FR2088257B2 - - Google Patents

Info

Publication number
FR2088257B2
FR2088257B2 FR7110175A FR7110175A FR2088257B2 FR 2088257 B2 FR2088257 B2 FR 2088257B2 FR 7110175 A FR7110175 A FR 7110175A FR 7110175 A FR7110175 A FR 7110175A FR 2088257 B2 FR2088257 B2 FR 2088257B2
Authority
FR
France
Prior art keywords
beams
sub
another
disclosed
superimposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7110175A
Other languages
French (fr)
Other versions
FR2088257A2 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2088257A2 publication Critical patent/FR2088257A2/fr
Application granted granted Critical
Publication of FR2088257B2 publication Critical patent/FR2088257B2/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Abstract

1350440 Measuring surface roughness PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 19 April 1971 [25 March 1970] 24851/71 Addition to 1282516 Heading G1A In a modification of an apparatus for measuring the roughness of a surface 21 of the kind disclosed in Pat. No. 1282516 wherein two images of the surface are superimposed on one another, light from a source 22 is formed by an electrooptical modulator 24 into two sub-beams, which are polarized at right angles to one another and have a periodically varying difference in phase with respect to one another, the sub-beams being directed on to the surface 21 via beam splitting mirror 25 and an interferometer 26, which provides a mutual lateral displacement between the beams and the reflected beam passes, as shown, through an analyzer 29, the direction of polarization of which is at an angle of 45 degrees to the sub-beam. Thus two mutually coherent laterally displaced images of the portion of the surface being investigated may be superimposed on the sensitive surface of a detector 31 is enabling optical interference to take place, and the detector's output may be processed as disclosed in the above patent. A mathematical analysis is disclosed.
FR7110175A 1970-03-25 1971-03-23 Expired FR2088257B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7004247A NL7004247A (en) 1970-03-25 1970-03-25

Publications (2)

Publication Number Publication Date
FR2088257A2 FR2088257A2 (en) 1972-01-07
FR2088257B2 true FR2088257B2 (en) 1973-06-08

Family

ID=19809670

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7110175A Expired FR2088257B2 (en) 1970-03-25 1971-03-23

Country Status (4)

Country Link
JP (1) JPS532076B1 (en)
FR (1) FR2088257B2 (en)
GB (1) GB1350440A (en)
NL (1) NL7004247A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4576479A (en) * 1982-05-17 1986-03-18 Downs Michael J Apparatus and method for investigation of a surface
GB2250810A (en) * 1990-10-24 1992-06-17 Kevin Maurice Buckley Gravitational interferometry observatory
US7365858B2 (en) * 2001-12-18 2008-04-29 Massachusetts Institute Of Technology Systems and methods for phase measurements
US7557929B2 (en) 2001-12-18 2009-07-07 Massachusetts Institute Of Technology Systems and methods for phase measurements
JP5416883B2 (en) * 2003-06-19 2014-02-12 マサチユセツツ・インスチチユート・オブ・テクノロジイ Phase measuring system and method

Also Published As

Publication number Publication date
JPS532076B1 (en) 1978-01-25
NL7004247A (en) 1971-09-28
GB1350440A (en) 1974-04-18
FR2088257A2 (en) 1972-01-07
DE2112229B2 (en) 1977-05-26
DE2112229A1 (en) 1971-10-14

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