JPS5652856A - Electron beam unit - Google Patents

Electron beam unit

Info

Publication number
JPS5652856A
JPS5652856A JP13054780A JP13054780A JPS5652856A JP S5652856 A JPS5652856 A JP S5652856A JP 13054780 A JP13054780 A JP 13054780A JP 13054780 A JP13054780 A JP 13054780A JP S5652856 A JPS5652856 A JP S5652856A
Authority
JP
Japan
Prior art keywords
electron beam
beam unit
unit
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13054780A
Other languages
English (en)
Other versions
JPS6329782B2 (ja
Inventor
Jiyan Furima Haiko
Baruto Ru Pooru Jiyan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of JPS5652856A publication Critical patent/JPS5652856A/ja
Publication of JPS6329782B2 publication Critical patent/JPS6329782B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Lasers (AREA)
JP13054780A 1979-09-19 1980-09-19 Electron beam unit Granted JPS5652856A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7906958A NL7906958A (nl) 1979-09-19 1979-09-19 Metaaldraadkathode voor elektronenstraalapparaat.

Publications (2)

Publication Number Publication Date
JPS5652856A true JPS5652856A (en) 1981-05-12
JPS6329782B2 JPS6329782B2 (ja) 1988-06-15

Family

ID=19833868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13054780A Granted JPS5652856A (en) 1979-09-19 1980-09-19 Electron beam unit

Country Status (11)

Country Link
US (1) US4419561A (ja)
JP (1) JPS5652856A (ja)
BR (1) BR8008838A (ja)
CA (1) CA1151320A (ja)
DE (1) DE3034598C2 (ja)
FR (1) FR2466096A1 (ja)
GB (1) GB2059149B (ja)
IT (1) IT1141056B (ja)
NL (1) NL7906958A (ja)
SE (1) SE437585B (ja)
WO (1) WO1981000929A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8302275A (nl) * 1983-06-28 1985-01-16 Philips Nv Electronenstraalapparaat met metaaldraadbron.
CN86105432A (zh) * 1985-09-27 1987-05-27 美国电话电报公司 带电粒子束曝光

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357760A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Electron beam exposure apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL74193C (ja) * 1948-05-10
US3466487A (en) * 1967-06-16 1969-09-09 United Aircraft Corp Device for moving a beam of charged particles
NL7018701A (ja) * 1970-12-23 1972-06-27
JPS4929969A (ja) * 1972-07-20 1974-03-16
JPS5412675A (en) * 1977-06-30 1979-01-30 Jeol Ltd Electon beam exposure method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357760A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Electron beam exposure apparatus

Also Published As

Publication number Publication date
US4419561A (en) 1983-12-06
IT8024696A0 (it) 1980-09-16
IT1141056B (it) 1986-10-01
WO1981000929A1 (en) 1981-04-02
GB2059149A (en) 1981-04-15
SE8006463L (sv) 1981-03-20
GB2059149B (en) 1984-01-18
NL7906958A (nl) 1981-03-23
CA1151320A (en) 1983-08-02
BR8008838A (pt) 1981-06-30
FR2466096B1 (ja) 1984-12-14
SE437585B (sv) 1985-03-04
DE3034598C2 (de) 1985-05-15
JPS6329782B2 (ja) 1988-06-15
DE3034598A1 (de) 1981-04-09
FR2466096A1 (fr) 1981-03-27

Similar Documents

Publication Publication Date Title
GB2065363B (en) Free electron lasers
JPS56124282A (en) Free electron laser system
JPS56160748A (en) Electron beam tube
GB8303114D0 (en) Cathode
JPS55121260A (en) Cathode
EP0031579A3 (en) Electron beam apparatus
JPS54112173A (en) Electron beam system
GB2026732B (en) Electron beam welding
GB2060044B (en) Beam restoration
DE3067625D1 (en) Electron beam system
JPS56107455A (en) Device for affecting electron beam
GB2041635B (en) Electron tube
GB2060221B (en) Electron beam welding
JPS55163734A (en) Beam switch
IL57359A (en) Beam
JPS55133738A (en) Device for moving electron beam
JPS5638757A (en) Electron beam device
GB2075574B (en) Beam
GB2058638B (en) Electron beam welding
JPS5652856A (en) Electron beam unit
JPS5592452A (en) I beam
JPS5651700A (en) Electron beam irradiation device
JPS5442980A (en) Electron beam unit
JPS55104800A (en) Beam deflection device
JPS55119335A (en) Electron tube