NL7906958A - Metaaldraadkathode voor elektronenstraalapparaat. - Google Patents

Metaaldraadkathode voor elektronenstraalapparaat. Download PDF

Info

Publication number
NL7906958A
NL7906958A NL7906958A NL7906958A NL7906958A NL 7906958 A NL7906958 A NL 7906958A NL 7906958 A NL7906958 A NL 7906958A NL 7906958 A NL7906958 A NL 7906958A NL 7906958 A NL7906958 A NL 7906958A
Authority
NL
Netherlands
Prior art keywords
wire
electron beam
metal wire
electron
beam device
Prior art date
Application number
NL7906958A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7906958A priority Critical patent/NL7906958A/nl
Priority to DE3034598A priority patent/DE3034598C2/de
Priority to GB8029777A priority patent/GB2059149B/en
Priority to FR8019846A priority patent/FR2466096A1/fr
Priority to IT24696/80A priority patent/IT1141056B/it
Priority to SE8006463A priority patent/SE437585B/sv
Priority to CA000360401A priority patent/CA1151320A/en
Priority to US06/217,885 priority patent/US4419561A/en
Priority to BR8008838A priority patent/BR8008838A/pt
Priority to PCT/NL1980/000030 priority patent/WO1981000929A1/en
Priority to JP13054780A priority patent/JPS5652856A/ja
Publication of NL7906958A publication Critical patent/NL7906958A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Lasers (AREA)
NL7906958A 1979-09-19 1979-09-19 Metaaldraadkathode voor elektronenstraalapparaat. NL7906958A (nl)

Priority Applications (11)

Application Number Priority Date Filing Date Title
NL7906958A NL7906958A (nl) 1979-09-19 1979-09-19 Metaaldraadkathode voor elektronenstraalapparaat.
DE3034598A DE3034598C2 (de) 1979-09-19 1980-09-13 Elektronenstrahlgerät
GB8029777A GB2059149B (en) 1979-09-19 1980-09-15 Electron beam apparatus with longitudinally displaceable metal wire cathode
FR8019846A FR2466096A1 (fr) 1979-09-19 1980-09-15 Source d'electrons avec un fil profile
IT24696/80A IT1141056B (it) 1979-09-19 1980-09-16 Catodo metallico filiforme per un apparato a fascio elettronico
SE8006463A SE437585B (sv) 1979-09-19 1980-09-16 Elektronstraleapparat med en elektronkella som innefattar en katod med en metalltrad
CA000360401A CA1151320A (en) 1979-09-19 1980-09-17 Metal wire cathode for electron beam apparatus
US06/217,885 US4419561A (en) 1979-09-19 1980-09-18 Metal wire cathode for electron beam apparatus
BR8008838A BR8008838A (pt) 1979-09-19 1980-09-18 Catodo de fio metalico para aparelho de feixe de eletrons
PCT/NL1980/000030 WO1981000929A1 (en) 1979-09-19 1980-09-18 Electron beam apparatus and electron beam source therefor
JP13054780A JPS5652856A (en) 1979-09-19 1980-09-19 Electron beam unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL7906958A NL7906958A (nl) 1979-09-19 1979-09-19 Metaaldraadkathode voor elektronenstraalapparaat.
NL7906958 1979-09-19

Publications (1)

Publication Number Publication Date
NL7906958A true NL7906958A (nl) 1981-03-23

Family

ID=19833868

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7906958A NL7906958A (nl) 1979-09-19 1979-09-19 Metaaldraadkathode voor elektronenstraalapparaat.

Country Status (11)

Country Link
US (1) US4419561A (it)
JP (1) JPS5652856A (it)
BR (1) BR8008838A (it)
CA (1) CA1151320A (it)
DE (1) DE3034598C2 (it)
FR (1) FR2466096A1 (it)
GB (1) GB2059149B (it)
IT (1) IT1141056B (it)
NL (1) NL7906958A (it)
SE (1) SE437585B (it)
WO (1) WO1981000929A1 (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8302275A (nl) * 1983-06-28 1985-01-16 Philips Nv Electronenstraalapparaat met metaaldraadbron.
CN86105432A (zh) * 1985-09-27 1987-05-27 美国电话电报公司 带电粒子束曝光

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL74193C (it) * 1948-05-10
US3466487A (en) * 1967-06-16 1969-09-09 United Aircraft Corp Device for moving a beam of charged particles
NL7018701A (it) * 1970-12-23 1972-06-27
JPS4929969A (it) * 1972-07-20 1974-03-16
JPS5357760A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Electron beam exposure apparatus
JPS5412675A (en) * 1977-06-30 1979-01-30 Jeol Ltd Electon beam exposure method

Also Published As

Publication number Publication date
FR2466096A1 (fr) 1981-03-27
FR2466096B1 (it) 1984-12-14
US4419561A (en) 1983-12-06
IT8024696A0 (it) 1980-09-16
WO1981000929A1 (en) 1981-04-02
IT1141056B (it) 1986-10-01
DE3034598C2 (de) 1985-05-15
JPS6329782B2 (it) 1988-06-15
GB2059149B (en) 1984-01-18
SE8006463L (sv) 1981-03-20
DE3034598A1 (de) 1981-04-09
GB2059149A (en) 1981-04-15
JPS5652856A (en) 1981-05-12
BR8008838A (pt) 1981-06-30
CA1151320A (en) 1983-08-02
SE437585B (sv) 1985-03-04

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
BI The patent application has been withdrawn