GB1138225A - Improvements in or relating to optical interferometers - Google Patents
Improvements in or relating to optical interferometersInfo
- Publication number
- GB1138225A GB1138225A GB52258/66A GB5225866A GB1138225A GB 1138225 A GB1138225 A GB 1138225A GB 52258/66 A GB52258/66 A GB 52258/66A GB 5225866 A GB5225866 A GB 5225866A GB 1138225 A GB1138225 A GB 1138225A
- Authority
- GB
- United Kingdom
- Prior art keywords
- beams
- interferometer
- polarized light
- nov
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02097—Self-interferometers
- G01B9/02098—Shearing interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
1,138,225. Interferometers. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. Nov.22, 1966 [Nov.24, 1965], No.52258/66. Heading G2J. In an interferometer, radiation from source 1 is divided by semi-silvered mirror 3 into two spaced beams, at least one of which is reflected or transmitted by a test object 4, and the beams are optically combined for interference after conversion into circularly polarized light, each in the opposite sense to the other, a linear polarizer 10 being arranged in the paths of the beams after their circular polarization. The linear polarizer is rotated at constant speed whereby the phase of the intensity of the fringe pattern varies sinusoidally in time and is detected by photo-electric sensors 32,33. The phase difference between the signals from each detector, which is a measure of the height of step 12 in object 4, can be measured electrically. Quarterwave plates 6 and 7 are used to convert light passing through linear polarizers 8 and 9 into circularly polarized light. In the Michelson type interferometer of Fig.l, the two beams are provided by semi-silvered mirror 3, and the sensors 32,33 are placed behind slits on either side of the boundary in the fringe pattern due to step 12. hi the interferometer of Fig. 4 (not shown), linearly polarized light is directed on to object (45) and, on reflection is divided into two beams at birefringent prism (43) in crossed polarized relation. A quarter-wave plate (48) is placed before rotating analyser (46).
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6515207A NL6515207A (en) | 1965-11-24 | 1965-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1138225A true GB1138225A (en) | 1968-12-27 |
Family
ID=19794724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB52258/66A Expired GB1138225A (en) | 1965-11-24 | 1966-11-22 | Improvements in or relating to optical interferometers |
Country Status (7)
| Country | Link |
|---|---|
| BE (1) | BE690100A (en) |
| CH (1) | CH470651A (en) |
| DE (1) | DE1497539A1 (en) |
| FR (1) | FR1502280A (en) |
| GB (1) | GB1138225A (en) |
| NL (1) | NL6515207A (en) |
| SE (1) | SE332721B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5872629A (en) * | 1997-06-23 | 1999-02-16 | Charles Evans & Associates | Analytical depth monitor utilizing differential interferometric analysis |
| CN116448243A (en) * | 2023-06-19 | 2023-07-18 | 中国工程物理研究院激光聚变研究中心 | Three-dimensional light field self-reference measurement device and method based on cross polarized waves |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2082403A5 (en) * | 1970-03-13 | 1971-12-10 | Thomson Csf | |
| DE3031961C2 (en) * | 1980-08-25 | 1985-02-07 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Interferometric device for measuring physical quantities |
| US4647196A (en) * | 1981-01-20 | 1987-03-03 | Hitachi Metals, Ltd. | Surface flaw detection method |
-
1965
- 1965-11-24 NL NL6515207A patent/NL6515207A/xx unknown
-
1966
- 1966-11-19 DE DE19661497539 patent/DE1497539A1/en active Granted
- 1966-11-21 SE SE15924/66A patent/SE332721B/xx unknown
- 1966-11-21 CH CH1664366A patent/CH470651A/en not_active IP Right Cessation
- 1966-11-22 GB GB52258/66A patent/GB1138225A/en not_active Expired
- 1966-11-23 BE BE690100D patent/BE690100A/xx unknown
- 1966-11-24 FR FR84861A patent/FR1502280A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5872629A (en) * | 1997-06-23 | 1999-02-16 | Charles Evans & Associates | Analytical depth monitor utilizing differential interferometric analysis |
| CN116448243A (en) * | 2023-06-19 | 2023-07-18 | 中国工程物理研究院激光聚变研究中心 | Three-dimensional light field self-reference measurement device and method based on cross polarized waves |
| CN116448243B (en) * | 2023-06-19 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | Three-dimensional light field self-reference measurement device and method based on cross polarized waves |
Also Published As
| Publication number | Publication date |
|---|---|
| FR1502280A (en) | 1967-11-18 |
| NL6515207A (en) | 1967-05-25 |
| SE332721B (en) | 1971-02-15 |
| DE1497539A1 (en) | 1969-03-27 |
| BE690100A (en) | 1967-05-23 |
| CH470651A (en) | 1969-03-31 |
| DE1497539B2 (en) | 1975-07-03 |
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