GB1350440A - Apparatus for measuring surface roughness - Google Patents

Apparatus for measuring surface roughness

Info

Publication number
GB1350440A
GB1350440A GB2485171A GB2485171A GB1350440A GB 1350440 A GB1350440 A GB 1350440A GB 2485171 A GB2485171 A GB 2485171A GB 2485171 A GB2485171 A GB 2485171A GB 1350440 A GB1350440 A GB 1350440A
Authority
GB
United Kingdom
Prior art keywords
beams
sub
another
disclosed
superimposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2485171A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1350440A publication Critical patent/GB1350440A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Abstract

1350440 Measuring surface roughness PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 19 April 1971 [25 March 1970] 24851/71 Addition to 1282516 Heading G1A In a modification of an apparatus for measuring the roughness of a surface 21 of the kind disclosed in Pat. No. 1282516 wherein two images of the surface are superimposed on one another, light from a source 22 is formed by an electrooptical modulator 24 into two sub-beams, which are polarized at right angles to one another and have a periodically varying difference in phase with respect to one another, the sub-beams being directed on to the surface 21 via beam splitting mirror 25 and an interferometer 26, which provides a mutual lateral displacement between the beams and the reflected beam passes, as shown, through an analyzer 29, the direction of polarization of which is at an angle of 45 degrees to the sub-beam. Thus two mutually coherent laterally displaced images of the portion of the surface being investigated may be superimposed on the sensitive surface of a detector 31 is enabling optical interference to take place, and the detector's output may be processed as disclosed in the above patent. A mathematical analysis is disclosed.
GB2485171A 1970-03-25 1971-04-19 Apparatus for measuring surface roughness Expired GB1350440A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7004247A NL7004247A (en) 1970-03-25 1970-03-25

Publications (1)

Publication Number Publication Date
GB1350440A true GB1350440A (en) 1974-04-18

Family

ID=19809670

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2485171A Expired GB1350440A (en) 1970-03-25 1971-04-19 Apparatus for measuring surface roughness

Country Status (4)

Country Link
JP (1) JPS532076B1 (en)
FR (1) FR2088257B2 (en)
GB (1) GB1350440A (en)
NL (1) NL7004247A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094835B1 (en) * 1982-05-17 1988-03-30 National Research Development Corporation Apparatus for investigation of a surface
GB2250810A (en) * 1990-10-24 1992-06-17 Kevin Maurice Buckley Gravitational interferometry observatory
WO2005001445A2 (en) * 2001-12-18 2005-01-06 Massachusetts Institute Of Technology Systems and methods for phase measurements
US9528817B2 (en) 2001-12-18 2016-12-27 Massachusetts Institute Of Technology Systems and methods for phase measurements

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1644720A2 (en) * 2003-06-19 2006-04-12 Massachusetts Institute Of Technology Systems and methods for phase measurements

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094835B1 (en) * 1982-05-17 1988-03-30 National Research Development Corporation Apparatus for investigation of a surface
GB2250810A (en) * 1990-10-24 1992-06-17 Kevin Maurice Buckley Gravitational interferometry observatory
WO2005001445A2 (en) * 2001-12-18 2005-01-06 Massachusetts Institute Of Technology Systems and methods for phase measurements
WO2005001445A3 (en) * 2001-12-18 2005-12-15 Massachusetts Inst Technology Systems and methods for phase measurements
US9528817B2 (en) 2001-12-18 2016-12-27 Massachusetts Institute Of Technology Systems and methods for phase measurements

Also Published As

Publication number Publication date
DE2112229A1 (en) 1971-10-14
NL7004247A (en) 1971-09-28
FR2088257B2 (en) 1973-06-08
JPS532076B1 (en) 1978-01-25
FR2088257A2 (en) 1972-01-07
DE2112229B2 (en) 1977-05-26

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee