Incorporated | Anamorphic microlens for coupling optical fibers to elliptical light beams |
| EP0706070A3 (en) | 1994-10-04 | 1997-04-02 | Siemens Ag | Process for dry-etching a semiconductor substrate |
| US5790576A (en) * | 1996-06-26 | 1998-08-04 | Sdl, Inc. | High brightness laser diode source |
| US5946140A (en) * | 1998-03-06 | 1999-08-31 | Lucent Technologies Inc. | Fiber lens for use with a confocal lens system |
| US6026206A (en) * | 1998-03-06 | 2000-02-15 | Lucent Technologies, Inc. | Optical coupler using anamorphic microlens |
-
1996
- 1996-12-06 DE DE19650696A patent/DE19650696A1/en not_active Withdrawn
-
1997
- 1997-11-25 WO PCT/EP1997/006566 patent/WO1998025170A1/en active IP Right Grant
- 1997-11-25 CA CA002273930A patent/CA2273930C/en not_active Expired - Lifetime
- 1997-11-25 ES ES97951967T patent/ES2165633T3/en not_active Expired - Lifetime
- 1997-11-25 EP EP97951967A patent/EP0943111B1/en not_active Expired - Lifetime
- 1997-11-25 DE DE59704815T patent/DE59704815D1/en not_active Expired - Lifetime
- 1997-11-25 AT AT97951967T patent/ATE206528T1/en active
- 1997-11-25 CN CNB971803935A patent/CN1144073C/en not_active Expired - Lifetime
- 1997-11-25 US US09/319,510 patent/US6370298B2/en not_active Expired - Lifetime
- 1997-11-25 JP JP52514398A patent/JP2001504950A/en not_active Ceased
-
1999
- 1999-06-03 NO NO19992696A patent/NO319919B1/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060056762A1 (en) * | 2003-07-02 | 2006-03-16 | Honeywell International Inc. | Lens optical coupler |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2273930A1 (en) | 1998-06-11 |
| JP2001504950A (en) | 2001-04-10 |
| ES2165633T3 (en) | 2002-03-16 |
| US6370298B2 (en) | 2002-04-09 |
| NO992696L (en) | 1999-07-27 |
| NO319919B1 (en) | 2005-10-03 |
| ATE206528T1 (en) | 2001-10-15 |
| NO992696D0 (en) | 1999-06-03 |
| CN1240031A (en) | 1999-12-29 |
| CN1144073C (en) | 2004-03-31 |
| EP0943111B1 (en) | 2001-10-04 |
| DE59704815D1 (en) | 2001-11-08 |
| WO1998025170A1 (en) | 1998-06-11 |
| EP0943111A1 (en) | 1999-09-22 |
| DE19650696A1 (en) | 1998-06-10 |
| CA2273930C (en) | 2007-01-16 |
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