NL7004247A - - Google Patents

Info

Publication number
NL7004247A
NL7004247A NL7004247A NL7004247A NL7004247A NL 7004247 A NL7004247 A NL 7004247A NL 7004247 A NL7004247 A NL 7004247A NL 7004247 A NL7004247 A NL 7004247A NL 7004247 A NL7004247 A NL 7004247A
Authority
NL
Netherlands
Prior art keywords
beams
sub
another
disclosed
superimposed
Prior art date
Application number
NL7004247A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7004247A priority Critical patent/NL7004247A/xx
Priority to DE19712112229 priority patent/DE2112229C3/de
Priority to JP1612271A priority patent/JPS532076B1/ja
Priority to FR7110175A priority patent/FR2088257B2/fr
Priority to GB2485171A priority patent/GB1350440A/en
Publication of NL7004247A publication Critical patent/NL7004247A/xx
Priority to US00348686A priority patent/US3849003A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
NL7004247A 1970-03-25 1970-03-25 NL7004247A (enrdf_load_html_response)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL7004247A NL7004247A (enrdf_load_html_response) 1970-03-25 1970-03-25
DE19712112229 DE2112229C3 (de) 1970-03-25 1971-03-13 Verfahren zum optischen Messen der Rauhigkeit einer Oberfläche und Vorrichtung zur Durchführung dieses Verfahrens
JP1612271A JPS532076B1 (enrdf_load_html_response) 1970-03-25 1971-03-22
FR7110175A FR2088257B2 (enrdf_load_html_response) 1970-03-25 1971-03-23
GB2485171A GB1350440A (en) 1970-03-25 1971-04-19 Apparatus for measuring surface roughness
US00348686A US3849003A (en) 1970-03-25 1973-04-06 Interferometer apparatus for measuring the roughness of a surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7004247A NL7004247A (enrdf_load_html_response) 1970-03-25 1970-03-25

Publications (1)

Publication Number Publication Date
NL7004247A true NL7004247A (enrdf_load_html_response) 1971-09-28

Family

ID=19809670

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7004247A NL7004247A (enrdf_load_html_response) 1970-03-25 1970-03-25

Country Status (4)

Country Link
JP (1) JPS532076B1 (enrdf_load_html_response)
FR (1) FR2088257B2 (enrdf_load_html_response)
GB (1) GB1350440A (enrdf_load_html_response)
NL (1) NL7004247A (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4576479A (en) * 1982-05-17 1986-03-18 Downs Michael J Apparatus and method for investigation of a surface
GB2250810A (en) * 1990-10-24 1992-06-17 Kevin Maurice Buckley Gravitational interferometry observatory
US7557929B2 (en) 2001-12-18 2009-07-07 Massachusetts Institute Of Technology Systems and methods for phase measurements
US7365858B2 (en) * 2001-12-18 2008-04-29 Massachusetts Institute Of Technology Systems and methods for phase measurements
JP5416883B2 (ja) * 2003-06-19 2014-02-12 マサチユセツツ・インスチチユート・オブ・テクノロジイ 位相測定用システムと方法

Also Published As

Publication number Publication date
JPS532076B1 (enrdf_load_html_response) 1978-01-25
FR2088257A2 (enrdf_load_html_response) 1972-01-07
GB1350440A (en) 1974-04-18
FR2088257B2 (enrdf_load_html_response) 1973-06-08
DE2112229B2 (de) 1977-05-26
DE2112229A1 (de) 1971-10-14

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