NL8100449A - Elektronenmikroskoop met roentgendetektor. - Google Patents

Elektronenmikroskoop met roentgendetektor. Download PDF

Info

Publication number
NL8100449A
NL8100449A NL8100449A NL8100449A NL8100449A NL 8100449 A NL8100449 A NL 8100449A NL 8100449 A NL8100449 A NL 8100449A NL 8100449 A NL8100449 A NL 8100449A NL 8100449 A NL8100449 A NL 8100449A
Authority
NL
Netherlands
Prior art keywords
electron microscope
detector
screen
lens
electron
Prior art date
Application number
NL8100449A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL8100449A priority Critical patent/NL8100449A/nl
Priority to US06/314,936 priority patent/US4450355A/en
Priority to DE19823201889 priority patent/DE3201889A1/de
Priority to GB8201997A priority patent/GB2092367B/en
Priority to FR8201075A priority patent/FR2499313A1/fr
Priority to CA000395054A priority patent/CA1190329A/en
Priority to JP57010273A priority patent/JPS57143252A/ja
Publication of NL8100449A publication Critical patent/NL8100449A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H01J2237/24415—X-ray
    • H01J2237/2442—Energy-dispersive (Si-Li type) spectrometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL8100449A 1981-01-30 1981-01-30 Elektronenmikroskoop met roentgendetektor. NL8100449A (nl)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NL8100449A NL8100449A (nl) 1981-01-30 1981-01-30 Elektronenmikroskoop met roentgendetektor.
US06/314,936 US4450355A (en) 1981-01-30 1981-10-26 Electron microscope comprising an X-ray detector
DE19823201889 DE3201889A1 (de) 1981-01-30 1982-01-22 Elektronenmikroskop mit roentgendetektor
GB8201997A GB2092367B (en) 1981-01-30 1982-01-25 Electron microscope including a radiation detector
FR8201075A FR2499313A1 (fr) 1981-01-30 1982-01-25 Microscope electronique comportant un detecteur de rayons x
CA000395054A CA1190329A (en) 1981-01-30 1982-01-27 Electron microscope comprising an x-ray detector
JP57010273A JPS57143252A (en) 1981-01-30 1982-01-27 Electron microscope

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8100449A NL8100449A (nl) 1981-01-30 1981-01-30 Elektronenmikroskoop met roentgendetektor.
NL8100449 1981-01-30

Publications (1)

Publication Number Publication Date
NL8100449A true NL8100449A (nl) 1982-08-16

Family

ID=19836946

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8100449A NL8100449A (nl) 1981-01-30 1981-01-30 Elektronenmikroskoop met roentgendetektor.

Country Status (7)

Country Link
US (1) US4450355A (cs)
JP (1) JPS57143252A (cs)
CA (1) CA1190329A (cs)
DE (1) DE3201889A1 (cs)
FR (1) FR2499313A1 (cs)
GB (1) GB2092367B (cs)
NL (1) NL8100449A (cs)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3442207A1 (de) * 1984-11-19 1986-05-28 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahl-istpositionsgeber
JPS6417366A (en) * 1987-07-01 1989-01-20 Rinku Anariteikaru Ltd Electron beam and x-ray detector
AT392857B (de) * 1987-07-13 1991-06-25 Ims Ionen Mikrofab Syst Vorrichtung und verfahren zur inspektion einer maske
JPH02231708A (ja) * 1989-03-06 1990-09-13 Fujitsu Ltd 半導体装置の位置合わせマーク検出方法及び装置
US5079428A (en) * 1989-08-31 1992-01-07 Bell Communications Research, Inc. Electron microscope with an asymmetrical immersion lens
US4962306A (en) * 1989-12-04 1990-10-09 Intenational Business Machines Corporation Magnetically filtered low loss scanning electron microscopy
JPH07294460A (ja) * 1994-04-28 1995-11-10 Hitachi Ltd Ｘ線分析方法および装置
US5569925A (en) * 1994-06-23 1996-10-29 Philips Electronics North America Corporation Mechanical shutter for protecting an x-ray detector against high-energy electron or x-ray damage
DE102009046211B4 (de) * 2009-10-30 2017-08-24 Carl Zeiss Microscopy Gmbh Detektionsvorrichtung und Teilchenstrahlgerät mit Detektionsvorrichtung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1066583A (en) * 1963-05-01 1967-04-26 Ass Elect Ind Improvements relating to electronic bombardment apparatus
US3359418A (en) * 1964-12-11 1967-12-19 Gunter F Bahr Electromagnetic actuating means for a shutter mechanism in an electron microscope
GB1183571A (en) * 1966-03-28 1970-03-11 Ass Elect Ind Improvements relating to X-Ray Apparatus
NL154050B (nl) * 1966-08-13 1977-07-15 Philips Nv Elektronenmicroscoop.
GB1295084A (cs) * 1969-06-17 1972-11-01
FR2203509A5 (cs) * 1972-10-16 1974-05-10 Anvar
GB1420803A (en) * 1973-06-28 1976-01-14 Ass Elect Ind Electron microscopes
NL7904044A (nl) * 1978-05-31 1979-12-04 Unilever Nv Werkwijze ter bereiding van homogene, vloeibare compo- sities.
JPS56153656A (en) * 1980-04-28 1981-11-27 Hitachi Ltd Electron microscope equipped with x-ray analyzing device
JPS6111885Y2 (cs) * 1980-10-08 1986-04-14

Also Published As

Publication number Publication date
US4450355A (en) 1984-05-22
FR2499313A1 (fr) 1982-08-06
CA1190329A (en) 1985-07-09
GB2092367A (en) 1982-08-11
DE3201889A1 (de) 1982-08-26
JPS57143252A (en) 1982-09-04
GB2092367B (en) 1985-01-23
DE3201889C2 (cs) 1990-10-25
FR2499313B1 (cs) 1985-03-08
JPH0465490B2 (cs) 1992-10-20

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Legal Events

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A1B A search report has been drawn up
BV The patent application has lapsed