NL7010208A - - Google Patents

Info

Publication number
NL7010208A
NL7010208A NL7010208A NL7010208A NL7010208A NL 7010208 A NL7010208 A NL 7010208A NL 7010208 A NL7010208 A NL 7010208A NL 7010208 A NL7010208 A NL 7010208A NL 7010208 A NL7010208 A NL 7010208A
Authority
NL
Netherlands
Application number
NL7010208A
Inventor
E Kooi
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NL666614016A external-priority patent/NL153374B/xx
Priority claimed from NL7002384.A external-priority patent/NL159817B/xx
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7010208A priority Critical patent/NL7010208A/xx
Priority to CA117451A priority patent/CA933675A/en
Priority to CH1001371A priority patent/CH542517A/de
Priority to CH1001271A priority patent/CH539949A/de
Priority to GB3184571A priority patent/GB1353997A/en
Priority to CA117580A priority patent/CA926029A/en
Priority to CH1000771A priority patent/CH533364A/de
Priority to SE08805/71A priority patent/SE368480B/xx
Priority to SE08804/71A priority patent/SE368479B/xx
Priority to CA117,581A priority patent/CA1102012A/en
Priority to SE7108803A priority patent/SE383581B/xx
Priority to GB186774A priority patent/GB1365281A/en
Priority to GB3184371A priority patent/GB1363515A/en
Priority to BE769734A priority patent/BE769734A/xx
Priority to ES393039A priority patent/ES393039A2/es
Priority to DE2133980A priority patent/DE2133980C3/de
Priority to BE769733A priority patent/BE769733R/xx
Priority to ES393041A priority patent/ES393041A1/es
Priority to BE769735A priority patent/BE769735A/xx
Priority to DE19712133981 priority patent/DE2133981C3/de
Priority to AT594171A priority patent/AT344788B/de
Priority to DE2133982A priority patent/DE2133982C2/de
Priority to ES393040A priority patent/ES393040A1/es
Priority to IT26784/71A priority patent/IT995017B/it
Priority to FR7125298A priority patent/FR2098324B1/fr
Priority to FR7125299A priority patent/FR2098325B1/fr
Priority to FR7125297A priority patent/FR2098323B2/fr
Priority to JP46050732A priority patent/JPS5010101B1/ja
Priority to JP46050731A priority patent/JPS517550B1/ja
Publication of NL7010208A publication Critical patent/NL7010208A/xx
Priority to JP50141236A priority patent/JPS522273B2/ja
Priority to HK592/76*UA priority patent/HK59276A/xx
Priority to HK585/76*UA priority patent/HK58576A/xx
Priority to HK595/76*UA priority patent/HK59576A/xx
Priority to NLAANVRAGE8002038,A priority patent/NL176414C/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76205—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO in a region being recessed from the surface, e.g. in a recess, groove, tub or trench region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76213—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO introducing electrical inactive or active impurities in the local oxidation region, e.g. to alter LOCOS oxide growth characteristics or for additional isolation purpose
    • H01L21/76216—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO introducing electrical inactive or active impurities in the local oxidation region, e.g. to alter LOCOS oxide growth characteristics or for additional isolation purpose introducing electrical active impurities in the local oxidation region for the sole purpose of creating channel stoppers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/112—Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401—Combinations of FETs or IGBTs with BJTs
    • H10D84/403—Combinations of FETs or IGBTs with BJTs and with one or more of diodes, resistors or capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/611—Combinations of BJTs and one or more of diodes, resistors or capacitors
    • H10D84/613—Combinations of vertical BJTs and one or more of diodes, resistors or capacitors
    • H10D84/615—Combinations of vertical BJTs and one or more of resistors or capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
NL7010208A 1966-10-05 1970-07-10 NL7010208A (enrdf_load_stackoverflow)

Priority Applications (34)

