JPS55104800A - Beam deflection device - Google Patents

Beam deflection device

Info

Publication number
JPS55104800A
JPS55104800A JP1306879A JP1306879A JPS55104800A JP S55104800 A JPS55104800 A JP S55104800A JP 1306879 A JP1306879 A JP 1306879A JP 1306879 A JP1306879 A JP 1306879A JP S55104800 A JPS55104800 A JP S55104800A
Authority
JP
Japan
Prior art keywords
deflection device
beam deflection
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1306879A
Other languages
Japanese (ja)
Inventor
Takenori Tounai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1306879A priority Critical patent/JPS55104800A/en
Publication of JPS55104800A publication Critical patent/JPS55104800A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP1306879A 1979-02-07 1979-02-07 Beam deflection device Pending JPS55104800A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1306879A JPS55104800A (en) 1979-02-07 1979-02-07 Beam deflection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1306879A JPS55104800A (en) 1979-02-07 1979-02-07 Beam deflection device

Publications (1)

Publication Number Publication Date
JPS55104800A true JPS55104800A (en) 1980-08-11

Family

ID=11822819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1306879A Pending JPS55104800A (en) 1979-02-07 1979-02-07 Beam deflection device

Country Status (1)

Country Link
JP (1) JPS55104800A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237500A (en) * 1988-03-18 1989-09-21 Mitsubishi Electric Corp Electron beam irradiation device
JPH10308191A (en) * 1997-05-07 1998-11-17 Nissin Electric Co Ltd Ion implantation device
JPH1173899A (en) * 1997-08-28 1999-03-16 Hitachi Ltd Energy filter and electron microscope having it

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104097A (en) * 1973-01-22 1974-10-02
JPS538500A (en) * 1976-07-09 1978-01-25 Cgr Mev Radiation unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104097A (en) * 1973-01-22 1974-10-02
JPS538500A (en) * 1976-07-09 1978-01-25 Cgr Mev Radiation unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237500A (en) * 1988-03-18 1989-09-21 Mitsubishi Electric Corp Electron beam irradiation device
JPH10308191A (en) * 1997-05-07 1998-11-17 Nissin Electric Co Ltd Ion implantation device
JPH1173899A (en) * 1997-08-28 1999-03-16 Hitachi Ltd Energy filter and electron microscope having it

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