GB1066583A - Improvements relating to electronic bombardment apparatus - Google Patents
Improvements relating to electronic bombardment apparatusInfo
- Publication number
- GB1066583A GB1066583A GB1723163A GB1723163A GB1066583A GB 1066583 A GB1066583 A GB 1066583A GB 1723163 A GB1723163 A GB 1723163A GB 1723163 A GB1723163 A GB 1723163A GB 1066583 A GB1066583 A GB 1066583A
- Authority
- GB
- United Kingdom
- Prior art keywords
- specimen
- shield
- grid
- analysed
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052790 beryllium Inorganic materials 0.000 abstract 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
1,066,583. Electron beam apparatus. ASSOCIATED ELECTRICAL INDUSTRIES Ltd. April 21, 1964 [May 1, 1963], No. 17231/63. Heading H1D. In apparatus wherein a specimen is bombarded with an electron beam and the result analysed, secondary electrons scattered from the specimen S are trapped by a shield comprising thin plates extending from positions near the point of impact of the main beam on the specimen, in directions which are at a small angle with the trajectories of the secondary electrons. As shown, the shield may comprise concentric sheet metal cones or pyramids, or a spiral conical metal sheet, and is closed at its rear end by which it is insulatingly secured to beam focusing lens L2. The shield may be coated with beryllium or carbon to ensure low secondary emission. A grid G, similarly coated, and suitably biased, may be provided between the specimen and shield to remove low energy electrons. The specimen may be analysed by means of an X-ray detector, or by measuring the fraction of incident current accepted by the specimen. The specimen is mounted for rotary and transverse movement, and if its surface is inclined to the beam axis, the grid and shield may be asymmetric, Fig. 6 (not shown).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1723163A GB1066583A (en) | 1963-05-01 | 1963-05-01 | Improvements relating to electronic bombardment apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1723163A GB1066583A (en) | 1963-05-01 | 1963-05-01 | Improvements relating to electronic bombardment apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1066583A true GB1066583A (en) | 1967-04-26 |
Family
ID=10091547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1723163A Expired GB1066583A (en) | 1963-05-01 | 1963-05-01 | Improvements relating to electronic bombardment apparatus |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1066583A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2309972A1 (en) * | 1975-05-02 | 1976-11-26 | Leybold Heraeus Gmbh & Co Kg | ELECTRON CANNON WITH DEVIATION SYSTEM, INTENDED TO BE USED FOR HEATING, MELTING AND EVAPORATION PURPOSES |
FR2499313A1 (en) * | 1981-01-30 | 1982-08-06 | Philips Nv | ELECTRONIC MICROSCOPE HAVING AN X-RAY DETECTOR |
FR2520553A1 (en) * | 1982-01-22 | 1983-07-29 | Cameca | ELECTRONIC OPTICAL APPARATUS COMPRISING PYROLYTIC GRAPHITE ELEMENTS |
-
1963
- 1963-05-01 GB GB1723163A patent/GB1066583A/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2309972A1 (en) * | 1975-05-02 | 1976-11-26 | Leybold Heraeus Gmbh & Co Kg | ELECTRON CANNON WITH DEVIATION SYSTEM, INTENDED TO BE USED FOR HEATING, MELTING AND EVAPORATION PURPOSES |
FR2499313A1 (en) * | 1981-01-30 | 1982-08-06 | Philips Nv | ELECTRONIC MICROSCOPE HAVING AN X-RAY DETECTOR |
FR2520553A1 (en) * | 1982-01-22 | 1983-07-29 | Cameca | ELECTRONIC OPTICAL APPARATUS COMPRISING PYROLYTIC GRAPHITE ELEMENTS |
EP0086120A1 (en) * | 1982-01-22 | 1983-08-17 | Cameca | Electron-optical apparatus comprising pyrolytic graphite elements |
US4508967A (en) * | 1982-01-22 | 1985-04-02 | Cameca | Electronic optical apparatus comprising pyrolytic graphite elements |
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