NL8801638A - Werkwijze voor het aan elkaar bevestigen van twee lichamen. - Google Patents
Werkwijze voor het aan elkaar bevestigen van twee lichamen. Download PDFInfo
- Publication number
- NL8801638A NL8801638A NL8801638A NL8801638A NL8801638A NL 8801638 A NL8801638 A NL 8801638A NL 8801638 A NL8801638 A NL 8801638A NL 8801638 A NL8801638 A NL 8801638A NL 8801638 A NL8801638 A NL 8801638A
- Authority
- NL
- Netherlands
- Prior art keywords
- metal
- layers
- metals
- bodies
- polishing
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 238000005498 polishing Methods 0.000 claims description 12
- 150000002739 metals Chemical class 0.000 claims description 9
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 229910052723 transition metal Inorganic materials 0.000 claims description 5
- 150000003624 transition metals Chemical class 0.000 claims description 5
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- 150000002910 rare earth metals Chemical class 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 22
- 239000000758 substrate Substances 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000012790 adhesive layer Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 238000009864 tensile test Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- 241000239290 Araneae Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000011149 sulphuric acid Nutrition 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
- C03C27/08—Joining glass to glass by processes other than fusing with the aid of intervening metal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Metallurgy (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Laminated Bodies (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8801638A NL8801638A (nl) | 1988-06-28 | 1988-06-28 | Werkwijze voor het aan elkaar bevestigen van twee lichamen. |
| US07/368,442 US4948029A (en) | 1988-06-28 | 1989-06-19 | Method of bonding two bodies |
| DE89201644T DE68906089T2 (de) | 1988-06-28 | 1989-06-22 | Verfahren zum aneinander Befestigen zweier Körper. |
| EP89201644A EP0349065B1 (de) | 1988-06-28 | 1989-06-22 | Verfahren zum aneinander Befestigen zweier Körper |
| JP1162814A JP2573359B2 (ja) | 1988-06-28 | 1989-06-27 | ２つの物体の結合方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8801638 | 1988-06-28 | ||
| NL8801638A NL8801638A (nl) | 1988-06-28 | 1988-06-28 | Werkwijze voor het aan elkaar bevestigen van twee lichamen. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL8801638A true NL8801638A (nl) | 1990-01-16 |
Family
ID=19852537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL8801638A NL8801638A (nl) | 1988-06-28 | 1988-06-28 | Werkwijze voor het aan elkaar bevestigen van twee lichamen. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4948029A (de) |
| EP (1) | EP0349065B1 (de) |
| JP (1) | JP2573359B2 (de) |
| DE (1) | DE68906089T2 (de) |
| NL (1) | NL8801638A (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL9200515A (nl) * | 1992-03-20 | 1993-10-18 | Philips Nv | Elektrische machine, werkwijze voor het aan elkaar bevestigen van een zacht-magnetisch lichaam en een hard-magnetisch lichaam en werkwijze voor het aan elkaar bevestigen van twee hard-magnetische lichamen. |
| US5735446A (en) * | 1995-07-05 | 1998-04-07 | Ford Global Technologies, Inc. | Friction welding non-metallics to metallics |
| US5879206A (en) * | 1997-11-05 | 1999-03-09 | Ford Global Technologies, Inc. | Terminal connector capable of attachment to a metallic surface |
| US6019272A (en) * | 1997-11-12 | 2000-02-01 | Ford Global Technologies, Inc. | Method for attaching a terminal connector to a metallic surface |
| US6036081A (en) * | 1997-12-24 | 2000-03-14 | Wyman Gordon | Fabrication of metallic articles using precursor sheets |
| US20080308610A1 (en) * | 2007-06-15 | 2008-12-18 | United Technologies Corporation | Hollow structures formed with friction stir welding |