Application Number Priority Date Filing Date Title
NL7010208A NL7010208A (enrdf_load_stackoverflow) 1966-10-05 1970-07-10
CA117451A CA933675A (en) 1970-07-10 1971-07-06 Method of manufacturing a semiconductor device and semiconductor device obtained by using the method
GB3184371A GB1363515A (en) 1970-07-10 1971-07-07 Manufacture of semiconductor devices
GB186774A GB1365281A (en) 1970-07-10 1971-07-07 Manufacture of semiconductor devices
CA117580A CA926029A (en) 1970-07-10 1971-07-07 Semiconductor device having a transistor
CH1001271A CH539949A (de) 1970-07-10 1971-07-07 Verfahren zur Herstellung einer Halbleiteranordnung und durch dieses Verfahren hergestellte Halbleiteranordnung
GB3184571A GB1353997A (en) 1970-07-10 1971-07-07 Semiconductor integrated devices
CH1001371A CH542517A (de) 1970-07-10 1971-07-07 Halbleitervorrichtung mit einem Transistor und Verfahren zur Herstellung der Halbleitervorrichtung
CH1000771A CH533364A (de) 1970-07-10 1971-07-07 Monolitische, intergrierte Schaltung
SE08805/71A SE368480B (enrdf_load_stackoverflow) 1970-07-10 1971-07-07
SE08804/71A SE368479B (enrdf_load_stackoverflow) 1970-07-10 1971-07-07
CA117,581A CA1102012A (en) 1970-07-10 1971-07-07 Semiconductor device, in particular integrated monolithic circuit, and method of manufacturing same
SE7108803A SE383581B (sv) 1970-07-10 1971-07-07 Forfarande for framstellning av en halvledaranordning
DE2133982A DE2133982C2 (de) 1970-07-10 1971-07-08 Integriertes Halbleiterbauelement mit einer von einer vergrabenen Schicht gebildeten leitenden Verbindung
ES393040A ES393040A1 (es) 1970-07-10 1971-07-08 Un dispositivo semiconductor.
DE2133980A DE2133980C3 (de) 1966-10-05 1971-07-08 Verfahren zur Herstellung einer integrierten Halbleiterschaltung
ES393039A ES393039A2 (es) 1970-07-10 1971-07-08 Un metodo de fabricar un dispositivo semiconductor.
BE769734A BE769734A (fr) 1970-07-10 1971-07-08 Dispositif semiconducteur comportant un transistor
BE769733A BE769733R (fr) 1970-07-10 1971-07-08 Dispositif semiconducteur et procede pour sa
ES393041A ES393041A1 (es) 1970-07-10 1971-07-08 Un dispositivo semiconductor.
BE769735A BE769735A (fr) 1970-07-10 1971-07-08 Dispositif semiconducteur, en particulier circuit monolithique integre,et procede de fabrication de ce dispositif
DE19712133981 DE2133981C3 (de) 1970-07-10 1971-07-08 Halbleiterbauelement mit einem Halbleiterkörper mit einem Transistor und Verfahren zu seiner Herstellung
AT594171A AT344788B (de) 1970-07-10 1971-07-08 Verfahren zur herstellung einer integrierten monolithischen halbleiteranordnung
FR7125297A FR2098323B2 (enrdf_load_stackoverflow) 1966-10-05 1971-07-09
FR7125299A FR2098325B1 (enrdf_load_stackoverflow) 1970-07-10 1971-07-09
FR7125298A FR2098324B1 (enrdf_load_stackoverflow) 1970-07-10 1971-07-09
IT26784/71A IT995017B (it) 1970-07-10 1971-07-09 Metodo di fabbricazione di un di spositivo semiconduttore e dispo sitivo semiconduttore ottenuto con l ausilio di tale metodo
JP46050732A JPS5010101B1 (enrdf_load_stackoverflow) 1970-07-10 1971-07-10
JP46050731A JPS517550B1 (enrdf_load_stackoverflow) 1970-07-10 1971-07-10
JP50141236A JPS522273B2 (enrdf_load_stackoverflow) 1970-07-10 1975-11-27
HK592/76*UA HK59276A (en) 1970-07-10 1976-09-23 Manufacture of semiconductor device
HK585/76*UA HK58576A (en) 1970-07-10 1976-09-23 Improvements in and relating to semiconductor integrated devices
HK595/76*UA HK59576A (en) 1970-07-10 1976-09-23 Manufacture of semiconductor devices
NLAANVRAGE8002038,A NL176414C (nl) 1970-07-10 1980-04-08 Werkwijze ter vervaardiging van een halfgeleiderinrichting.

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL666614016A NL153374B (nl) 1966-10-05 1966-10-05 Werkwijze ter vervaardiging van een halfgeleiderinrichting voorzien van een oxydelaag en halfgeleiderinrichting vervaardigd volgens de werkwijze.
NL7002384.A NL159817B (nl) 1966-10-05 1970-02-19 Werkwijze ter vervaardiging van een halfgeleiderinrichting.
NL7010208A NL7010208A (enrdf_load_stackoverflow) 1966-10-05 1970-07-10

Publications (1)

Publication Number Publication Date
NL7010208A true NL7010208A (enrdf_load_stackoverflow) 1972-01-12

Family

ID=27351385

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7010208A NL7010208A (enrdf_load_stackoverflow) 1966-10-05 1970-07-10

Country Status (2)

Country Link
DE (1) DE2133980C3 (enrdf_load_stackoverflow)
NL (1) NL7010208A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3886000A (en) * 1973-11-05 1975-05-27 Ibm Method for controlling dielectric isolation of a semiconductor device
FR2252638B1 (enrdf_load_stackoverflow) * 1973-11-23 1978-08-04 Commissariat Energie Atomique
FR2341201A1 (fr) * 1976-02-16 1977-09-09 Radiotechnique Compelec Procede d'isolement entre regions d'un dispositif semiconducteur et dispositif ainsi obtenu

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3386865A (en) * 1965-05-10 1968-06-04 Ibm Process of making planar semiconductor devices isolated by encapsulating oxide filled channels
US3442011A (en) * 1965-06-30 1969-05-06 Texas Instruments Inc Method for isolating individual devices in an integrated circuit monolithic bar
NL153374B (nl) * 1966-10-05 1977-05-16 Philips Nv Werkwijze ter vervaardiging van een halfgeleiderinrichting voorzien van een oxydelaag en halfgeleiderinrichting vervaardigd volgens de werkwijze.
US3488564A (en) * 1968-04-01 1970-01-06 Fairchild Camera Instr Co Planar epitaxial resistors
US3649386A (en) * 1968-04-23 1972-03-14 Bell Telephone Labor Inc Method of fabricating semiconductor devices

Also Published As

Publication number Publication date
DE2133980A1 (de) 1972-01-13
DE2133980C3 (de) 1983-12-22
DE2133980B2 (de) 1979-07-05

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Legal Events

Date Code Title Description
BN A decision not to publish the application has become irrevocable