NL6915771A - - Google Patents

Info

Publication number
NL6915771A
NL6915771A NL6915771A NL6915771A NL6915771A NL 6915771 A NL6915771 A NL 6915771A NL 6915771 A NL6915771 A NL 6915771A NL 6915771 A NL6915771 A NL 6915771A NL 6915771 A NL6915771 A NL 6915771A
Authority
NL
Netherlands
Application number
NL6915771A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19681805970 external-priority patent/DE1805970C/de
Application filed filed Critical
Publication of NL6915771A publication Critical patent/NL6915771A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
NL6915771A 1968-10-30 1969-10-17 NL6915771A (US20050065096A1-20050324-C00034.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681805970 DE1805970C (de) 1968-10-30 Vorrichtung zum Herstellen eines rohrförmigen Körpers aus Halbleitermaterial

Publications (1)

Publication Number Publication Date
NL6915771A true NL6915771A (US20050065096A1-20050324-C00034.png) 1970-05-04

Family

ID=5711898

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6915771A NL6915771A (US20050065096A1-20050324-C00034.png) 1968-10-30 1969-10-17

Country Status (9)

Country Link
US (2) US3892827A (US20050065096A1-20050324-C00034.png)
JP (1) JPS4843798B1 (US20050065096A1-20050324-C00034.png)
AT (1) AT308827B (US20050065096A1-20050324-C00034.png)
BE (1) BE741010A (US20050065096A1-20050324-C00034.png)
CH (1) CH534007A (US20050065096A1-20050324-C00034.png)
FR (1) FR2021901A1 (US20050065096A1-20050324-C00034.png)
GB (1) GB1263580A (US20050065096A1-20050324-C00034.png)
NL (1) NL6915771A (US20050065096A1-20050324-C00034.png)
SE (1) SE345553B (US20050065096A1-20050324-C00034.png)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276072A (en) * 1977-06-07 1981-06-30 International Telephone And Telegraph Corporation Optical fiber fabrication
US4332751A (en) * 1980-03-13 1982-06-01 The United States Of America As Represented By The United States Department Of Energy Method for fabricating thin films of pyrolytic carbon
US4488920A (en) * 1982-05-18 1984-12-18 Williams International Corporation Process of making a ceramic heat exchanger element
US4732110A (en) * 1983-04-29 1988-03-22 Hughes Aircraft Company Inverted positive vertical flow chemical vapor deposition reactor chamber
US4879074A (en) * 1986-11-27 1989-11-07 Ube Industries, Ltd. Method for coating soot on a melt contact surface
CA2065724A1 (en) * 1991-05-01 1992-11-02 Thomas R. Anthony Method of producing articles by chemical vapor deposition and the support mandrels used therein
US6464912B1 (en) * 1999-01-06 2002-10-15 Cvd, Incorporated Method for producing near-net shape free standing articles by chemical vapor deposition
JP4918224B2 (ja) * 2005-01-21 2012-04-18 昭和シェル石油株式会社 透明導電膜製膜装置及び多層透明導電膜連続製膜装置
KR20080005953A (ko) * 2005-04-10 2008-01-15 알이씨 실리콘 인코포레이티드 다결정 실리콘의 제조 방법
US9683286B2 (en) * 2006-04-28 2017-06-20 Gtat Corporation Increased polysilicon deposition in a CVD reactor
US10893577B2 (en) * 2016-09-19 2021-01-12 Corning Incorporated Millimeter wave heating of soot preform

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1141561A (fr) * 1956-01-20 1957-09-04 Cedel Procédé et moyens pour la fabrication de matériaux semi-conducteurs
US2974388A (en) * 1958-01-30 1961-03-14 Norton Co Process of making ceramic shells
US3014791A (en) * 1958-10-01 1961-12-26 Merck & Co Inc Pyrolysis apparatus
NL249150A (US20050065096A1-20050324-C00034.png) * 1959-03-25
GB944009A (en) * 1960-01-04 1963-12-11 Texas Instruments Ltd Improvements in or relating to the deposition of silicon on a tantalum article
US3178308A (en) * 1960-09-07 1965-04-13 Pfaudler Permutit Inc Chemical vapor plating process
GB1097331A (en) * 1961-05-26 1968-01-03 Secr Defence Improvements in or relating to the manufacture of ceramic articles
US3367826A (en) * 1964-05-01 1968-02-06 Atomic Energy Commission Usa Boron carbide article and method of making
DE1230915B (de) * 1965-03-26 1966-12-22 Siemens Ag Verfahren zum Herstellen von integrierten Halbleiterbauelementen
US3609829A (en) * 1968-07-12 1971-10-05 Texas Instruments Inc Apparatus for the formation of silica articles
US3534131A (en) * 1968-10-16 1970-10-13 Us Navy Method of utilizing a graphite parting layer to separate refractory articles during sintering

Also Published As

Publication number Publication date
US3781152A (en) 1973-12-25
JPS4843798B1 (US20050065096A1-20050324-C00034.png) 1973-12-20
GB1263580A (en) 1972-02-09
CH534007A (de) 1973-02-28
AT308827B (de) 1973-07-25
DE1805970A1 (de) 1970-09-17
SE345553B (US20050065096A1-20050324-C00034.png) 1972-05-29
FR2021901A1 (US20050065096A1-20050324-C00034.png) 1970-07-24
BE741010A (US20050065096A1-20050324-C00034.png) 1970-04-30
US3892827A (en) 1975-07-01
DE1805970B2 (de) 1971-09-23

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Legal Events

Date Code Title Description
BV The patent application has lapsed