| SG186759A1 (en) * | 2012-01-23 | 2013-02-28 | Ev Group E Thallner Gmbh | Method and device for permanent bonding of wafers, as well as cutting tool |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2246506A1 (en) * | 1973-10-09 | 1975-05-02 | Podvigalkina Galina | Joining of silicate glass lenses - by formation of silicate film on lens surface(s) then sintering together by IR radiation |
| DE2742922C2 (de) * | 1977-09-23 | 1984-03-08 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum mittelbaren Verbinden zweier Teile |
| DE2742921C2 (de) * | 1977-09-23 | 1985-07-11 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum mittelbaren Verbinden zweier Teile durch Verschweißung zweier Metallauflagen |
| US4452389A (en) * | 1982-04-05 | 1984-06-05 | The Bendix Corporation | Method for welding with the help of ion implantation |
| US4564396A (en) * | 1983-01-31 | 1986-01-14 | California Institute Of Technology | Formation of amorphous materials |
| NL8303109A (nl) * | 1983-09-08 | 1985-04-01 | Philips Nv | Werkwijze voor het aan elkaar bevestigen van twee delen. |
| US4568014A (en) * | 1983-09-29 | 1986-02-04 | The United States Of America As Represented By The Secretary Of Interior | Bonding of metallic glass to crystalline metal |
| US4640816A (en) * | 1984-08-31 | 1987-02-03 | California Institute Of Technology | Metastable alloy materials produced by solid state reaction of compacted, mechanically deformed mixtures |
| JPS649465A (en) * | 1987-07-02 | 1989-01-12 | Ricoh Kk | Triboelectrifying member |
-
1988
- 1988-06-28 NL NL8801638A patent/NL8801638A/nl not_active Application Discontinuation
-
1989
- 1989-06-19 US US07/368,442 patent/US4948029A/en not_active Expired - Fee Related
- 1989-06-22 EP EP89201644A patent/EP0349065B1/de not_active Expired - Lifetime
- 1989-06-22 DE DE89201644T patent/DE68906089T2/de not_active Expired - Fee Related
- 1989-06-27 JP JP1162814A patent/JP2573359B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE68906089D1 (de) | 1993-05-27 |
| JPH0252181A (ja) | 1990-02-21 |
| US4948029A (en) | 1990-08-14 |
| DE68906089T2 (de) | 1993-10-21 |
| EP0349065B1 (de) | 1993-04-21 |
| JP2573359B2 (ja) | 1997-01-22 |
| EP0349065A1 (de) | 1990-01-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Suga | Room-temperature bonding on metals and ceramics | |
| EP0786801B1 (de) | Verfahren zum Transportieren einer dünnen Schicht von einem Anfangssubstrat auf ein Endsubstrat | |
| US5427638A (en) | Low temperature reaction bonding | |
| US6034405A (en) | Bonding of aluminum oxide components to silicons substrates | |
| US4257156A (en) | Method for thermo-compression diffusion bonding each side of a substrateless semiconductor device wafer to respective structured copper strain buffers | |
| US4247034A (en) | Method of indirectly connecting two parts | |
| NL8801638A (nl) | Werkwijze voor het aan elkaar bevestigen van twee lichamen. | |
| JP2003523627A (ja) | 低温結合方法および結合構成物 | |
| US20060258054A1 (en) | Method for producing free-standing carbon nanotube thermal pads | |
| FR2725074A1 (fr) | Procede de fabrication d'une structure comportant une couche mince semi-conductrice sur un substrat | |
| JPH0828317B2 (ja) | 直接基板結合方法 | |
| JP2002531944A (ja) | 二つの異なった半導体ウエハを接合する方法 | |
| US20070036496A1 (en) | Bonding methods and optical assemblies | |
| JPH025541A (ja) | ボンディングツールの製造方法 | |
| JPS59113177A (ja) | 基体に金属層を設ける方法 | |
| US4096983A (en) | Bonding copper leads to gold film coatings on alumina ceramic substrate | |
| JPS60235773A (ja) | セラミツクス体の結合方法 | |
| US5407506A (en) | Reaction bonding through activation by ion bombardment | |
| JP3124508B2 (ja) | 窒化物表面の改質方法及びその方法により表面改質された窒化物 | |
| US5046656A (en) | Vacuum die attach for integrated circuits | |
| JPH0788963A (ja) | 第１物体の第２物体への結合方法 | |
| JPH0699317A (ja) | 接合方法 | |
| US6119921A (en) | Bonding of aluminum oxide components to silicon substrates | |
| JP2738063B2 (ja) | 接合シリコン基板の製造方法 | |
| JPH0413101A (ja) | シンクロトロン放射光用反射ミラー |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A1B | A search report has been drawn up | ||
| BV | The patent application has lapsed |