Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D99/00—Subject matter not provided for in other groups of this subclass
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P50/00—Etching of wafers, substrates or parts of devices
  • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
  • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
  • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
  • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means

Applications Claiming Priority (1)

Publications (1)

Family

ID=24956905

Family Applications (1)

Country Status (8)

Families Citing this family (7)

• 1969
  • 1969-06-03 GB GB1228083D patent/GB1228083A/en not_active Expired
  • 1969-06-07 ES ES368134A patent/ES368134A1/es not_active Expired
  • 1969-06-09 DE DE1929084A patent/DE1929084C3/de not_active Expired
  • 1969-06-09 SE SE08148/69A patent/SE355692B/xx unknown
  • 1969-06-09 NL NL6908748A patent/NL6908748A/xx not_active Application Discontinuation
  • 1969-06-10 BR BR209609/69A patent/BR6909609D0/pt unknown
  • 1969-06-10 FR FR6919175A patent/FR2011513B1/fr not_active Expired
• 1974
  • 1974-12-30 MY MY57/74A patent/MY7400057A/xx unknown

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